[Scan]
initial_time=2016-02-16T05:07:39
final_time=2016-02-16T05:07:59
ip_count=19
run=1030
dataset=10
scan=811
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=5.77891E-10
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=2.78986E-10
ql3_vset=
ql3_vmon=-9.13184E0
ql3_imon=4.71938E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=5.13518E-10
mult1=-1.10953E-8
mult2=-2.83889E-9
rf_tmon=-4.01986E-3
rf_agc=3.42353E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=3.72386E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69757E0
bslens_imon=2.65981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19666E1
lens5a_imon=1.99817E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1254E2
lens4a_imon=2.05173E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=3.07913E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02538E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05075E1
cs_ea1_imon=2.14522E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35981E0
lens1_imon=3.08738E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.99434E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03638E1
cs_ea2_imon=1.56539E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84278E1
cs_ef1a_imon=3.03361E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=3.90172E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11181E1
os_restr1_imon=2.88313E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15363E1
os_ea1_imon=1.91335E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.0913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.24523E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93802E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01572E1
cs_anode1_imon=3.28904E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.86586E-10
tplens_vset=1.4E-1
tplens_vmon=1.65012E0
tplens_imon=-2.15016E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.50699E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26915E1
iondef2_imon=1.57999E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.9877E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.59464E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29149E0
ionrepsh_imon=2.00061E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33466E1
lens5b_imon=2.19493E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.12674E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.05411E-1
os_ea2_imon=-5.10493E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06133E2
lens4b_imon=2.00654E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70968E1
cs_ef2a_imon=3.20216E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62971E0
os_ef2alow_imon=-2.53635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.28876E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11112E1
os_restr2_imon=2.8661E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30241E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.28816E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73228E1
iondef1_imon=1.10583E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67607E1
iondef4_imon=1.07808E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=1.89795E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=2.72572E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12145E0
cs_ionaccel_imon=-1.91081E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47153E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56208E1
einzel_imon=7.77125E-6
window_vset=0.0E0
window_vmon=2.14211E-1
window_imon=-9.27312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86217E1
mask2_imon=-4.12975E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=7.79068E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.41411E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.25535E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3369E0
defgridb_imon=6.51492E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3389E1
os_fil1_imon=5.15593E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.99984E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66716E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30724E1
cs_fil1_imon=1.00975E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62835E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67069E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38187E-2
os_fil2_imon=-2.25795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.98741E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57695E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29527E-1
cs_fil2_imon=-2.26374E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.87156E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22409E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.52599E-3
foreline_cvt_pmon=2.52599E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.40295E-1
res40_imon=-2.53983E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16226E-1	-7.97868E-1	-9.13148E0	-9.14199E0	5.14984E-3	9.32693E-2	2.72815E1	-3.26531E1	-3.26201E1	2.67943E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00192E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.15892E-1	-7.9782E-1	-9.13138E0	-9.14197E0	5.17368E-3	9.34601E-2	2.73161E1	-3.26389E1	-3.2634E1	2.67701E1	1.73532E-7	2.51919E-3	2.51919E-3	6.29157E-3	2.00567E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16274E-1	-7.98202E-1	-9.13172E0	-9.14152E0	5.26905E-3	9.31978E-2	2.73358E1	-3.26405E1	-3.26654E1	2.67955E1	1.73526E-7	2.51838E-3	2.51838E-3	6.29603E-3	2.00244E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.15845E-1	-7.97987E-1	-9.13143E0	-9.14171E0	5.50747E-3	9.32455E-2	2.73105E1	-3.26693E1	-3.26314E1	2.6798E1	1.73533E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.98628E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16202E-1	-7.98082E-1	-9.13146E0	-9.14207E0	5.34058E-3	9.32932E-2	2.73532E1	-3.26699E1	-3.26422E1	2.67968E1	1.73605E-7	2.51804E-3	2.51804E-3	6.29624E-3	1.98696E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16083E-1	-7.98178E-1	-9.13148E0	-9.14152E0	5.62668E-3	9.32693E-2	2.72787E1	-3.26603E1	-3.26002E1	2.68118E1	1.73457E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.9883E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16464E-1	-7.97796E-1	-9.13188E0	-9.14161E0	5.22137E-3	9.31025E-2	2.73129E1	-3.27029E1	-3.26044E1	2.67992E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.9963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.15773E-1	-7.98225E-1	-9.13155E0	-9.14176E0	5.67436E-3	9.31263E-2	2.72751E1	-3.26867E1	-3.25894E1	2.68292E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98592E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16178E-1	-7.9782E-1	-9.13177E0	-9.14161E0	5.29289E-3	9.31263E-2	2.72803E1	-3.26649E1	-3.26207E1	2.67607E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.9963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16298E-1	-7.97653E-1	-9.13179E0	-9.14183E0	5.76973E-3	9.31263E-2	2.73411E1	-3.26693E1	-3.26272E1	2.68376E1	1.73457E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.9934E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.16298E-1	-7.97606E-1	-9.13157E0	-9.14173E0	5.24521E-3	9.31263E-2	2.73093E1	-3.26164E1	-3.26753E1	2.6789E1	1.73529E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16441E-1	-7.97701E-1	-9.13162E0	-9.1418E0	5.45979E-3	9.31501E-2	2.73393E1	-3.26518E1	-3.26597E1	2.67833E1	1.73454E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.9911E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16417E-1	-7.97367E-1	-9.13186E0	-9.14152E0	5.55515E-3	9.32693E-2	2.72933E1	-3.265E1	-3.26157E1	2.67891E1	1.73379E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.00151E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16226E-1	-7.97939E-1	-9.13155E0	-9.14168E0	5.4121E-3	9.32693E-2	2.73104E1	-3.26596E1	-3.2606E1	2.67908E1	1.73605E-7	2.51562E-3	2.51562E-3	6.30311E-3	1.99554E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16393E-1	-7.97963E-1	-9.13134E0	-9.14159E0	5.55515E-3	9.29356E-2	2.72865E1	-3.26795E1	-3.26218E1	2.67794E1	1.73454E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.16441E-1	-7.97939E-1	-9.13167E0	-9.1418E0	5.48363E-3	9.31025E-2	2.73165E1	-3.26567E1	-3.26122E1	2.67764E1	1.73531E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.99E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16536E-1	-7.98011E-1	-9.13167E0	-9.1418E0	5.38826E-3	9.3317E-2	2.73009E1	-3.26603E1	-3.26603E1	2.67456E1	1.73528E-7	2.51693E-3	2.51693E-3	6.28511E-3	1.99224E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09348E0	-8.1625E-1	-7.98559E-1	-9.13162E0	-9.14204E0	5.22137E-3	9.31025E-2	2.73213E1	-3.26813E1	-3.26044E1	2.67115E1	1.73457E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.00021E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16774E-1	-7.97892E-1	-9.1316E0	-9.1418E0	5.19753E-3	9.32455E-2	2.72862E1	-3.26649E1	-3.26561E1	2.6798E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00673E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.1656E-1	-7.98035E-1	-9.13184E0	-9.1418E0	5.45979E-3	9.30786E-2	2.73228E1	-3.26915E1	-3.26425E1	2.67607E1	1.73457E-7	2.52599E-3	2.52599E-3	6.32896E-3	1.9985E-1