[Scan]
initial_time=2016-02-17T17:01:13
final_time=2016-02-17T17:01:36
ip_count=19
run=1032
dataset=4
scan=3
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.85137E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.8018E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.03189E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.63397E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.28572E-8
mult1=-9.57182E-9
mult2=-2.71861E-9
rf_tmon=-4.98708E-3
rf_agc=3.30272E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.81741E-3
ql5_imon=5.90122E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.43321E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20127E1
lens5a_imon=1.99929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05129E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53845E1
cs_ef1b_imon=2.99892E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04663E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=2.44018E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04015E0
lens1_imon=1.46708E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04045E1
cs_ea2_imon=1.55697E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=3.0018E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=1.16351E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=4.32229E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15396E1
os_ea1_imon=2.29382E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.07244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28334E0
cs_ionrep_imon=1.24297E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93589E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=3.10487E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.86221E-9
tplens_vset=0.0E0
tplens_vmon=-1.59697E0
tplens_imon=-1.45546E-8
iondef3_vset=-2.0E1
iondef3_vmon=-1.99624E1
iondef3_imon=8.65536E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98891E1
iondef2_imon=9.42682E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98386E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=8.09848E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29115E0
ionrepsh_imon=1.92683E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33898E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73216E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41372E0
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06152E2
lens4b_imon=2.0068E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.19786E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04615E0
os_ef2alow_imon=-2.69879E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25054E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.47032E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.31659E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02067E1
cs_anode2_imon=2.26587E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58011E1
iondef1_imon=5.17297E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49968E1
iondef4_imon=5.23714E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=3.02532E-8
olens1_vset=0.0E0
olens1_vmon=7.15256E-4
olens1_imon=1.37556E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-1.7978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47111E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56639E1
einzel_imon=7.61216E-6
window_vset=0.0E0
window_vmon=1.9692E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86314E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.22059E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93682E3
defgrida_imon=6.47436E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.09802E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53089E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33313E1
os_fil1_imon=9.4925E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07413E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64758E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=9.99153E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61537E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66958E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.84155E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59606E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.72003E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08816E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22646E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.32892E-2
chamber_ion_pmon=1.72103E-8
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.19648E-1
res40_imon=-2.74564E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=185
