[Scan]
initial_time=2016-02-17T17:05:12
final_time=2016-02-17T17:05:33
ip_count=19
run=1032
dataset=4
scan=11
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.74382E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.95033E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.10418E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.67021E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.28775E-8
mult1=-1.16789E-8
mult2=-2.59485E-9
rf_tmon=-1.23793E-3
rf_agc=3.84226E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=5.9129E-10
bslens_vset=-6.2E0
bslens_vmon=-6.74998E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19441E1
lens5a_imon=1.95784E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=2.99964E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02181E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04776E1
cs_ea1_imon=2.43673E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0336E0
lens1_imon=1.62655E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03897E1
cs_ea2_imon=1.55081E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=2.99351E-5
olens2_vset=0.0E0
olens2_vmon=1.57356E-3
olens2_imon=1.16303E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.31328E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15435E1
os_ea1_imon=2.27285E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.24678E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=3.09623E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.9118E-9
tplens_vset=0.0E0
tplens_vmon=-1.60309E0
tplens_imon=-1.96244E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00561E1
iondef3_imon=8.61688E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98579E1
iondef2_imon=9.5796E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03009E2
lens6_imon=2.98307E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=8.16774E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22319E0
ionrepsh_imon=1.9182E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3423E1
lens5b_imon=2.19852E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74315E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4096E0
os_ea2_imon=-6.88222E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06149E2
lens4b_imon=2.0064E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.67717E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16645E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.45842E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.27274E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.2583E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5771E1
iondef1_imon=5.30754E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50286E1
iondef4_imon=5.28039E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=3.02247E-8
olens1_vset=0.0E0
olens1_vmon=7.39098E-4
olens1_imon=1.37458E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-1.95998E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47154E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=1.6088E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-8.06708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=8.07889E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93775E3
defgrida_imon=6.5888E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5009E3
multb_neg_imon=7.08786E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.06851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.48168E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06873E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64651E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3087E1
cs_fil1_imon=9.98732E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6218E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6734E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77472E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.43573E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22644E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=2.32666E-2
chamber_ion_pmon=1.729E-8
chamber_cvt_pmon=2.51804E-3
foreline_cvt_pmon=2.51804E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15153E-1
res40_imon=-2.70239E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.938E3	1.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80024E1	-7.62939E-4	-8.79998E1	-7.15256E-5	5.6982E-3	9.32932E-2	1.58041E1	-1.98597E1	-1.9975E1	1.49974E1	1.72658E-8	2.5131E-3	2.5131E-3	6.30202E-3	2.32315E-2
