[Scan]
initial_time=2016-02-17T17:05:40
final_time=2016-02-17T17:06:01
ip_count=19
run=1032
dataset=4
scan=12
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.89362E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.71513E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.09515E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.69517E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.28854E-8
mult1=-1.02943E-8
mult2=-2.89028E-9
rf_tmon=-3.88757E-3
rf_agc=3.4385E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=5.95045E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=3.05326E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=1.94017E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05345E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.0E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04892E1
cs_ea1_imon=2.43621E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04076E0
lens1_imon=1.56802E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64939E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03642E1
cs_ea2_imon=1.54976E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=2.99423E-5
olens2_vset=0.0E0
olens2_vmon=1.33514E-3
olens2_imon=1.16286E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.32049E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15582E1
os_ea1_imon=2.27039E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=1.24117E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=3.09947E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.89974E-9
tplens_vset=0.0E0
tplens_vmon=-1.59457E0
tplens_imon=-3.4621E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99906E1
iondef3_imon=9.09516E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98711E1
iondef2_imon=9.35111E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02977E2
lens6_imon=2.98577E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=8.44479E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27733E0
ionrepsh_imon=1.89151E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.20838E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73804E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4738E0
os_ea2_imon=-9.41028E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00789E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.33464E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.44761E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23123E2
cs_ionfoca_imon=6.27405E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.25902E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58071E1
iondef1_imon=5.29554E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49974E1
iondef4_imon=5.32724E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27966E1
olens3_imon=3.03014E-8
olens1_vset=0.0E0
olens1_vmon=3.09944E-4
olens1_imon=1.37817E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-1.978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=1.81904E-1
window_imon=-1.10944E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82598E2
mask1_imon=2.38972E-4
mask2_vset=0.0E0
mask2_vmon=-1.86158E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.84424E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.88893E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=6.7195E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61811E0
defgridb_imon=5.71732E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33281E1
os_fil1_imon=9.47448E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07191E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64324E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.99243E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61513E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67366E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81576E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84741E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.17343E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22622E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.32285E-2
chamber_ion_pmon=1.72627E-8
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.58691E-1
res40_imon=-2.64113E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.006E3	2.0E0	1.47E2	4.1E1	-7.47149E-2	-8.80018E1	-5.72205E-4	-8.80002E1	-4.76837E-5	5.48363E-3	9.30786E-2	1.57698E1	-1.98464E1	-1.9975E1	1.49896E1	1.73303E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.32487E-2
