[Scan]
initial_time=2016-02-17T17:04:16
final_time=2016-02-17T17:04:36
ip_count=19
run=1032
dataset=4
scan=9
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.38649E-2
qbias_imon=-3.8393E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.74434E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.09767E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.66553E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.28985E-8
mult1=-1.03463E-8
mult2=-2.86632E-9
rf_tmon=-4.67465E-3
rf_agc=3.38365E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=6.26671E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65796E0
bslens_imon=2.54326E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.97165E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12538E2
lens4a_imon=2.05015E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53708E1
cs_ef1b_imon=3.01067E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.42717E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04599E0
lens1_imon=1.55222E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64469E1
os_ef1alow_imon=2.98252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.53878E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=2.99712E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.16395E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11106E1
os_restr1_imon=4.31632E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.28311E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63879E1
os_ef1bup_imon=3.076E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26213E0
cs_ionrep_imon=1.24147E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91924E2
cs_nozzle_imon=1.9353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01861E1
cs_anode1_imon=3.1052E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99985E1
olens4_imon=4.8533E-9
tplens_vset=0.0E0
tplens_vmon=-1.59601E0
tplens_imon=-3.34281E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00045E1
iondef3_imon=8.6275E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98832E1
iondef2_imon=9.61146E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.9824E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=8.19731E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27923E0
ionrepsh_imon=1.92316E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.20985E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.11319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43851E0
os_ea2_imon=-7.87326E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71101E1
cs_ef2a_imon=3.18339E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04066E0
os_ef2alow_imon=-2.70664E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.343E-1
os_ef2bup_imon=-5.44514E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10648E1
os_restr2_imon=3.45342E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2311E2
cs_ionfoca_imon=6.30919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.26419E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5824E1
iondef1_imon=5.01023E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50016E1
iondef4_imon=5.16133E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=3.03386E-8
olens1_vset=0.0E0
olens1_vmon=8.10623E-4
olens1_imon=1.37601E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17532E0
cs_ionaccel_imon=-1.80308E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47379E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56283E1
einzel_imon=7.68089E-6
window_vset=0.0E0
window_vmon=1.88725E-1
window_imon=-1.0837E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86193E1
mask2_imon=-7.43124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.18696E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.51801E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.46304E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53844E0
defgridb_imon=6.05435E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33291E1
os_fil1_imon=9.48096E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06808E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64659E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30898E1
cs_fil1_imon=1.00006E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61955E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67148E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.88869E-2
os_fil2_imon=-2.61706E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85444E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57241E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32648E-1
cs_fil2_imon=-2.46067E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0725E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22579E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.32487E-2
