[Scan]
initial_time=2016-02-16T05:09:26
final_time=2016-02-16T05:09:45
ip_count=19
run=1030
dataset=10
scan=815
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08782E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=5.69499E-10
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.64657E-10
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=4.43661E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=5.12886E-10
mult1=-1.1524E-8
mult2=-2.65684E-9
rf_tmon=-3.99515E-3
rf_agc=3.45894E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=3.79837E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64524E0
bslens_imon=2.89566E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20092E1
lens5a_imon=2.00448E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05045E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53995E1
cs_ef1b_imon=3.11605E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05257E1
cs_ea1_imon=2.19033E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41357E0
lens1_imon=2.42185E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64362E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03733E1
cs_ea2_imon=1.58208E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84028E1
cs_ef1a_imon=3.05262E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=3.721E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11496E1
os_restr1_imon=2.86593E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15655E1
os_ea1_imon=1.91045E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63365E1
os_ef1bup_imon=3.10343E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27658E0
cs_ionrep_imon=1.28898E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93563E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=3.29228E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=7.07054E-10
tplens_vset=1.4E-1
tplens_vmon=1.6145E0
tplens_imon=-8.67898E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26089E1
iondef3_imon=1.5156E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26107E1
iondef2_imon=1.57951E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98599E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=3.86369E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28883E0
ionrepsh_imon=2.05333E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33768E1
lens5b_imon=2.17454E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.25503E-1
os_ea2_imon=-5.31219E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06133E2
lens4b_imon=2.00884E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.2011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66002E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70995E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10547E1
os_restr2_imon=2.86701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01563E1
cs_anode2_imon=2.29795E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7269E1
iondef1_imon=1.08734E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67866E1
iondef4_imon=1.12269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.89496E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=2.81024E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0899E0
cs_ionaccel_imon=-2.17622E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02029E2
cs_ionfocb_imon=1.47709E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56099E1
einzel_imon=7.47881E-6
window_vset=0.0E0
window_vmon=1.92115E-1
window_imon=-7.95896E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86638E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.31057E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.64577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.44647E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49242E0
defgridb_imon=6.05809E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33886E1
os_fil1_imon=5.33484E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.53326E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66597E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30707E1
cs_fil1_imon=1.00855E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63303E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66932E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37084E-2
os_fil2_imon=-2.28755E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.65919E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53129E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2771E-1
cs_fil2_imon=-2.18544E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20229E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22317E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=1.98872E-1
chamber_ion_pmon=1.73528E-7
chamber_cvt_pmon=2.51359E-3
foreline_cvt_pmon=2.51359E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.2988E-1
res40_imon=-2.706E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.16274E-1	-7.97486E-1	-9.13177E0	-9.14187E0	5.48363E-3	9.31263E-2	2.72892E1	-3.26714E1	-3.25782E1	2.68262E1	1.73605E-7	2.52139E-3	2.52139E-3	6.30182E-3	1.97994E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.15868E-1	-7.97677E-1	-9.13143E0	-9.1419E0	5.22137E-3	9.31263E-2	2.73075E1	-3.2686E1	-3.26358E1	2.68154E1	1.73235E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9951E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.16488E-1	-7.97296E-1	-9.13143E0	-9.14209E0	5.48363E-3	9.3174E-2	2.73204E1	-3.26644E1	-3.26119E1	2.68316E1	1.73451E-7	2.51581E-3	2.51581E-3	6.28511E-3	1.99577E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16703E-1	-7.98011E-1	-9.13153E0	-9.14176E0	5.38826E-3	9.32217E-2	2.73123E1	-3.26873E1	-3.26308E1	2.68016E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.16369E-1	-7.97915E-1	-9.13146E0	-9.14187E0	4.98295E-3	9.33409E-2	2.73033E1	-3.26708E1	-3.26372E1	2.68184E1	1.73529E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16035E-1	-7.9813E-1	-9.13174E0	-9.14247E0	4.98295E-3	9.35555E-2	2.73141E1	-3.26567E1	-3.26308E1	2.68304E1	1.73605E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.9934E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.16107E-1	-7.97534E-1	-9.1315E0	-9.1419E0	4.62532E-3	9.35316E-2	2.72793E1	-3.26573E1	-3.26116E1	2.68007E1	1.73529E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16131E-1	-7.972E-1	-9.13131E0	-9.14197E0	5.24521E-3	9.3317E-2	2.7321E1	-3.26313E1	-3.26284E1	2.6825E1	1.73531E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9917E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16178E-1	-7.97892E-1	-9.13136E0	-9.14185E0	5.14984E-3	9.30548E-2	2.72997E1	-3.26693E1	-3.26272E1	2.67535E1	1.73379E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.15558E-1	-7.9813E-1	-9.13105E0	-9.1419E0	5.36442E-3	9.30786E-2	2.72955E1	-3.26651E1	-3.26326E1	2.6807E1	1.73529E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.98592E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16464E-1	-7.97725E-1	-9.13122E0	-9.14223E0	5.05447E-3	9.32455E-2	2.73099E1	-3.26729E1	-3.26326E1	2.68821E1	1.73379E-7	2.51443E-3	2.51443E-3	6.28552E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16107E-1	-7.98249E-1	-9.13105E0	-9.1419E0	5.19753E-3	9.29594E-2	2.73099E1	-3.26549E1	-3.2638E1	2.67637E1	1.73529E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.97559E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.15511E-1	-7.98321E-1	-9.1316E0	-9.1419E0	5.22137E-3	9.31978E-2	2.73267E1	-3.27047E1	-3.26639E1	2.67944E1	1.73303E-7	2.51443E-3	2.51443E-3	6.28006E-3	1.99456E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.16107E-1	-7.97653E-1	-9.13177E0	-9.14187E0	4.86374E-3	9.33647E-2	2.73198E1	-3.26602E1	-3.2606E1	2.6816E1	1.71506E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.99977E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0968E0	-8.16178E-1	-7.97868E-1	-9.13162E0	-9.14154E0	4.79221E-3	9.31501E-2	2.73204E1	-3.26725E1	-3.26456E1	2.67794E1	1.71544E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.00192E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.15868E-1	-7.98321E-1	-9.13186E0	-9.14154E0	4.79221E-3	9.30309E-2	2.73016E1	-3.26667E1	-3.26313E1	2.68476E1	1.73379E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.00499E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.1594E-1	-7.97844E-1	-9.13215E0	-9.14199E0	5.43594E-3	9.35316E-2	2.72769E1	-3.26573E1	-3.26302E1	2.67866E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99977E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.16178E-1	-7.98035E-1	-9.13179E0	-9.14187E0	4.76837E-3	9.35793E-2	2.72912E1	-3.26666E1	-3.26208E1	2.67816E1	1.7342E-7	2.51578E-3	2.51578E-3	6.32356E-3	1.99595E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.16011E-1	-7.97987E-1	-9.13179E0	-9.14178E0	5.10216E-3	9.35555E-2	2.73124E1	-3.26621E1	-3.26034E1	2.68057E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16107E-1	-7.98249E-1	-9.13169E0	-9.14204E0	4.79221E-3	9.35078E-2	2.7269E1	-3.26107E1	-3.26089E1	2.67866E1	1.73528E-7	2.51359E-3	2.51359E-3	6.31299E-3	1.98872E-1