2.0E0	2.653E3	1.0E0	3.16E2	1.6E2	-7.22418E-2	-8.8002E1	-8.34465E-4	-8.8E1	-9.53674E-5	5.67436E-3	9.33647E-2	1.58095E1	-1.98428E1	-1.99714E1	1.4995E1	1.72364E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.32513E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80019E1	-8.34465E-4	-8.79999E1	-4.76837E-5	5.88894E-3	9.33886E-2	1.57855E1	-1.98812E1	-1.9988E1	1.49796E1	1.72594E-8	2.52139E-3	2.52139E-3	6.31858E-3	2.32461E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.8002E1	-5.72205E-4	-8.8E1	-2.86102E-4	5.8651E-3	9.30786E-2	1.57879E1	-1.98694E1	-1.9975E1	1.49854E1	1.72761E-8	2.51919E-3	2.51919E-3	6.31269E-3	2.33318E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.8002E1	-3.8147E-4	-8.80001E1	1.19209E-4	6.03199E-3	9.35555E-2	1.58251E1	-1.98765E1	-1.99696E1	1.5037E1	1.72927E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.32689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.8002E1	-5.00679E-4	-8.79999E1	-4.76837E-5	5.76973E-3	9.34124E-2	1.58173E1	-1.98621E1	-1.99708E1	1.49842E1	1.72927E-8	2.51552E-3	2.51552E-3	6.31288E-3	2.31882E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80022E1	-2.86102E-4	-8.79997E1	-1.90735E-4	6.00815E-3	9.3317E-2	1.57672E1	-1.98417E1	-1.99567E1	1.50364E1	1.72879E-8	2.5131E-3	2.5131E-3	6.3074E-3	2.32513E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80018E1	-4.05312E-4	-8.79999E1	-1.43051E-4	5.53131E-3	9.34601E-2	1.58233E1	-1.98375E1	-1.99703E1	1.50202E1	1.72627E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.32285E-2
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80018E1	-6.4373E-4	-8.79999E1	-1.43051E-4	5.48363E-3	9.34839E-2	1.57848E1	-1.98637E1	-1.99585E1	1.50064E1	1.72732E-8	2.51096E-3	2.51096E-3	6.31817E-3	2.33905E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80017E1	-9.29832E-4	-8.79998E1	-2.38419E-4	5.48363E-3	9.30309E-2	1.57903E1	-1.98735E1	-1.99372E1	1.50046E1	1.72327E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.34109E-2
1.4E1	5.4E1	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80017E1	-3.8147E-4	-8.79999E1	-3.09944E-4	5.43594E-3	9.34362E-2	1.57819E1	-1.98224E1	-1.99985E1	1.49932E1	1.729E-8	2.51693E-3	2.51693E-3	6.31299E-3	2.32873E-2
1.5E1	4.2E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80022E1	-6.19888E-4	-8.79997E1	9.53674E-5	5.31673E-3	9.31025E-2	1.58091E1	-1.98493E1	-1.99543E1	1.49944E1	1.731E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.33905E-2
1.6E1	3.14E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.8002E1	-6.91414E-4	-8.79997E1	4.76837E-5	5.57899E-3	9.30071E-2	1.58185E1	-1.98783E1	-1.99672E1	1.49746E1	1.72964E-8	2.51334E-3	2.51334E-3	6.31014E-3	2.32993E-2
1.7E1	5.27E2	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80023E1	-6.19888E-4	-8.8E1	-2.6226E-4	5.43594E-3	9.27687E-2	1.58221E1	-1.98428E1	-1.9984E1	1.50707E1					
1.8E1	2.208E3	4.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80022E1	-3.8147E-4	-8.79998E1	-1.43051E-4	5.45979E-3	9.32693E-2	1.57626E1	-1.98531E1	-1.99612E1	1.50148E1	1.72364E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.32513E-2
1.9E1	2.668E3	0.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80022E1	-5.24521E-4	-8.8E1	-1.66893E-4	5.50747E-3	9.31978E-2	1.58119E1	-1.98993E1	-1.9966E1	1.50034E1	1.73206E-8	2.5147E-3	2.5147E-3	6.29067E-3	2.33079E-2
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80018E1	-7.15256E-4	-8.80001E1	-2.14577E-4	5.34058E-3	9.31501E-2	1.57914E1	-1.98776E1	-1.99585E1	1.50264E1	1.7229E-8	2.51739E-3	2.51739E-3	6.32356E-3	2.32711E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80019E1	-4.29153E-4	-8.8E1	-4.76837E-4	5.43594E-3	9.32217E-2	1.58238E1	-1.98707E1	-1.99836E1	1.49628E1	1.72177E-8	2.51443E-3	2.51443E-3	6.29098E-3	2.32689E-2
2.2E1	1.5E1	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80021E1	-6.67572E-4	-8.79998E1	9.53674E-5	5.84126E-3	9.32932E-2	1.57971E1	-1.98367E1	-1.99683E1	1.49966E1	1.72789E-8	2.51886E-3	2.51886E-3	6.29185E-3	2.32945E-2
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.80023E1	-7.15256E-4	-8.79999E1	0.0E0	5.45979E-3	9.32693E-2	1.5771E1	-1.98579E1	-2.00561E1	1.50286E1	1.729E-8	2.51804E-3	2.51804E-3	6.31858E-3	2.32666E-2