chamber_ion_pmon=1.73002E-8
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.41454E-1
res40_imon=-2.69622E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.929E3	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.8002E1	-3.8147E-4	-8.79998E1	7.15256E-5	5.48363E-3	9.35078E-2	1.57921E1	-1.98771E1	-1.99894E1	1.50034E1	1.72552E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.32892E-2
2.0E0	2.599E3	2.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80018E1	-4.76837E-4	-8.80001E1	0.0E0	5.60284E-3	9.30071E-2	1.57963E1	-1.98741E1	-1.99834E1	1.50022E1	1.72777E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.33297E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80018E1	-6.91414E-4	-8.8E1	3.57628E-4	5.55515E-3	9.35316E-2	1.57994E1	-1.98556E1	-1.99697E1	1.50161E1	1.7158E-8	2.5199E-3	2.5199E-3	6.29098E-3	2.33702E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.45602E-2	-8.80018E1	-6.4373E-4	-8.8E1	9.53674E-5	5.88894E-3	9.31025E-2	1.5811E1	-1.98359E1	-1.9979E1	1.49808E1	1.72646E-8	2.52405E-3	2.52405E-3	6.323E-3	2.33137E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.51788E-2	-8.80018E1	-3.57628E-4	-8.8E1	4.05312E-4	5.6982E-3	9.33647E-2	1.58252E1	-1.98716E1	-1.99524E1	1.50247E1	1.72658E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.33109E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.49466E-2	-8.80019E1	-6.67572E-4	-8.80001E1	5.24521E-4	5.48363E-3	9.35078E-2	1.58463E1	-1.98682E1	-1.99455E1	1.49784E1	1.72327E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.33297E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.50241E-2	-8.80022E1	-4.29153E-4	-8.80002E1	3.8147E-4	5.43594E-3	9.3317E-2	1.57783E1	-1.98549E1	-1.99678E1	1.50455E1	1.72777E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.33499E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.52559E-2	-8.8002E1	-7.86781E-4	-8.8E1	2.6226E-4	5.6982E-3	9.32217E-2	1.58131E1	-1.98422E1	-2.00153E1	1.4998E1	1.72702E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.32487E-2
1.2E1	9.8E1	1.0E0	4.85E2	3.23E2	-7.50241E-2	-8.80023E1	-7.86781E-4	-8.79999E1	1.19209E-4	5.96046E-3	9.29832E-2	1.58156E1	-1.98263E1	-1.99726E1	1.49958E1	1.72552E-8	2.51225E-3	2.51225E-3	6.30192E-3	2.33905E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.44831E-2	-8.80023E1	-1.0252E-3	-8.79999E1	7.15256E-5	5.96046E-3	9.3174E-2	1.58292E1	-1.99042E1	-1.99697E1	1.50052E1	1.72905E-8	2.51709E-3	2.51709E-3	6.3445E-3	2.33123E-2
1.4E1	4.4E1	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.8002E1	-1.00136E-3	-8.80001E1	-9.53674E-5	5.72205E-3	9.32932E-2	1.58287E1	-1.98615E1	-1.99894E1	1.49728E1	1.72702E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.31882E-2
1.5E1	4.7E1	0.0E0	6.06E2	4.11E2	-7.42513E-2	-8.80019E1	-9.05991E-4	-8.80002E1	1.66893E-4	5.76973E-3	9.31501E-2	1.57999E1	-1.98579E1	-1.99816E1	1.50196E1	1.72627E-8	2.51771E-3	2.51771E-3	6.29098E-3	2.32487E-2
1.6E1	3.68E2	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.8002E1	-1.35899E-3	-8.79999E1	1.66893E-4	5.67436E-3	9.29594E-2	1.58321E1	-1.98594E1	-1.99608E1	1.50136E1	1.72627E-8	2.52099E-3	2.52099E-3	6.32936E-3	2.35128E-2
1.7E1	4.92E2	0.0E0	6.87E2	4.7E2	-7.47149E-2	-8.80015E1	-1.09673E-3	-8.80001E1	4.76837E-5	5.88894E-3	9.32217E-2	1.57831E1	-1.98675E1	-1.99456E1	1.49926E1	1.72437E-8	2.51203E-3	2.51203E-3	6.31817E-3	2.33109E-2
1.8E1	2.123E3	3.0E0	7.27E2	5.0E2	-7.47149E-2	-8.80018E1	-9.29832E-4	-8.80001E1	-9.53674E-5	5.6982E-3	9.30309E-2	1.58174E1	-1.98535E1	-1.99437E1	1.49999E1	1.72477E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.33499E-2
1.9E1	2.73E3	0.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80017E1	-7.86781E-4	-8.8E1	-1.90735E-4	5.57899E-3	9.30309E-2	1.58029E1	-1.9835E1	-1.99702E1	1.49824E1	1.72732E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.32117E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.45602E-2	-8.80018E1	-8.34465E-4	-8.80001E1	-1.19209E-4	5.76973E-3	9.29117E-2	1.57921E1	-1.98861E1	-1.99504E1	1.50004E1	1.72805E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.33308E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.8002E1	-1.14441E-3	-8.80001E1	0.0E0	5.74589E-3	9.33886E-2	1.58156E1	-1.9857E1	-1.99579E1	1.49962E1	1.72252E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.32285E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.41738E-2	-8.80023E1	-1.23978E-3	-8.80004E1	1.19209E-4	5.36442E-3	9.33647E-2	1.58091E1	-1.98352E1	-1.99903E1	1.50022E1	1.72217E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.32711E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.38649E-2	-8.80021E1	-7.15256E-4	-8.8E1	7.15256E-5	5.76973E-3	9.30071E-2	1.5824E1	-1.98832E1	-2.00045E1	1.50016E1	1.73002E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.32487E-2