[Scan]
initial_time=2016-02-17T17:06:36
final_time=2016-02-17T17:06:57
ip_count=19
run=1032
dataset=4
scan=14
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.85311E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.92053E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.08356E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.68285E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.29151E-8
mult1=-1.05397E-8
mult2=-2.76833E-9
rf_tmon=-5.09938E-3
rf_agc=3.23535E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=6.19721E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6421E0
bslens_imon=2.46205E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20181E1
lens5a_imon=1.97478E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.0505E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=3.01153E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=2.4391E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02273E0
lens1_imon=1.45266E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.53534E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=3.00072E-5
olens2_vset=0.0E0
olens2_vmon=1.50204E-3
olens2_imon=1.16406E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1158E1
os_restr1_imon=4.31833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15426E1
os_ea1_imon=2.27291E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26892E0
cs_ionrep_imon=1.23432E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93344E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01713E1
cs_anode1_imon=3.10632E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.92042E-9
tplens_vset=0.0E0
tplens_vmon=-1.618E0
tplens_imon=-2.16432E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99667E1
iondef3_imon=8.73467E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98912E1
iondef2_imon=9.38716E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02989E2
lens6_imon=2.98562E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=8.15105E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27072E0
ionrepsh_imon=1.92539E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.19252E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75342E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38128E0
os_ea2_imon=-5.98557E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00601E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71029E1
cs_ef2a_imon=3.17119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25054E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.45914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.30685E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.26479E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57778E1
iondef1_imon=5.21984E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50028E1
iondef4_imon=5.14344E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=3.03528E-8
olens1_vset=0.0E0
olens1_vmon=7.86781E-4
olens1_imon=1.37536E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17339E0
cs_ionaccel_imon=-1.96358E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-1.12746E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39016E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.75052E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.75194E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.67121E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31134E0
defgridb_imon=6.23643E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33278E1
os_fil1_imon=9.48955E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06506E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64537E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=1.00049E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62047E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67297E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80286E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65664E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.49178E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22595E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.32689E-2
chamber_ion_pmon=1.72777E-8
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.17556E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.907E3	2.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80022E1	-6.67572E-4	-8.79997E1	-3.8147E-4	5.67436E-3	9.32455E-2	1.57867E1	-1.98782E1	-1.99355E1	1.49854E1	1.72627E-8	2.51443E-3	2.51443E-3	6.30192E-3	2.32084E-2
