[Scan]
initial_time=2016-02-16T05:08:59
final_time=2016-02-16T05:09:19
ip_count=19
run=1030
dataset=10
scan=814
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-8.16011E-1
ql1_imon=5.68759E-10
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=2.78747E-10
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=5.35059E-10
ql4_vset=
ql4_vmon=-9.14161E0
ql4_imon=4.85432E-10
mult1=-9.2511E-9
mult2=-2.9016E-9
rf_tmon=-4.41509E-3
rf_agc=3.29788E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=3.90446E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65702E0
bslens_imon=2.95528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20077E1
lens5a_imon=1.99296E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53546E1
cs_ef1b_imon=3.07844E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.0218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.18693E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37835E0
lens1_imon=2.45819E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64794E1
os_ef1alow_imon=2.99538E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03655E1
cs_ea2_imon=1.58624E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8433E1
cs_ef1a_imon=3.02214E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=4.26352E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11158E1
os_restr1_imon=2.8866E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15387E1
os_ea1_imon=1.88485E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6374E1
os_ef1bup_imon=3.08504E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27701E0
cs_ionrep_imon=1.29285E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91848E2
cs_nozzle_imon=1.93302E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01525E1
cs_anode1_imon=3.28869E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=6.89137E-10
tplens_vset=1.4E-1
tplens_vmon=1.62869E0
tplens_imon=-1.52444E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25641E1
iondef3_imon=1.53097E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2682E1
iondef2_imon=1.58902E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98523E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.53229E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27759E0
ionrepsh_imon=2.04058E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33565E1
lens5b_imon=2.19006E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74837E1
cs_ef2b_imon=3.12466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.16189E-1
os_ea2_imon=-4.37493E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00664E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71038E1
cs_ef2a_imon=3.20355E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65925E0
os_ef2alow_imon=-2.37649E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65954E-1
os_ef2bup_imon=-5.2679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10614E1
os_restr2_imon=2.86332E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.31666E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02105E1
cs_anode2_imon=2.28295E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73529E1
iondef1_imon=1.09019E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67818E1
iondef4_imon=1.10206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.95506E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=2.56193E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11682E0
cs_ionaccel_imon=-2.15408E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47476E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.71912E-6
window_vset=0.0E0
window_vmon=2.07839E-1
window_imon=-9.27312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86495E1
mask2_imon=-4.47728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.29359E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.79301E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.69335E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3862E0
defgridb_imon=6.18815E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33887E1
os_fil1_imon=4.84895E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.51331E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66845E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30729E1
cs_fil1_imon=1.00942E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62812E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67267E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.41918E-2
os_fil2_imon=-2.368E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.92948E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56701E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3115E-1
