[Scan]
initial_time=2016-02-17T17:03:16
final_time=2016-02-17T17:03:38
ip_count=19
run=1032
dataset=4
scan=7
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.83656E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.6417E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.08774E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.63902E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.29147E-8
mult1=-9.53482E-9
mult2=-2.60175E-9
rf_tmon=-6.87498E-3
rf_agc=3.21765E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=6.02567E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65206E0
bslens_imon=2.71315E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.98191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12526E2
lens4a_imon=2.05153E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5365E1
cs_ef1b_imon=3.00198E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04669E1
cs_ea1_imon=2.43602E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02298E0
lens1_imon=1.4248E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64782E1
os_ef1alow_imon=2.98252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03938E1
cs_ea2_imon=1.55046E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84487E1
cs_ef1a_imon=2.97904E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=1.16392E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11199E1
os_restr1_imon=4.3264E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15117E1
os_ea1_imon=2.28205E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.06488E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22791E0
cs_ionrep_imon=1.25492E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93339E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02035E1
cs_anode1_imon=3.12049E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.87571E-9
tplens_vset=0.0E0
tplens_vmon=-1.59719E0
tplens_imon=-2.28099E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9975E1
iondef3_imon=8.7443E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98552E1
iondef2_imon=9.53713E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02994E2
lens6_imon=2.98523E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=8.17585E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28867E0
ionrepsh_imon=1.92634E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.18967E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74275E1
cs_ef2b_imon=3.10659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4332E0
os_ea2_imon=-5.07712E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06158E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71356E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04529E0
os_ef2alow_imon=-2.56416E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13449E-1
os_ef2bup_imon=-5.30961E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10706E1
os_restr2_imon=3.46245E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.31981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.26731E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57849E1
iondef1_imon=5.09163E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50124E1
iondef4_imon=5.26906E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=3.02914E-8
olens1_vset=0.0E0
olens1_vmon=4.76837E-4
olens1_imon=1.37736E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14694E0
cs_ionaccel_imon=-1.95599E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.4708E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55861E1
einzel_imon=7.69479E-6
window_vset=0.0E0
window_vmon=1.61503E-1
window_imon=-1.18101E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39362E-4
mask2_vset=0.0E0
mask2_vmon=-1.86199E1
mask2_imon=-8.61283E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.01353E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.55341E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.24359E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4528E0
defgridb_imon=6.31981E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.333E1
os_fil1_imon=9.49585E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06999E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64755E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30859E1
cs_fil1_imon=1.00095E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62343E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67203E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81271E-2
os_fil2_imon=-2.66919E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5104E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3527E-1
cs_fil2_imon=-2.17107E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.87156E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2268E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.33702E-2
