[Scan]
initial_time=2016-02-17T17:07:04
final_time=2016-02-17T17:07:25
ip_count=19
run=1032
dataset=4
scan=15
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.88213E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.40106E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.1326E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.69829E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.29253E-8
mult1=-9.9604E-9
mult2=-2.75461E-9
rf_tmon=-5.42382E-3
rf_agc=3.21883E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=5.92434E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67996E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.00685E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02399E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.429E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03234E0
lens1_imon=1.35172E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03822E1
cs_ea2_imon=1.55372E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=2.99604E-5
olens2_vset=0.0E0
olens2_vmon=1.40667E-3
olens2_imon=1.1639E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.30788E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1563E1
os_ea1_imon=2.29995E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27012E0
cs_ionrep_imon=1.24622E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93373E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=3.10776E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.9156E-9
tplens_vset=0.0E0
tplens_vmon=-1.59096E0
tplens_imon=-4.111E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99703E1
iondef3_imon=8.84642E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98942E1
iondef2_imon=9.42321E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02983E2
lens6_imon=2.98645E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=8.02171E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27493E0
ionrepsh_imon=1.94702E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33928E1
lens5b_imon=2.16152E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74087E1
cs_ef2b_imon=3.1056E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42574E0
os_ea2_imon=-5.30063E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04855E0
os_ef2alow_imon=-2.81051E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.38269E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=3.4559E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.29387E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.25722E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58085E1
iondef1_imon=5.02517E-6
iondef4_vset=1.53E1
iondef4_vmon=1.4995E1
iondef4_imon=5.22273E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=3.02789E-8
olens1_vset=0.0E0
olens1_vmon=6.67572E-4
olens1_imon=1.37518E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15177E0
cs_ionaccel_imon=-2.01043E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56579E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=2.13138E-1
window_imon=-1.17792E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-7.88688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92587E3
multa_neg_imon=7.49096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.7231E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50092E3
multb_neg_imon=7.44409E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60307E0
defgridb_imon=6.08863E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33295E1
os_fil1_imon=9.4758E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07503E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64639E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30822E1
cs_fil1_imon=9.98456E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61843E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67002E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02212E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6386E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.77932E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22542E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.31919E-2
chamber_ion_pmon=1.72511E-8
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.89035E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.921E3	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.8002E1	-5.24521E-4	-8.79997E1	3.33786E-4	5.84126E-3	9.32693E-2	1.57933E1	-1.98675E1	-1.99606E1	1.4986E1	1.72732E-8	2.51632E-3	2.51632E-3	6.3074E-3	2.32711E-2
2.0E0	2.699E3	2.0E0	3.16E2	1.6E2	-7.40192E-2	-8.80019E1	-4.29153E-4	-8.80001E1	3.33786E-4	5.50747E-3	9.27687E-2	1.58047E1	-1.98519E1	-1.9975E1	1.50328E1	1.72177E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.33094E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80018E1	-9.53674E-4	-8.80001E1	4.05312E-4	5.55515E-3	9.30309E-2	1.58262E1	-1.9867E1	-1.99762E1	1.49986E1	1.72103E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.32084E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80023E1	-6.91414E-4	-8.80001E1	1.90735E-4	5.48363E-3	9.26495E-2	1.58137E1	-1.98741E1	-1.99774E1	1.49998E1	1.7229E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.33507E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.8002E1	-7.86781E-4	-8.80002E1	-2.38419E-5	5.48363E-3	9.31501E-2	1.58173E1	-1.98717E1	-1.99714E1	1.50184E1	1.72777E-8	2.51443E-3	2.51443E-3	6.29645E-3	2.31882E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80021E1	-9.53674E-4	-8.80002E1	5.00679E-4	5.48363E-3	9.28402E-2	1.58085E1	-1.98381E1	-1.99709E1	1.5004E1	1.72402E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.32487E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80023E1	-9.77516E-4	-8.8E1	3.57628E-4	5.43594E-3	9.30071E-2	1.5802E1	-1.98511E1	-1.99644E1	1.50328E1	1.72777E-8	2.51771E-3	2.51771E-3	6.29098E-3	2.32689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.80023E1	-1.04904E-3	-8.8E1	1.66893E-4	5.53131E-3	9.32217E-2	1.57928E1	-1.98288E1	-1.99506E1	1.49788E1	1.72494E-8	2.51701E-3	2.51701E-3	6.30197E-3	2.322E-2
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80021E1	-7.39098E-4	-8.79999E1	2.86102E-4	5.55515E-3	9.34362E-2	1.58179E1	-1.98296E1	-1.99396E1	1.50539E1					
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80024E1	-5.72205E-4	-8.8E1	1.43051E-4	5.24521E-3	9.34362E-2	1.58131E1	-1.98681E1	-1.99702E1	1.4998E1	1.72441E-8	2.52139E-3	2.52139E-3	6.31299E-3	2.34943E-2
1.4E1	5.2E1	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80021E1	-3.8147E-4	-8.8E1	4.52995E-4	5.48363E-3	9.29832E-2	1.57731E1	-1.98228E1	-2.00599E1	1.50118E1	1.72658E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.33507E-2
1.5E1	5.2E1	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80018E1	-6.19888E-4	-8.80002E1	0.0E0	5.91278E-3	9.29117E-2	1.57843E1	-1.98885E1	-1.99684E1	1.50148E1	1.72511E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.3291E-2
1.6E1	3.38E2	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80016E1	-3.57628E-4	-8.80002E1	2.38419E-4	5.65052E-3	9.29832E-2	1.58023E1	-1.98603E1	-1.99462E1	1.4971E1	1.72028E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.33297E-2
1.7E1	5.33E2	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80023E1	-6.91414E-4	-8.80003E1	-2.38419E-5	5.10216E-3	9.31025E-2	1.57945E1	-1.98452E1	-1.99588E1	1.49878E1	1.72103E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.33094E-2
1.8E1	2.16E3	1.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80024E1	-4.52995E-4	-8.80001E1	1.19209E-4	5.26905E-3	9.30309E-2	1.58089E1	-1.98452E1	-1.99714E1	1.49796E1	1.72177E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.33297E-2
1.9E1	2.637E3	1.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80023E1	-8.34465E-4	-8.80002E1	1.90735E-4	5.43594E-3	9.29117E-2	1.58061E1	-1.98794E1	-1.99679E1	1.5022E1	1.73152E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.32892E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80021E1	-4.52995E-4	-8.79999E1	2.6226E-4	5.55515E-3	9.29594E-2	1.58329E1	-1.98825E1	-1.99582E1	1.4983E1	1.72732E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.33308E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80021E1	-7.86781E-4	-8.79997E1	1.19209E-4	5.50747E-3	9.30071E-2	1.58023E1	-1.98579E1	-1.99691E1	1.49935E1	1.72852E-8	2.51443E-3	2.51443E-3	6.29645E-3	2.33094E-2
2.2E1	6.0E0	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80021E1	-9.53674E-4	-8.8E1	3.09944E-4	5.22137E-3	9.29356E-2	1.58119E1	-1.98386E1	-1.9981E1	1.49896E1	1.72732E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.3291E-2
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80021E1	-5.96046E-4	-8.80002E1	4.76837E-4	5.53131E-3	9.31025E-2	1.58085E1	-1.98942E1	-1.99703E1	1.4995E1	1.72511E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.31919E-2