cs_fil2_imon=-2.18844E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23468E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22438E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.4002E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.57875E-1
res40_imon=-2.58153E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=225
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.15916E-1	-7.97772E-1	-9.13148E0	-9.14218E0	5.10216E-3	9.32217E-2	2.73213E1	-3.2679E1	-3.25911E1	2.67839E1	1.73605E-7	2.51603E-3	2.51603E-3	6.32328E-3	1.99729E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.15821E-1	-7.9782E-1	-9.13146E0	-9.14202E0	5.17368E-3	9.33886E-2	2.72727E1	-3.26362E1	-3.26597E1	2.67619E1	1.73605E-7	2.51025E-3	2.51025E-3	6.31858E-3	1.99048E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16178E-1	-7.97939E-1	-9.13136E0	-9.14164E0	5.17368E-3	9.36031E-2	2.73093E1	-3.2614E1	-3.26747E1	2.68034E1	1.73374E-7	2.52027E-3	2.52027E-3	6.28511E-3	1.98872E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.15749E-1	-7.98225E-1	-9.13141E0	-9.14209E0	5.17368E-3	9.36508E-2	2.72951E1	-3.26679E1	-3.26502E1	2.67931E1	1.73605E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.97815E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16226E-1	-7.97915E-1	-9.1315E0	-9.14226E0	5.14984E-3	9.34362E-2	2.72678E1	-3.26891E1	-3.2602E1	2.6801E1	1.73457E-7	2.50989E-3	2.50989E-3	6.29665E-3	1.97984E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16417E-1	-7.98011E-1	-9.13172E0	-9.14223E0	5.14984E-3	9.31978E-2	2.72827E1	-3.26561E1	-3.26455E1	2.68022E1	1.73374E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.98344E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16083E-1	-7.97892E-1	-9.13153E0	-9.14187E0	5.26905E-3	9.32693E-2	2.72763E1	-3.26639E1	-3.26188E1	2.6816E1	1.73457E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.97647E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16131E-1	-7.97939E-1	-9.13119E0	-9.14183E0	5.67436E-3	9.3627E-2	2.72468E1	-3.26603E1	-3.26242E1	2.67577E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98592E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.16178E-1	-7.97868E-1	-9.13117E0	-9.14185E0	5.67436E-3	9.35316E-2	2.72877E1	-3.26855E1	-3.25689E1	2.6792E1	1.73454E-7	2.50898E-3	2.50898E-3	6.30192E-3	1.9911E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.16202E-1	-7.97844E-1	-9.13119E0	-9.14166E0	5.55515E-3	9.34362E-2	2.72786E1	-3.2616E1	-3.26496E1	2.67522E1	1.73605E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.16298E-1	-7.98082E-1	-9.13126E0	-9.1418E0	5.84126E-3	9.37462E-2	2.72696E1	-3.26428E1	-3.25942E1	2.68288E1	1.73457E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00705E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16178E-1	-7.98178E-1	-9.13134E0	-9.1419E0	5.43594E-3	9.38177E-2	2.73009E1	-3.26753E1	-3.26212E1	2.67547E1	1.73454E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.99977E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.15868E-1	-7.97701E-1	-9.13148E0	-9.14176E0	5.36442E-3	9.34839E-2	2.7357E1	-3.26655E1	-3.2613E1	2.68136E1	1.73531E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9934E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.15749E-1	-7.98035E-1	-9.13177E0	-9.14178E0	5.00679E-3	9.32693E-2	2.73261E1	-3.26212E1	-3.26591E1	2.68406E1	1.73529E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99456E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16107E-1	-7.9782E-1	-9.1315E0	-9.14166E0	5.24521E-3	9.33647E-2	2.72889E1	-3.27035E1	-3.2584E1	2.67896E1	1.73454E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.99456E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16202E-1	-7.97749E-1	-9.13148E0	-9.14173E0	5.38826E-3	9.34124E-2	2.72919E1	-3.2629E1	-3.26657E1	2.67692E1	1.70393E-7	2.51007E-3	2.51007E-3	6.33486E-3	1.9911E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.16107E-1	-7.97701E-1	-9.1315E0	-9.14171E0	5.36442E-3	9.31025E-2	2.73135E1	-3.26771E1	-3.25972E1	2.68028E1	1.73228E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16274E-1	-7.97987E-1	-9.13174E0	-9.1419E0	5.53131E-3	9.30548E-2	2.72745E1	-3.26813E1	-3.26344E1	2.66827E1	1.73454E-7	2.52647E-3	2.52647E-3	6.32936E-3	1.98075E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16441E-1	-7.97892E-1	-9.13153E0	-9.1418E0	5.36442E-3	9.3317E-2	2.72935E1	-3.26556E1	-3.26243E1	2.67914E1	1.73605E-7	2.51525E-3	2.51525E-3	6.34518E-3	1.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16011E-1	-7.98106E-1	-9.13126E0	-9.14161E0	5.14984E-3	9.3174E-2	2.73529E1	-3.2682E1	-3.25641E1	2.67818E1	1.73457E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9934E-1