[Scan]
initial_time=2016-02-17T17:01:44
final_time=2016-02-17T17:02:06
ip_count=19
run=1032
dataset=4
scan=4
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.78417E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.74589E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.10866E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.68879E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.29141E-8
mult1=-9.27475E-9
mult2=-2.74873E-9
rf_tmon=-4.9755E-3
rf_agc=3.21942E-2
counter1=8
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=6.23882E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66503E0
bslens_imon=2.56803E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20108E1
lens5a_imon=1.98934E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05284E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.537E1
cs_ef1b_imon=3.00901E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02195E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05035E1
cs_ea1_imon=2.42965E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99998E0
lens1_imon=1.61947E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.554E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=2.99027E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=1.16453E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.30536E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=2.28772E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2403E0
cs_ionrep_imon=1.23014E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93392E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=3.1092E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.89182E-9
tplens_vset=0.0E0
tplens_vmon=-1.62846E0
tplens_imon=-2.8473E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99685E1
iondef3_imon=8.76908E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98782E1
iondef2_imon=9.42741E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98505E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=7.98702E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24561E0
ionrepsh_imon=1.93767E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3351E1
lens5b_imon=2.16808E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75312E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39013E0
os_ea2_imon=-5.32488E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.69158E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.32262E-1
os_ef2bup_imon=-5.44862E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=3.45374E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.31167E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.26263E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58215E1
iondef1_imon=5.07394E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50214E1
iondef4_imon=5.16506E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27965E1
olens3_imon=3.02706E-8
olens1_vset=0.0E0
olens1_vmon=7.86781E-4
olens1_imon=1.37542E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15717E0
cs_ionaccel_imon=-1.83744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=1.98121E-1
window_imon=-1.10944E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86224E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=7.45596E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.56049E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.36747E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.503E0
defgridb_imon=6.00834E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.48361E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06584E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64571E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30888E1
cs_fil1_imon=9.99038E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62324E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67041E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77472E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58254E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.87833E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22474E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.33499E-2
chamber_ion_pmon=1.72177E-8
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09147E-1
res40_imon=-2.77447E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.946E3	3.0E0	1.47E2	4.1E1	-7.40192E-2	-8.80025E1	-7.15256E-4	-8.8E1	1.43051E-4	5.57899E-3	9.31025E-2	1.58014E1	-1.9857E1	-1.99608E1	1.49622E1	1.72327E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.32285E-2