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.941E3	1.0E0	1.47E2	4.1E1	-7.40967E-2	-8.80017E1	-1.12057E-3	-8.80003E1	-2.38419E-5	5.8651E-3	9.31501E-2	1.58275E1	-1.98759E1	-1.99684E1	1.50022E1	1.73002E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.33094E-2
2.0E0	2.664E3	2.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80021E1	-8.82149E-4	-8.80001E1	-1.66893E-4	5.74589E-3	9.35316E-2	1.58125E1	-1.98711E1	-1.99918E1	1.50034E1	1.72777E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.32487E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80018E1	-3.57628E-4	-8.80003E1	0.0E0	5.79357E-3	9.33409E-2	1.58257E1	-1.99029E1	-1.99816E1	1.49806E1	1.72627E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.33297E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80021E1	-8.10623E-4	-8.80003E1	2.38419E-4	5.88894E-3	9.33886E-2	1.58268E1	-1.98364E1	-1.99313E1	1.4998E1	1.73002E-8	2.51334E-3	2.51334E-3	6.31837E-3	2.32285E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80024E1	-5.72205E-4	-8.79998E1	1.90735E-4	5.60284E-3	9.33886E-2	1.58002E1	-1.98423E1	-1.99756E1	1.503E1	1.72477E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.33094E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80023E1	-2.14577E-4	-8.80002E1	-9.53674E-5	5.60284E-3	9.34124E-2	1.58149E1	-1.98404E1	-1.99876E1	1.4965E1	1.72437E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.33706E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80023E1	-5.24521E-4	-8.80004E1	4.05312E-4	5.60284E-3	9.3174E-2	1.57934E1	-1.98502E1	-1.99959E1	1.4981E1	1.72852E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.34109E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80023E1	-8.34465E-4	-8.80002E1	2.6226E-4	5.81741E-3	9.32455E-2	1.58133E1	-1.98463E1	-1.99784E1	1.50039E1	1.72927E-8	2.52209E-3	2.52209E-3	6.33486E-3	2.32892E-2
1.2E1	1.0E2	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80022E1	-9.53674E-4	-8.80003E1	2.38419E-4	5.96046E-3	9.33647E-2	1.58065E1	-1.98621E1	-1.9975E1	1.50064E1	1.72511E-8	2.52169E-3	2.52169E-3	6.3074E-3	2.32315E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80023E1	-9.29832E-4	-8.80005E1	1.19209E-4	5.65052E-3	9.35793E-2	1.58293E1	-1.98699E1	-1.99864E1	1.5019E1	1.72584E-8	2.52061E-3	2.52061E-3	6.3074E-3	2.3291E-2
1.4E1	4.3E1	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80023E1	-1.16825E-3	-8.8E1	4.76837E-5	5.67436E-3	9.35078E-2	1.58245E1	-1.98717E1	-1.99582E1	1.50106E1	1.72289E-8	2.52362E-3	2.52362E-3	6.3074E-3	2.31639E-2
1.5E1	6.2E1	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80023E1	-8.82149E-4	-8.80002E1	-4.76837E-5	5.50747E-3	9.3174E-2	1.58255E1	-1.98486E1	-1.99749E1	1.50311E1	1.72028E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.32487E-2
1.6E1	3.42E2	1.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80023E1	-7.86781E-4	-8.80001E1	1.90735E-4	5.55515E-3	9.32455E-2	1.58032E1	-1.98645E1	-1.99682E1	1.49829E1	1.72292E-8	2.52197E-3	2.52197E-3	6.34907E-3	2.33137E-2
1.7E1	5.07E2	0.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80022E1	-7.86781E-4	-8.80004E1	1.90735E-4	5.79357E-3	9.32932E-2	1.57571E1	-1.98667E1	-1.99544E1	1.4975E1	1.72208E-8	2.51642E-3	2.51642E-3	6.3074E-3	2.32618E-2
1.8E1	2.106E3	1.0E0	7.27E2	5.0E2	-7.23964E-2	-8.8002E1	-8.10623E-4	-8.80002E1	1.43051E-4	5.48363E-3	9.34124E-2	1.58114E1	-1.98727E1	-1.99548E1	1.50266E1	1.72292E-8	2.51369E-3	2.51369E-3	6.3074E-3	2.3237E-2
1.9E1	2.583E3	1.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80024E1	-1.07288E-3	-8.80004E1	-9.53674E-5	5.48363E-3	9.3627E-2	1.57896E1	-1.98847E1	-1.99532E1	1.50184E1	1.72763E-8	2.51296E-3	2.51296E-3	6.29581E-3	2.33261E-2
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80022E1	-1.23978E-3	-8.79999E1	-2.38419E-5	5.45979E-3	9.31978E-2	1.58041E1	-1.98747E1	-1.99894E1	1.50394E1	1.72143E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.3291E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80024E1	-1.09673E-3	-8.80003E1	2.38419E-5	5.57899E-3	9.32455E-2	1.57943E1	-1.986E1	-1.99773E1	1.50062E1	1.72627E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.32689E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80023E1	-1.04904E-3	-8.8E1	-9.53674E-5	5.74589E-3	9.33647E-2	1.58023E1	-1.98452E1	-1.99702E1	1.5004E1	1.731E-8	2.5131E-3	2.5131E-3	6.31278E-3	2.33308E-2
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80023E1	-1.0252E-3	-8.80003E1	2.14577E-4	5.81741E-3	9.31025E-2	1.58011E1	-1.98891E1	-1.99624E1	1.49968E1	1.72103E-8	2.51443E-3	2.51443E-3	6.32936E-3	2.32892E-2