2.0E0	2.714E3	3.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80023E1	-7.62939E-4	-8.79997E1	-1.66893E-4	5.4121E-3	9.32455E-2	1.57726E1	-1.98673E1	-1.99892E1	1.5004E1	1.72702E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.33094E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80023E1	-8.34465E-4	-8.79998E1	0.0E0	5.67436E-3	9.32217E-2	1.58132E1	-1.98835E1	-1.99679E1	1.498E1	1.72365E-8	2.51915E-3	2.51915E-3	6.32418E-3	2.32666E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80022E1	-5.48363E-4	-8.79998E1	-1.90735E-4	5.60284E-3	9.3627E-2	1.57801E1	-1.98495E1	-1.99876E1	1.49818E1	1.72688E-8	2.51393E-3	2.51393E-3	6.30212E-3	2.32928E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80023E1	-5.00679E-4	-8.79997E1	2.38419E-5	5.57899E-3	9.34124E-2	1.58311E1	-1.98206E1	-1.99891E1	1.50189E1	1.72927E-8	2.52099E-3	2.52099E-3	6.33486E-3	2.32892E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80019E1	-5.24521E-4	-8.79999E1	4.76837E-5	5.65052E-3	9.33886E-2	1.58203E1	-1.9836E1	-1.9967E1	1.50022E1	1.72471E-8	2.51498E-3	2.51498E-3	6.31269E-3	2.32733E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.8002E1	-9.05991E-4	-8.80001E1	2.38419E-4	5.60284E-3	9.3317E-2	1.58105E1	-1.98514E1	-1.99763E1	1.49686E1	1.7256E-8	2.51611E-3	2.51611E-3	6.3131E-3	2.32643E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.8002E1	-8.34465E-4	-8.79998E1	0.0E0	5.67436E-3	9.33409E-2	1.58038E1	-1.98423E1	-1.99561E1	1.50352E1	1.72552E-8	2.51662E-3	2.51662E-3	6.34037E-3	2.32689E-2
1.2E1	1.06E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80022E1	-4.05312E-4	-8.80002E1	2.6226E-4	5.55515E-3	9.32217E-2	1.58029E1	-1.98867E1	-1.99522E1	1.49962E1	1.72364E-8	2.52169E-3	2.52169E-3	6.32896E-3	2.32315E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.8002E1	-4.29153E-4	-8.79999E1	2.38419E-4	5.81741E-3	9.31978E-2	1.58083E1	-1.98242E1	-2.00051E1	1.50406E1	1.72327E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.33905E-2
1.4E1	5.1E1	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80017E1	-4.76837E-4	-8.8E1	2.6226E-4	5.72205E-3	9.30786E-2	1.57801E1	-1.98897E1	-1.99708E1	1.49944E1	1.72327E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.32892E-2
1.5E1	3.9E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80021E1	-5.48363E-4	-8.8E1	2.38419E-4	5.67436E-3	9.30309E-2	1.57849E1	-1.98867E1	-1.99576E1	1.50202E1	1.72402E-8	2.51334E-3	2.51334E-3	6.29645E-3	2.33094E-2
1.6E1	3.13E2	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80022E1	-5.48363E-4	-8.8E1	-4.76837E-5	5.60284E-3	9.33886E-2	1.58281E1	-1.98771E1	-1.99828E1	1.49926E1	1.72777E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.32892E-2
1.7E1	5.47E2	0.0E0	6.87E2	4.7E2	-7.18554E-2	-8.80023E1	-6.4373E-4	-8.80002E1	-2.38419E-5	5.55515E-3	9.30786E-2	1.58351E1	-1.98806E1	-1.99455E1	1.50154E1	1.72028E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.33905E-2
1.8E1	2.112E3	4.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80022E1	-7.15256E-4	-8.80006E1	7.15256E-5	5.43594E-3	9.3174E-2	1.58155E1	-1.98693E1	-1.99666E1	1.49902E1	1.72143E-8	2.51632E-3	2.51632E-3	6.33436E-3	2.33706E-2
1.9E1	2.639E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80024E1	-6.67572E-4	-8.80001E1	9.53674E-5	5.76973E-3	9.29117E-2	1.58103E1	-1.98812E1	-1.99756E1	1.50306E1	1.72594E-8	2.50914E-3	2.50914E-3	6.31299E-3	2.33492E-2
2.0E1	1.9E1	0.0E0	8.08E2	5.58E2	-7.201E-2	-8.80024E1	-7.39098E-4	-8.8E1	2.14577E-4	5.76973E-3	9.2864E-2	1.57903E1	-1.98681E1	-1.9975E1	1.49956E1	1.72143E-8	2.52169E-3	2.52169E-3	6.31817E-3	2.3291E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80024E1	-7.15256E-4	-8.80002E1	1.19209E-4	5.24521E-3	9.29117E-2	1.58168E1	-1.98523E1	-1.99614E1	1.49956E1	1.72511E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.32117E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80023E1	-9.77516E-4	-8.80003E1	-4.76837E-5	5.53131E-3	9.30786E-2	1.58113E1	-1.98573E1	-1.999E1	1.49764E1	1.72658E-8	2.5131E-3	2.5131E-3	6.33977E-3	2.33507E-2
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80025E1	-7.15256E-4	-8.80001E1	1.90735E-4	5.60284E-3	9.3317E-2	1.57778E1	-1.98912E1	-1.99667E1	1.50028E1	1.72777E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.32689E-2