[Scan]
initial_time=2016-02-16T05:05:53
final_time=2016-02-16T05:06:12
ip_count=19
run=1030
dataset=10
scan=807
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08779E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=5.64027E-10
ql2_vset=
ql2_vmon=-7.9751E-1
ql2_imon=2.85482E-10
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=4.8275E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=4.8281E-10
mult1=-1.04267E-8
mult2=-2.85435E-9
rf_tmon=-2.75801E-3
rf_agc=3.45893E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=3.78311E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69667E0
bslens_imon=2.59448E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.99236E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.09118E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02518E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04547E1
cs_ea1_imon=2.17454E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42521E0
lens1_imon=2.52469E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.99748E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03953E1
cs_ea2_imon=1.57547E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=3.0173E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=3.68845E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=2.86845E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15183E1
os_ea1_imon=1.88621E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63461E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24414E0
cs_ionrep_imon=1.26878E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93464E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=3.29156E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=6.31642E-10
tplens_vset=1.4E-1
tplens_vmon=1.63837E0
tplens_imon=-3.91646E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.53323E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27011E1
iondef2_imon=1.59531E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98496E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=3.90458E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26006E0
ionrepsh_imon=2.02431E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33468E1
lens5b_imon=2.18262E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.7019E-1
os_ea2_imon=-3.69609E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.2047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64861E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42163E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=2.88143E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.29326E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73111E1
iondef1_imon=1.1057E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67862E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.85709E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=2.69544E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10491E0
cs_ionaccel_imon=-1.95637E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02007E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=2.05329E-1
window_imon=-7.49045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82599E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86843E1
mask2_imon=-4.5352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.71827E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.89553E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=6.9396E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31469E0
defgridb_imon=6.00667E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33909E1
os_fil1_imon=5.14863E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.86362E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66682E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30774E1
cs_fil1_imon=1.009E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63255E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67109E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.41026E-2
os_fil2_imon=-2.31158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.77932E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.46169E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.1494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05212E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22469E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.99803E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.36177E-1
res40_imon=-2.67717E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.16536E-1	-7.97796E-1	-9.13148E0	-9.1418E0	5.38826E-3	9.34839E-2	2.73068E1	-3.26619E1	-3.26324E1	2.67908E1	1.73454E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.98592E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16774E-1	-7.97653E-1	-9.13129E0	-9.14178E0	5.29289E-3	9.34601E-2	2.73308E1	-3.26627E1	-3.26046E1	2.67845E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.96805E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16774E-1	-7.97105E-1	-9.13141E0	-9.1419E0	5.05447E-3	9.33647E-2	2.72958E1	-3.26776E1	-3.26202E1	2.68001E1	1.73374E-7	2.51248E-3	2.51248E-3	6.3074E-3	1.97294E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.16441E-1	-7.97701E-1	-9.13141E0	-9.14216E0	5.05447E-3	9.34124E-2	2.72709E1	-3.26891E1	-3.2611E1	2.681E1	1.71079E-7	2.51709E-3	2.51709E-3	6.32328E-3	1.97565E-1
5.0E0	2.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.16774E-1	-7.97844E-1	-9.13117E0	-9.14197E0	5.38826E-3	9.31978E-2	2.7364E1	-3.26482E1	-3.26494E1	2.67734E1	1.7368E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.98419E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16727E-1	-7.9782E-1	-9.13138E0	-9.14209E0	4.98295E-3	9.34601E-2	2.7346E1	-3.26404E1	-3.26236E1	2.68154E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.97559E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16655E-1	-7.98202E-1	-9.13153E0	-9.14204E0	5.10216E-3	9.31978E-2	2.73093E1	-3.2632E1	-3.26669E1	2.67787E1	1.73529E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.97388E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16011E-1	-7.97915E-1	-9.13126E0	-9.1418E0	4.673E-3	9.30548E-2	2.73063E1	-3.26699E1	-3.2605E1	2.67872E1	1.73531E-7	2.5131E-3	2.5131E-3	6.30202E-3	1.9934E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16035E-1	-7.97963E-1	-9.13162E0	-9.14211E0	5.00679E-3	9.32693E-2	2.73328E1	-3.26626E1	-3.26071E1	2.67788E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99977E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.15821E-1	-7.97653E-1	-9.13162E0	-9.14202E0	5.19753E-3	9.29832E-2	2.73124E1	-3.26517E1	-3.26413E1	2.67986E1	1.73454E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98764E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.15988E-1	-7.98035E-1	-9.1315E0	-9.14199E0	5.29289E-3	9.29832E-2	2.73009E1	-3.26597E1	-3.26206E1	2.67966E1	1.73529E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.97388E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16488E-1	-7.98011E-1	-9.13169E0	-9.14204E0	5.17368E-3	9.30071E-2	2.72847E1	-3.26374E1	-3.26092E1	2.6784E1	1.73454E-7	2.5068E-3	2.5068E-3	6.31837E-3	1.97559E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.16321E-1	-7.97915E-1	-9.13179E0	-9.14178E0	5.24521E-3	9.30309E-2	2.72817E1	-3.26879E1	-3.2623E1	2.67876E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.97903E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16226E-1	-7.98035E-1	-9.13165E0	-9.14176E0	5.29289E-3	9.32455E-2	2.73435E1	-3.26657E1	-3.26182E1	2.68331E1	1.73451E-7	2.51693E-3	2.51693E-3	6.32978E-3	1.97994E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16226E-1	-7.97677E-1	-9.13157E0	-9.1419E0	5.14984E-3	9.33647E-2	2.73305E1	-3.26632E1	-3.26089E1	2.6783E1	1.73383E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.98491E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16536E-1	-7.97415E-1	-9.13196E0	-9.14161E0	5.45979E-3	9.31978E-2	2.72865E1	-3.26392E1	-3.26422E1	2.68016E1	1.73605E-7	2.52099E-3	2.52099E-3	6.28552E-3	1.98937E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16536E-1	-7.97629E-1	-9.13174E0	-9.14178E0	5.24521E-3	9.32217E-2	2.73093E1	-3.26591E1	-3.26368E1	2.67698E1	1.73379E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16917E-1	-7.97796E-1	-9.13165E0	-9.14192E0	4.98295E-3	9.32693E-2	2.72979E1	-3.265E1	-3.26242E1	2.66574E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00325E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16512E-1	-7.97248E-1	-9.13119E0	-9.14195E0	5.34058E-3	9.33409E-2	2.73092E1	-3.26703E1	-3.26372E1	2.67788E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00534E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16369E-1	-7.9751E-1	-9.13148E0	-9.14197E0	5.29289E-3	9.35078E-2	2.73111E1	-3.27011E1	-3.26152E1	2.67862E1	1.73605E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99803E-1