[Scan]
initial_time=2016-02-16T05:06:46
final_time=2016-02-16T05:07:05
ip_count=19
run=1030
dataset=10
scan=809
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.0883E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=5.85759E-10
ql2_vset=
ql2_vmon=-7.97582E-1
ql2_imon=3.00872E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=4.78184E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=5.09763E-10
mult1=-9.82467E-9
mult2=-3.07392E-9
rf_tmon=-4.35621E-3
rf_agc=3.38984E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=3.76403E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69689E0
bslens_imon=2.72377E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19394E1
lens5a_imon=1.99996E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12545E2
lens4a_imon=2.05334E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53454E1
cs_ef1b_imon=3.08289E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04558E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05312E1
cs_ea1_imon=2.21091E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37905E0
lens1_imon=2.56449E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.99135E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0346E1
cs_ea2_imon=1.60142E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=3.03207E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.69155E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11039E1
os_restr1_imon=2.8771E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15182E1
os_ea1_imon=1.87714E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23086E0
cs_ionrep_imon=1.28996E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01593E1
cs_anode1_imon=3.29769E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=6.5769E-10
tplens_vset=1.4E-1
tplens_vmon=1.60722E0
tplens_imon=-1.36074E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26104E1
iondef3_imon=1.51577E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26633E1
iondef2_imon=1.60213E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.50785E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25151E0
ionrepsh_imon=2.03677E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.18047E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.1438E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2449E-1
os_ea2_imon=-2.2102E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.00658E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.636E0
os_ef2alow_imon=-2.21586E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.16335E-1
os_ef2bup_imon=-5.0702E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10691E1
os_restr2_imon=2.89765E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.33149E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.28173E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7349E1
iondef1_imon=1.10909E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67788E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=1.85839E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=2.80321E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.01996E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.82119E-6
window_vset=0.0E0
window_vmon=2.11937E-1
window_imon=-9.11223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.86548E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.52675E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.59942E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.9267E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.13094E0
defgridb_imon=6.21009E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33898E1
os_fil1_imon=5.26276E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.53926E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66696E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30764E1
cs_fil1_imon=1.00934E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62948E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6702E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.01958E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52179E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3945E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2223E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=1.97903E-1
chamber_ion_pmon=1.73228E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09147E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.16584E-1	-7.98035E-1	-9.13146E0	-9.14197E0	5.60284E-3	9.34362E-2	2.73086E1	-3.27204E1	-3.25871E1	2.6783E1	1.70837E-7	2.52757E-3	2.52757E-3	6.32386E-3	1.98419E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.16154E-1	-7.97987E-1	-9.13136E0	-9.14192E0	5.45979E-3	9.34839E-2	2.73657E1	-3.27111E1	-3.26003E1	2.67157E1	1.73459E-7	2.51709E-3	2.51709E-3	6.29157E-3	1.99061E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16488E-1	-7.9813E-1	-9.13155E0	-9.14185E0	5.79357E-3	9.36031E-2	2.73167E1	-3.26567E1	-3.26434E1	2.67705E1	1.73528E-7	2.51915E-3	2.51915E-3	6.29067E-3	1.99577E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16083E-1	-7.97749E-1	-9.13157E0	-9.14192E0	5.53131E-3	9.33647E-2	2.73051E1	-3.2635E1	-3.26176E1	2.68268E1	1.73531E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.98491E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16035E-1	-7.97915E-1	-9.13162E0	-9.14156E0	5.55515E-3	9.30309E-2	2.73712E1	-3.26777E1	-3.25828E1	2.67854E1	1.73531E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.98661E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.15988E-1	-7.97629E-1	-9.13155E0	-9.14173E0	5.17368E-3	9.34601E-2	2.72901E1	-3.26194E1	-3.26903E1	2.67692E1	1.73379E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.97903E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16441E-1	-7.98082E-1	-9.13119E0	-9.1418E0	5.31673E-3	9.30786E-2	2.72534E1	-3.2644E1	-3.26188E1	2.6807E1	1.73529E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.97903E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16321E-1	-7.97772E-1	-9.13146E0	-9.14176E0	5.43594E-3	9.30548E-2	2.7291E1	-3.27111E1	-3.25923E1	2.68208E1	1.73605E-7	2.51693E-3	2.51693E-3	6.30182E-3	1.98169E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.15916E-1	-7.97796E-1	-9.13124E0	-9.14192E0	5.38826E-3	9.32455E-2	2.73267E1	-3.26753E1	-3.26428E1	2.67607E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.98764E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.15988E-1	-7.98035E-1	-9.13129E0	-9.14171E0	5.55515E-3	9.30786E-2	2.72871E1	-3.26404E1	-3.26464E1	2.67656E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.99456E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16226E-1	-7.98202E-1	-9.13115E0	-9.14168E0	5.26905E-3	9.30309E-2	2.72823E1	-3.26428E1	-3.26368E1	2.67932E1	1.73454E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99803E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.16107E-1	-7.98011E-1	-9.13095E0	-9.14171E0	5.91278E-3	9.29594E-2	2.73177E1	-3.26831E1	-3.26404E1	2.67878E1	1.73605E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.98937E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16369E-1	-7.98011E-1	-9.13124E0	-9.14159E0	5.38826E-3	9.29594E-2	2.72991E1	-3.26783E1	-3.26314E1	2.67758E1	1.73454E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98937E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16655E-1	-7.98154E-1	-9.13169E0	-9.14214E0	5.31673E-3	9.30786E-2	2.72809E1	-3.26785E1	-3.26189E1	2.67788E1	1.73529E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.98075E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16631E-1	-7.97653E-1	-9.13143E0	-9.14204E0	5.45979E-3	9.29594E-2	2.737E1	-3.26777E1	-3.26152E1	2.6798E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.97388E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.1625E-1	-7.98178E-1	-9.13153E0	-9.14185E0	5.34058E-3	9.30548E-2	2.73131E1	-3.26627E1	-3.26132E1	2.678E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.96874E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16154E-1	-7.98011E-1	-9.13157E0	-9.1419E0	5.62668E-3	9.28402E-2	2.72803E1	-3.26496E1	-3.26585E1	2.6786E1	1.73303E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.96874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16345E-1	-7.97868E-1	-9.1311E0	-9.14185E0	5.24521E-3	9.3174E-2	2.72997E1	-3.26651E1	-3.26284E1	2.69043E1	1.73531E-7	2.51203E-3	2.51203E-3	6.3074E-3	1.98153E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16178E-1	-7.97629E-1	-9.13112E0	-9.14197E0	5.4121E-3	9.31025E-2	2.73153E1	-3.26591E1	-3.26314E1	2.68046E1	1.73528E-7	2.5147E-3	2.5147E-3	6.31299E-3	1.97469E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16298E-1	-7.97582E-1	-9.13124E0	-9.14178E0	5.53131E-3	9.31263E-2	2.7349E1	-3.26633E1	-3.26104E1	2.67788E1	1.73228E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.97903E-1