2.0E0	2.629E3	2.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80019E1	-6.67572E-4	-8.8E1	-1.43051E-4	5.38826E-3	9.31978E-2	1.58149E1	-1.98711E1	-1.99756E1	1.49884E1	1.72627E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.33094E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.39421E-2	-8.80023E1	-7.86781E-4	-8.80001E1	1.43051E-4	5.43594E-3	9.28879E-2	1.58132E1	-1.98375E1	-1.99821E1	1.50184E1	1.72852E-8	2.51225E-3	2.51225E-3	6.32386E-3	2.32892E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80022E1	-8.34465E-4	-8.79998E1	2.38419E-4	5.98431E-3	9.32455E-2	1.57873E1	-1.98573E1	-1.99937E1	1.50016E1	1.72217E-8	2.52061E-3	2.52061E-3	6.33436E-3	2.32315E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80022E1	-8.10623E-4	-8.79998E1	-2.14577E-4	5.55515E-3	9.32217E-2	1.58215E1	-1.98675E1	-1.99786E1	1.50827E1	1.72658E-8	2.51525E-3	2.51525E-3	6.32356E-3	2.33109E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80023E1	-6.19888E-4	-8.79999E1	-1.90735E-4	5.65052E-3	9.33647E-2	1.57993E1	-1.98519E1	-1.9981E1	1.51055E1	1.729E-8	2.5225E-3	2.5225E-3	6.31858E-3	2.32255E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.8002E1	-4.76837E-4	-8.79997E1	1.43051E-4	5.53131E-3	9.29832E-2	1.58103E1	-1.98629E1	-1.99838E1	1.50601E1	1.72953E-8	2.51847E-3	2.51847E-3	6.29665E-3	2.31721E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.8002E1	-4.76837E-4	-8.79999E1	-9.53674E-5	5.96046E-3	9.30786E-2	1.58139E1	-1.98585E1	-1.99697E1	1.49634E1	1.72327E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.33499E-2
1.2E1	9.3E1	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80023E1	-6.67572E-4	-8.79999E1	1.66893E-4	5.67436E-3	9.30548E-2	1.57603E1	-1.98526E1	-1.99836E1	1.49991E1	1.73073E-8	2.52301E-3	2.52301E-3	6.28667E-3	2.32179E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80019E1	-5.24521E-4	-8.80001E1	2.14577E-4	5.48363E-3	9.32693E-2	1.58118E1	-1.98704E1	-1.99714E1	1.49872E1	1.72716E-8	2.51611E-3	2.51611E-3	6.29603E-3	2.33273E-2
1.4E1	3.2E1	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80019E1	-4.76837E-4	-8.79999E1	1.19209E-4	5.53131E-3	9.33886E-2	1.57939E1	-1.98362E1	-1.99852E1	1.50202E1	1.72402E-8	2.52428E-3	2.52428E-3	6.34037E-3	2.32892E-2
1.5E1	4.7E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80022E1	-8.34465E-4	-8.8E1	7.15256E-5	5.57899E-3	9.33409E-2	1.57735E1	-1.98729E1	-1.9975E1	1.49223E1	1.73002E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.32689E-2
1.6E1	3.61E2	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80021E1	-6.91414E-4	-8.79999E1	-4.76837E-5	5.60284E-3	9.33409E-2	1.58702E1	-1.99318E1	-1.98597E1	1.49343E1	1.72852E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.32892E-2
1.7E1	5.23E2	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80022E1	-4.05312E-4	-8.79999E1	-4.52995E-4	5.34058E-3	9.35078E-2	1.57939E1	-1.98374E1	-1.99732E1	1.50088E1	1.72365E-8	2.5225E-3	2.5225E-3	6.31858E-3	2.32873E-2
1.8E1	2.081E3	2.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80019E1	-4.05312E-4	-8.8E1	-9.53674E-5	5.14984E-3	9.31025E-2	1.58065E1	-1.98855E1	-1.99738E1	1.50016E1	1.72511E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.32513E-2
1.9E1	2.649E3	1.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80019E1	-3.57628E-4	-8.80001E1	-1.19209E-4	5.14984E-3	9.32932E-2	1.58095E1	-1.98927E1	-1.99828E1	1.50094E1	1.72702E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.34109E-2
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80019E1	-4.52995E-4	-8.80001E1	9.53674E-5	5.26905E-3	9.34362E-2	1.58345E1	-1.98883E1	-1.99809E1	1.49962E1	1.72927E-8	2.52538E-3	2.52538E-3	6.3074E-3	2.33094E-2
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.8002E1	-3.8147E-4	-8.8E1	7.15256E-5	5.36442E-3	9.32932E-2	1.58014E1	-1.98995E1	-1.99974E1	1.50143E1	1.72627E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.32689E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.8002E1	-7.86781E-4	-8.80001E1	-1.19209E-4	5.26905E-3	9.34362E-2	1.58156E1	-1.98647E1	-1.99673E1	1.50184E1	1.72688E-8	2.51709E-3	2.51709E-3	6.28103E-3	2.32733E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80018E1	-4.76837E-4	-8.79999E1	3.09944E-4	5.4121E-3	9.3317E-2	1.58071E1	-1.98711E1	-1.99906E1	1.49974E1	1.72627E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.32285E-2