[Scan]
initial_time=2016-02-16T05:09:52
final_time=2016-02-16T05:10:12
ip_count=19
run=1030
dataset=10
scan=816
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08837E-4
ql1_vset=
ql1_vmon=-8.16035E-1
ql1_imon=5.81276E-10
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=2.79689E-10
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=4.50861E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=4.98891E-10
mult1=-1.01141E-8
mult2=-2.69778E-9
rf_tmon=-7.341E-3
rf_agc=3.05956E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=3.65722E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65412E0
bslens_imon=2.55578E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19652E1
lens5a_imon=2.0011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05129E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.05586E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02438E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0491E1
cs_ea1_imon=2.19576E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39719E0
lens1_imon=2.61346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0384E1
cs_ea2_imon=1.57211E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84118E1
cs_ef1a_imon=3.03784E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=3.79872E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=2.86233E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15161E1
os_ea1_imon=1.89151E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.10415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26772E0
cs_ionrep_imon=1.27758E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.29697E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=6.78194E-10
tplens_vset=1.4E-1
tplens_vmon=1.64263E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26154E1
iondef3_imon=1.50145E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.58112E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98526E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=3.54362E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=2.03354E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.18747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.31295E-1
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.0067E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61197E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4817E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10739E1
os_restr2_imon=2.86665E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.31514E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.30227E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73322E1
iondef1_imon=1.08075E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67705E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.89164E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=2.55585E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0959E0
cs_ionaccel_imon=-1.92754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02041E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.81758E-6
window_vset=0.0E0
window_vmon=2.50379E-1
window_imon=-8.49956E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82595E2
mask1_imon=2.39001E-4
mask2_vset=0.0E0
mask2_vmon=-1.86626E1
mask2_imon=-4.89559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.53782E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.83125E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.35037E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59104E0
defgridb_imon=6.24725E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33916E1
os_fil1_imon=4.60203E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.68943E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66773E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30813E1
cs_fil1_imon=1.01222E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62408E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67047E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28007E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.69813E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.49552E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.04128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22368E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.50989E-3
foreline_cvt_pmon=2.50989E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.6681E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16369E-1	-7.97749E-1	-9.13146E0	-9.14145E0	5.72205E-3	9.32455E-2	2.72854E1	-3.26729E1	-3.26249E1	2.67682E1	1.73454E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.97731E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.15892E-1	-7.98249E-1	-9.13167E0	-9.14178E0	5.24521E-3	9.32693E-2	2.72935E1	-3.26499E1	-3.26095E1	2.67857E1	1.73532E-7	2.52025E-3	2.52025E-3	6.31798E-3	1.97235E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16226E-1	-7.97915E-1	-9.13165E0	-9.14154E0	5.50747E-3	9.3317E-2	2.73231E1	-3.26711E1	-3.26464E1	2.68354E1	1.73451E-7	2.51136E-3	2.51136E-3	6.31858E-3	1.97119E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16226E-1	-7.98106E-1	-9.13143E0	-9.14168E0	5.43594E-3	9.33886E-2	2.73063E1	-3.26449E1	-3.26449E1	2.68046E1	1.73303E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.98419E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16083E-1	-7.97725E-1	-9.13148E0	-9.14192E0	5.22137E-3	9.34601E-2	2.72733E1	-3.26362E1	-3.2632E1	2.68202E1	1.73605E-7	2.51417E-3	2.51417E-3	6.33436E-3	1.98153E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.15868E-1	-7.98059E-1	-9.13122E0	-9.14226E0	5.26905E-3	9.34839E-2	2.73123E1	-3.26639E1	-3.26464E1	2.6783E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.15654E-1	-7.98178E-1	-9.13143E0	-9.14195E0	5.65052E-3	9.31263E-2	2.72859E1	-3.26398E1	-3.26032E1	2.6819E1	1.73303E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98937E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16131E-1	-7.97915E-1	-9.13174E0	-9.14199E0	5.67436E-3	9.28402E-2	2.72943E1	-3.26488E1	-3.26302E1	2.678E1	1.73529E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98764E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16083E-1	-7.97844E-1	-9.13169E0	-9.14171E0	5.126E-3	9.29117E-2	2.73027E1	-3.26681E1	-3.2614E1	2.67968E1	1.7353E-7	2.51918E-3	2.51918E-3	6.31283E-3	1.98883E-1
1.3E1	0.0E0	2.0E0	5.25E2	3.53E2	-2.09503E0	-8.16035E-1	-7.97892E-1	-9.13167E0	-9.14171E0	5.36442E-3	9.2864E-2	2.73092E1	-3.26567E1	-3.26602E1	2.67728E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.15773E-1	-7.98368E-1	-9.13141E0	-9.14187E0	5.55515E-3	9.29832E-2	2.73183E1	-3.26909E1	-3.26266E1	2.6818E1	1.73454E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.98764E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.15749E-1	-7.98059E-1	-9.13169E0	-9.14185E0	5.14984E-3	9.31978E-2	2.72967E1	-3.26338E1	-3.25972E1	2.68274E1	1.72253E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.9911E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16035E-1	-7.98106E-1	-9.13193E0	-9.1418E0	5.55515E-3	9.30548E-2	2.73165E1	-3.26687E1	-3.2626E1	2.67872E1	1.70245E-7	2.52428E-3	2.52428E-3	6.28006E-3	1.98937E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.15868E-1	-7.98154E-1	-9.13193E0	-9.1419E0	5.07832E-3	9.30071E-2	2.73175E1	-3.2652E1	-3.25877E1	2.67932E1	1.73529E-7	2.5188E-3	2.5188E-3	6.3514E-3	1.98592E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16441E-1	-7.98011E-1	-9.13203E0	-9.14183E0	5.14984E-3	9.31501E-2	2.73069E1	-3.26494E1	-3.26579E1	2.67896E1	1.73605E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.15916E-1	-7.9782E-1	-9.13188E0	-9.14197E0	4.93526E-3	9.31978E-2	2.73088E1	-3.26523E1	-3.26401E1	2.67836E1	1.73454E-7	2.51771E-3	2.51771E-3	6.32661E-3	1.99024E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16298E-1	-7.97319E-1	-9.13162E0	-9.1418E0	5.36442E-3	9.33647E-2	2.73165E1	-3.26603E1	-3.26386E1	2.67608E1					
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.15845E-1	-7.97939E-1	-9.13157E0	-9.14199E0	5.50747E-3	9.33409E-2	2.72738E1	-3.26962E1	-3.26408E1	2.67416E1	1.73605E-7	2.51359E-3	2.51359E-3	6.30182E-3	2.00108E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.15845E-1	-7.97892E-1	-9.13134E0	-9.14195E0	5.72205E-3	9.29594E-2	2.72841E1	-3.2647E1	-3.25972E1	2.67824E1	1.73457E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00876E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16035E-1	-7.97915E-1	-9.1315E0	-9.14216E0	5.31673E-3	9.29356E-2	2.73322E1	-3.26885E1	-3.26154E1	2.67705E1	1.73457E-7	2.50989E-3	2.50989E-3	6.30202E-3	2.00363E-1