[Scan]
initial_time=2016-02-17T17:03:46
final_time=2016-02-17T17:04:08
ip_count=19
run=1032
dataset=4
scan=8
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.8288E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.59926E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.06395E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.56953E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=1.28845E-8
mult1=-9.97222E-9
mult2=-2.78989E-9
rf_tmon=-3.86648E-3
rf_agc=3.47249E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=5.84578E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68155E0
bslens_imon=2.75208E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20172E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53511E1
cs_ef1b_imon=3.01449E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02047E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04817E1
cs_ea1_imon=2.4169E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01885E0
lens1_imon=1.40003E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64562E1
os_ef1alow_imon=2.97661E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04168E1
cs_ea2_imon=1.56497E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83977E1
cs_ef1a_imon=2.98982E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=1.16277E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1121E1
os_restr1_imon=4.31111E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15482E1
os_ea1_imon=2.28807E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63577E1
os_ef1bup_imon=3.076E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=1.24111E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0189E1
cs_anode1_imon=3.10832E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.78288E-9
tplens_vset=0.0E0
tplens_vmon=-1.61076E0
tplens_imon=-3.09505E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99549E1
iondef3_imon=8.60273E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9857E1
iondef2_imon=9.51235E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.9864E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=7.80129E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=1.93484E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33717E1
lens5b_imon=2.18507E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74356E1
cs_ef2b_imon=3.11249E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42435E0
os_ea2_imon=-6.06816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0617E2
lens4b_imon=2.00584E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71217E1
cs_ef2a_imon=3.18547E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07425E0
os_ef2alow_imon=-2.68579E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23874E-1
os_ef2bup_imon=-5.41734E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10863E1
os_restr2_imon=3.46419E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01775E1
cs_anode2_imon=2.26106E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58356E1
iondef1_imon=5.06332E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50116E1
iondef4_imon=5.16481E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=3.03027E-8
olens1_vset=0.0E0
olens1_vmon=7.62939E-4
olens1_imon=1.3778E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15389E0
cs_ionaccel_imon=-1.94556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47355E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.66699E-6
window_vset=0.0E0
window_vmon=1.87567E-1
window_imon=-1.06285E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.3914E-4
mask2_vset=0.0E0
mask2_vmon=-1.86112E1
mask2_imon=-8.09154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=6.96398E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.37644E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.28961E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53844E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3331E1
os_fil1_imon=9.47894E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07225E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64464E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=9.99241E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6236E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67138E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82537E-2
os_fil2_imon=-2.59968E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85444E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72934E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34521E-1
cs_fil2_imon=-2.40854E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.27701E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.3291E-2
chamber_ion_pmon=1.72584E-8