chamber_ion_pmon=1.72927E-8
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.23295E-1
res40_imon=-2.72402E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.989E3	5.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80018E1	-6.19888E-4	-8.8E1	0.0E0	5.6982E-3	9.3174E-2	1.57879E1	-1.98676E1	-2.00015E1	1.49596E1	1.72217E-8	2.52492E-3	2.52492E-3	6.33436E-3	2.3291E-2
2.0E0	2.758E3	3.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80019E1	-2.86102E-4	-8.80001E1	-2.14577E-4	5.31673E-3	9.32217E-2	1.5806E1	-1.9869E1	-1.99957E1	1.49785E1	1.72437E-8	2.51954E-3	2.51954E-3	6.33436E-3	2.32711E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.8002E1	-4.76837E-4	-8.80001E1	-7.15256E-5	5.29289E-3	9.31263E-2	1.58018E1	-1.98886E1	-1.99558E1	1.50132E1	1.72327E-8	2.51725E-3	2.51725E-3	6.3131E-3	2.33063E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80018E1	-4.05312E-4	-8.80001E1	-1.90735E-4	5.57899E-3	9.31263E-2	1.5805E1	-1.98375E1	-1.99602E1	1.50062E1	1.72761E-8	2.51709E-3	2.51709E-3	6.32328E-3	2.32928E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80016E1	-4.76837E-4	-8.80003E1	7.15256E-5	5.17368E-3	9.32455E-2	1.58008E1	-1.98759E1	-2.00062E1	1.50088E1	1.7229E-8	2.52276E-3	2.52276E-3	6.31817E-3	2.32711E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80012E1	-6.67572E-4	-8.80001E1	2.14577E-4	5.57899E-3	9.3317E-2	1.57979E1	-1.98381E1	-1.9995E1	1.50149E1	1.72805E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.32513E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80014E1	-5.96046E-4	-8.80003E1	-2.38419E-5	5.65052E-3	9.31025E-2	1.58233E1	-1.98759E1	-1.9972E1	1.50334E1	1.72511E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.32315E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80017E1	-5.72205E-4	-8.80003E1	-1.90735E-4	5.38826E-3	9.3174E-2	1.57811E1	-1.98637E1	-1.99836E1	1.50066E1	1.72327E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.33094E-2
1.2E1	1.09E2	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80018E1	-6.4373E-4	-8.80003E1	-9.53674E-5	5.34058E-3	9.31025E-2	1.57975E1	-1.98735E1	-1.9975E1	1.50773E1	1.72747E-8	2.5147E-3	2.5147E-3	6.29624E-3	2.33492E-2
1.3E1	7.0E0	1.0E0	5.25E2	3.53E2	-7.42513E-2	-8.80022E1	-5.72205E-4	-8.80001E1	-1.43051E-4	5.43594E-3	9.3317E-2	1.57975E1	-1.98555E1	-1.99882E1	1.50322E1	1.72402E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.33499E-2
1.4E1	6.3E1	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80021E1	-3.57628E-4	-8.80002E1	7.15256E-5	5.45979E-3	9.32217E-2	1.58162E1	-1.98647E1	-1.99703E1	1.50282E1	1.72852E-8	2.5188E-3	2.5188E-3	6.28552E-3	2.33094E-2
1.5E1	4.2E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80019E1	-4.29153E-4	-8.80002E1	-1.66893E-4	5.81741E-3	9.30786E-2	1.58149E1	-1.98687E1	-1.99702E1	1.49974E1	1.72584E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.3291E-2
1.6E1	3.29E2	0.0E0	6.47E2	4.41E2	-7.47149E-2	-8.80019E1	-4.76837E-4	-8.80003E1	1.19209E-4	5.6982E-3	9.3174E-2	1.58179E1	-1.98747E1	-1.99561E1	1.4995E1	1.72217E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.33109E-2
1.7E1	5.57E2	1.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80019E1	-3.33786E-4	-8.80001E1	5.48363E-4	5.48363E-3	9.31025E-2	1.57789E1	-1.98597E1	-1.9945E1	1.49794E1	1.72402E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.32892E-2
1.8E1	2.089E3	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80022E1	-9.29832E-4	-8.80004E1	4.05312E-4	5.43594E-3	9.32217E-2	1.58125E1	-1.98464E1	-1.99618E1	1.49908E1	1.71729E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.32285E-2
1.9E1	2.584E3	2.0E0	7.68E2	5.29E2	-7.31692E-2	-8.8002E1	-9.05991E-4	-8.80001E1	-2.38419E-5	5.57899E-3	9.34124E-2	1.58061E1	-1.98729E1	-1.99467E1	1.50207E1	1.72402E-8	2.51771E-3	2.51771E-3	6.33486E-3	2.32285E-2
2.0E1	2.1E1	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80022E1	-6.4373E-4	-8.79999E1	1.90735E-4	5.67436E-3	9.32455E-2	1.5789E1	-1.98729E1	-1.99543E1	1.50178E1	1.72364E-8	2.52384E-3	2.52384E-3	6.30202E-3	2.32711E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.8002E1	-9.53674E-4	-8.80001E1	1.66893E-4	5.67436E-3	9.34124E-2	1.57943E1	-1.98411E1	-1.99992E1	1.49889E1	1.72511E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.33905E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.39421E-2	-8.80021E1	-1.0252E-3	-8.80004E1	9.53674E-5	5.74589E-3	9.32455E-2	1.58233E1	-1.98807E1	-1.99774E1	1.49566E1	1.72437E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.3291E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80021E1	-8.10623E-4	-8.80005E1	2.86102E-4	5.60284E-3	9.31978E-2	1.57849E1	-1.98552E1	-1.9975E1	1.50124E1	1.72927E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.33702E-2