[Scan]
initial_time=2016-02-17T17:06:08
final_time=2016-02-17T17:06:29
ip_count=19
run=1032
dataset=4
scan=13
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.78833E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.62227E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=1.07017E-9
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.60865E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.29174E-8
mult1=-1.01377E-8
mult2=-2.78249E-9
rf_tmon=-4.65662E-3
rf_agc=3.40486E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=5.80382E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.67114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19953E1
lens5a_imon=1.98199E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05172E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=3.01189E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05066E1
cs_ea1_imon=2.41458E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01312E0
lens1_imon=1.36254E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.553E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.99063E-5
olens2_vset=0.0E0
olens2_vmon=1.16825E-3
olens2_imon=1.16249E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=4.30896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15342E1
os_ea1_imon=2.27327E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.09803E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.22819E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93341E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=3.09406E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.86113E-9
tplens_vset=0.0E0
tplens_vmon=-1.6168E0
tplens_imon=-2.84926E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9981E1
iondef3_imon=8.79595E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98483E1
iondef2_imon=9.27902E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=7.84791E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2527E0
ionrepsh_imon=1.92611E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33562E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74237E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43415E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.16939E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2085E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10751E1
os_restr2_imon=3.46671E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.30902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.26912E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58191E1
iondef1_imon=5.1189E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49806E1
iondef4_imon=5.16867E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27966E1
olens3_imon=3.0297E-8
olens1_vset=0.0E0
olens1_vmon=3.57628E-4
olens1_imon=1.37328E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56165E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=1.62082E-1
window_imon=-1.1599E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.64237E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.51762E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.18814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50081E0
defgridb_imon=6.05979E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33307E1
os_fil1_imon=9.4803E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07107E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6464E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30862E1
cs_fil1_imon=9.99309E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61825E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6676E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.95763E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56641E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10018E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22504E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.32315E-2
chamber_ion_pmon=1.72732E-8
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21761E-1
res40_imon=-2.64833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.987E3	1.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80024E1	-6.4373E-4	-8.80006E1	2.86102E-4	5.60284E-3	9.32932E-2	1.57814E1	-1.986E1	-1.9962E1	1.49932E1	1.72732E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.31919E-2
2.0E0	2.674E3	1.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80022E1	-5.96046E-4	-8.80002E1	1.90735E-4	5.45979E-3	9.3627E-2	1.58105E1	-1.98514E1	-1.99953E1	1.49902E1	1.72627E-8	2.51552E-3	2.51552E-3	6.33486E-3	2.33297E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80023E1	-6.91414E-4	-8.79999E1	9.53674E-5	5.36442E-3	9.34124E-2	1.57941E1	-1.98787E1	-1.99464E1	1.49935E1	1.729E-8	2.51581E-3	2.51581E-3	6.29067E-3	2.32255E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80022E1	-7.86781E-4	-8.80002E1	2.38419E-4	5.62668E-3	9.37462E-2	1.58122E1	-1.98728E1	-1.99502E1	1.49961E1	1.72397E-8	2.5267E-3	2.5267E-3	6.32784E-3	2.32961E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80024E1	-6.67572E-4	-8.80001E1	1.19209E-4	5.6982E-3	9.32932E-2	1.58162E1	-1.98464E1	-1.9975E1	1.49821E1	1.72794E-8	2.51952E-3	2.51952E-3	6.3245E-3	2.32643E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80024E1	-7.15256E-4	-8.80001E1	2.86102E-4	5.43594E-3	9.35793E-2	1.58071E1	-1.98404E1	-1.99642E1	1.5019E1	1.7229E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.3291E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80021E1	-7.62939E-4	-8.8E1	-9.53674E-5	5.26905E-3	9.35555E-2	1.58041E1	-1.98434E1	-1.9987E1	1.50016E1	1.72627E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.33499E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80021E1	-7.39098E-4	-8.80001E1	-1.19209E-4	5.50747E-3	9.34839E-2	1.57879E1	-1.98507E1	-1.99756E1	1.49908E1	1.72594E-8	2.51804E-3	2.51804E-3	6.29067E-3	2.33079E-2
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80021E1	-8.34465E-4	-8.79999E1	2.38419E-5	5.36442E-3	9.34124E-2	1.57867E1	-1.98794E1	-1.99803E1	1.50082E1	1.72805E-8	2.52061E-3	2.52061E-3	6.29665E-3	2.3291E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80021E1	-1.00136E-3	-8.79998E1	2.38419E-5	5.50747E-3	9.35316E-2	1.58119E1	-1.98537E1	-1.99786E1	1.5019E1	1.72702E-8	2.51225E-3	2.51225E-3	6.31288E-3	2.32689E-2
1.4E1	4.5E1	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.8002E1	-9.53674E-4	-8.79999E1	7.15256E-5	5.62668E-3	9.34362E-2	1.58203E1	-1.98609E1	-1.99348E1	1.49908E1	1.72805E-8	2.51096E-3	2.51096E-3	6.33977E-3	2.33308E-2
1.5E1	5.4E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80021E1	-7.15256E-4	-8.79996E1	4.05312E-4	5.45979E-3	9.34124E-2	1.57722E1	-1.98614E1	-1.99518E1	1.50022E1	1.72594E-8	2.51136E-3	2.51136E-3	6.32418E-3	2.32873E-2
1.6E1	3.04E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80019E1	-8.58307E-4	-8.79995E1	3.09944E-4	5.29289E-3	9.34362E-2	1.58053E1	-1.98531E1	-1.99912E1	1.49992E1	1.7305E-8	2.51603E-3	2.51603E-3	6.30212E-3	2.3176E-2
1.7E1	5.46E2	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80018E1	-8.58307E-4	-8.80001E1	0.0E0	5.55515E-3	9.32932E-2	1.58119E1	-1.98386E1	-1.99738E1	1.49902E1	1.73077E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.31681E-2
1.8E1	2.248E3	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80018E1	-9.53674E-4	-8.79999E1	2.38419E-5	5.60284E-3	9.32932E-2	1.5771E1	-1.98621E1	-1.99534E1	1.50254E1	1.72437E-8	2.5131E-3	2.5131E-3	6.3074E-3	2.32513E-2
1.9E1	2.71E3	1.0E0	7.68E2	5.29E2	-7.286E-2	-8.80017E1	-7.39098E-4	-8.79996E1	7.15256E-5	5.65052E-3	9.34601E-2	1.57973E1	-1.98417E1	-1.99785E1	1.50028E1	1.72702E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.33297E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80017E1	-8.10623E-4	-8.79997E1	-7.15256E-5	5.36442E-3	9.32217E-2	1.58173E1	-1.98557E1	-1.9994E1	1.50118E1	1.72477E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.32892E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80019E1	-1.04904E-3	-8.79998E1	1.43051E-4	5.53131E-3	9.33647E-2	1.57989E1	-1.9862E1	-2.00004E1	1.50136E1	1.72552E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.31882E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80018E1	-1.04904E-3	-8.79996E1	1.66893E-4	5.57899E-3	9.32217E-2	1.57879E1	-1.98501E1	-1.99546E1	1.5007E1	1.72658E-8	2.52061E-3	2.52061E-3	6.29128E-3	2.33706E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80018E1	-9.77516E-4	-8.79998E1	2.38419E-5	5.14984E-3	9.34124E-2	1.58191E1	-1.98483E1	-1.9981E1	1.49806E1	1.72732E-8	2.51847E-3	2.51847E-3	6.30202E-3	2.32315E-2