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.33924E-1
res40_imon=-2.66841E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.876E3	2.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80022E1	-9.05991E-4	-8.79997E1	3.8147E-4	5.36442E-3	9.34124E-2	1.58059E1	-1.98687E1	-1.99786E1	1.5028E1	1.72511E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.33308E-2
2.0E0	2.544E3	4.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80025E1	-9.53674E-4	-8.79998E1	3.57628E-4	5.53131E-3	9.32693E-2	1.58007E1	-1.98661E1	-1.99769E1	1.49879E1	1.72327E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.31882E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80023E1	-5.96046E-4	-8.80001E1	-4.76837E-5	5.38826E-3	9.32932E-2	1.58061E1	-1.98446E1	-1.99749E1	1.49882E1	1.72441E-8	2.52027E-3	2.52027E-3	6.3074E-3	2.32255E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80023E1	-5.72205E-4	-8.80001E1	4.76837E-5	5.6982E-3	9.33409E-2	1.57824E1	-1.98263E1	-1.99671E1	1.50197E1	1.71725E-8	2.51472E-3	2.51472E-3	6.3126E-3	2.32753E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80022E1	-7.15256E-4	-8.80002E1	7.15256E-5	5.72205E-3	9.32932E-2	1.57967E1	-1.98712E1	-1.99608E1	1.49761E1	1.72747E-8	2.51915E-3	2.51915E-3	6.33538E-3	2.33699E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.80021E1	-5.48363E-4	-8.80001E1	1.19209E-4	5.62668E-3	9.32932E-2	1.57939E1	-1.98729E1	-1.9963E1	1.504E1	1.7229E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.32117E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80021E1	-8.82149E-4	-8.80002E1	-2.38419E-5	5.93662E-3	9.32693E-2	1.57945E1	-1.98681E1	-1.9963E1	1.4962E1	1.72177E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.33702E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.8002E1	-6.4373E-4	-8.8E1	-9.53674E-5	5.88894E-3	9.3317E-2	1.58079E1	-1.99024E1	-1.9965E1	1.5028E1	1.7163E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.3291E-2
1.2E1	1.1E2	1.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80022E1	-5.72205E-4	-8.79997E1	1.90735E-4	5.72205E-3	9.31263E-2	1.57873E1	-1.98552E1	-1.99703E1	1.50051E1	1.72252E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.33297E-2
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80022E1	-5.72205E-4	-8.79999E1	2.38419E-4	5.91278E-3	9.33886E-2	1.58083E1	-1.98615E1	-1.99534E1	1.49938E1	1.72437E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.32315E-2
1.4E1	4.1E1	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.8002E1	-7.86781E-4	-8.80002E1	1.19209E-4	5.50747E-3	9.34362E-2	1.58137E1	-1.98693E1	-1.9981E1	1.50076E1	1.72552E-8	2.52538E-3	2.52538E-3	6.31288E-3	2.33297E-2
1.5E1	5.0E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80023E1	-8.34465E-4	-8.80001E1	2.14577E-4	5.57899E-3	9.35078E-2	1.58119E1	-1.9847E1	-1.99414E1	1.49998E1	1.72252E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.32689E-2
1.6E1	3.41E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80019E1	-1.00136E-3	-8.80003E1	2.38419E-4	5.67436E-3	9.33647E-2	1.58113E1	-1.98885E1	-1.99816E1	1.5007E1	1.72702E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.32487E-2
1.7E1	5.41E2	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80022E1	-1.19209E-3	-8.80003E1	-2.38419E-5	5.8651E-3	9.34362E-2	1.57819E1	-1.98224E1	-1.99702E1	1.49974E1	1.72777E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.32084E-2
1.8E1	2.094E3	1.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80021E1	-8.34465E-4	-8.80005E1	7.15256E-5	5.4121E-3	9.34362E-2	1.57789E1	-1.98693E1	-1.99522E1	1.50124E1	1.72402E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.32689E-2
1.9E1	2.677E3	2.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80022E1	-5.24521E-4	-8.80001E1	-1.66893E-4	5.4121E-3	9.29594E-2	1.58029E1	-1.98416E1	-1.99906E1	1.49926E1	1.72552E-8	2.51225E-3	2.51225E-3	6.29098E-3	2.34312E-2
2.0E1	2.9E1	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.8002E1	-4.76837E-4	-8.80001E1	4.76837E-5	5.96046E-3	9.29832E-2	1.58227E1	-1.98567E1	-1.99624E1	1.49962E1	1.72511E-8	2.51525E-3	2.51525E-3	6.30202E-3	2.32711E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80021E1	-7.15256E-4	-8.8E1	2.6226E-4	6.05583E-3	9.31501E-2	1.57938E1	-1.98499E1	-1.99679E1	1.49944E1	1.72671E-8	2.51581E-3	2.51581E-3	6.31299E-3	2.33492E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80017E1	-8.58307E-4	-8.79999E1	1.43051E-4	5.65052E-3	9.30786E-2	1.58101E1	-1.98615E1	-1.99456E1	1.50051E1	1.72658E-8	2.51525E-3	2.51525E-3	6.32896E-3	2.31919E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80019E1	-6.67572E-4	-8.80003E1	-7.15256E-5	5.72205E-3	9.3174E-2	1.58356E1	-1.9857E1	-1.99549E1	1.50116E1	1.72584E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.3291E-2