2.0E0	2.62E3	1.0E0	3.16E2	1.6E2	-7.44059E-2	-8.80023E1	-8.82149E-4	-8.79999E1	2.38419E-5	5.38826E-3	9.30309E-2	1.58104E1	-1.98591E1	-1.9952E1	1.50004E1	1.72399E-8	2.52131E-3	2.52131E-3	6.30212E-3	2.31954E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.44059E-2	-8.80024E1	-7.86781E-4	-8.80002E1	-2.38419E-5	5.29289E-3	9.29117E-2	1.57797E1	-1.98399E1	-1.99877E1	1.49976E1	1.72483E-8	2.51611E-3	2.51611E-3	6.3074E-3	2.34117E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80023E1	-7.86781E-4	-8.80001E1	9.53674E-5	5.38826E-3	9.31263E-2	1.58191E1	-1.98681E1	-1.99498E1	1.5007E1	1.7207E-8	2.51417E-3	2.51417E-3	6.29665E-3	2.32711E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.42513E-2	-8.80022E1	-6.19888E-4	-8.79999E1	1.66893E-4	5.55515E-3	9.31025E-2	1.58191E1	-1.98639E1	-1.99792E1	1.50052E1	1.72953E-8	2.51847E-3	2.51847E-3	6.29128E-3	2.33109E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80019E1	-6.67572E-4	-8.79997E1	1.43051E-4	5.62668E-3	9.32455E-2	1.57967E1	-1.98835E1	-1.99673E1	1.5007E1	1.72477E-8	2.51334E-3	2.51334E-3	6.30192E-3	2.32892E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80019E1	-4.76837E-4	-8.79999E1	-2.38419E-4	5.45979E-3	9.29117E-2	1.58038E1	-1.98859E1	-1.99885E1	1.49981E1	1.72879E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.34105E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80021E1	-3.09944E-4	-8.79998E1	9.53674E-5	5.38826E-3	9.29594E-2	1.58119E1	-1.98525E1	-1.99564E1	1.50232E1	1.72477E-8	2.51443E-3	2.51443E-3	6.34037E-3	2.32487E-2
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.42513E-2	-8.80023E1	-8.58307E-4	-8.79999E1	2.38419E-5	5.65052E-3	9.31025E-2	1.57803E1	-1.98573E1	-1.99564E1	1.50086E1	1.72658E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.33507E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80024E1	-6.67572E-4	-8.79999E1	1.90735E-4	5.14984E-3	9.29594E-2	1.57662E1	-1.98543E1	-1.99714E1	1.50076E1	1.72437E-8	2.51847E-3	2.51847E-3	6.30202E-3	2.32711E-2
1.4E1	5.3E1	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80024E1	-7.15256E-4	-8.79996E1	1.19209E-4	5.29289E-3	9.30786E-2	1.57921E1	-1.98386E1	-1.99792E1	1.49938E1	1.72437E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.33308E-2
1.5E1	6.3E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80025E1	-8.58307E-4	-8.8E1	4.05312E-4	5.65052E-3	9.26495E-2	1.58091E1	-1.98393E1	-1.99667E1	1.49968E1	1.72402E-8	2.51116E-3	2.51116E-3	6.31288E-3	2.33094E-2
1.6E1	3.17E2	0.0E0	6.47E2	4.41E2	-7.40192E-2	-8.80022E1	-6.91414E-4	-8.80002E1	2.86102E-4	5.10216E-3	9.2721E-2	1.57704E1	-1.98519E1	-1.99774E1	1.50364E1	1.72511E-8	2.51847E-3	2.51847E-3	6.30202E-3	2.33109E-2
1.7E1	5.45E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80025E1	-5.96046E-4	-8.79999E1	1.90735E-4	5.55515E-3	9.28402E-2	1.58162E1	-1.98659E1	-1.99419E1	1.49904E1	1.72402E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.33905E-2
1.8E1	2.126E3	2.0E0	7.27E2	5.0E2	-7.21643E-2	-8.8002E1	-5.72205E-4	-8.79998E1	1.43051E-4	5.53131E-3	9.28164E-2	1.57861E1	-1.98428E1	-1.9962E1	1.49884E1	1.72658E-8	2.52169E-3	2.52169E-3	6.3074E-3	2.32711E-2
1.9E1	2.747E3	2.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80022E1	-6.91414E-4	-8.80002E1	-2.38419E-5	5.29289E-3	9.30786E-2	1.58047E1	-1.98519E1	-1.9957E1	1.49902E1	1.72732E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.32315E-2
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80021E1	-7.39098E-4	-8.80001E1	7.15256E-5	5.53131E-3	9.30786E-2	1.58209E1	-1.98627E1	-1.9966E1	1.50052E1	1.72028E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.33297E-2
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80023E1	-6.4373E-4	-8.80003E1	2.86102E-4	5.57899E-3	9.31978E-2	1.58032E1	-1.98529E1	-1.99638E1	1.4979E1	1.72177E-8	2.51552E-3	2.51552E-3	6.29645E-3	2.32084E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80024E1	-4.76837E-4	-8.79999E1	1.90735E-4	5.60284E-3	9.31501E-2	1.57861E1	-1.98519E1	-1.99732E1	1.49968E1	1.7229E-8	2.50989E-3	2.50989E-3	6.32356E-3	2.3291E-2
2.3E1	8.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80024E1	-6.67572E-4	-8.8E1	1.43051E-4	5.60284E-3	9.31263E-2	1.58215E1	-1.98782E1	-1.99685E1	1.50214E1	1.72177E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.33499E-2