[Scan]
initial_time=2016-02-17T17:07:32
final_time=2016-02-17T17:07:53
ip_count=19
run=1032
dataset=4
scan=16
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.78122E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.26404E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.0691E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.58857E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.30185E-8
mult1=-9.46345E-9
mult2=-2.77849E-9
rf_tmon=-5.86428E-3
rf_agc=3.15371E-2
counter1=7
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=6.50477E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64751E0
bslens_imon=2.49089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19923E1
lens5a_imon=2.01191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04992E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=3.01225E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=2.44306E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05157E0
lens1_imon=1.61128E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.55516E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84178E1
cs_ef1a_imon=2.97946E-5
olens2_vset=0.0E0
olens2_vmon=1.4782E-3
olens2_imon=1.16427E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.31545E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.27579E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=1.25595E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=3.09514E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.85184E-9
tplens_vset=0.0E0
tplens_vmon=-1.64444E0
tplens_imon=-1.11888E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99414E1
iondef3_imon=9.01225E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98404E1
iondef2_imon=9.43403E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98551E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=7.95209E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2539E0
ionrepsh_imon=1.92215E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74201E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41612E0
os_ea2_imon=-8.04039E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06133E2
lens4b_imon=2.00479E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34064E-1
os_ef2bup_imon=-5.36933E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10667E1
os_restr2_imon=3.46383E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.32416E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.24821E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58257E1
iondef1_imon=5.20181E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50178E1
iondef4_imon=5.44978E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=3.03754E-8
olens1_vset=0.0E0
olens1_vmon=5.72205E-4
olens1_imon=1.37493E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15357E0
cs_ionaccel_imon=-2.10414E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55997E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=1.44663E-1
window_imon=-1.1635E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82591E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86158E1
mask2_imon=-8.64372E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.73609E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.67624E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.1557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24517E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.4794E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06584E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64671E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30857E1
cs_fil1_imon=9.9845E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62035E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67128E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82866E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53548E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.32359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22549E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.32285E-2
chamber_ion_pmon=1.72627E-8
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18757E-1
res40_imon=-2.79249E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.982E3	1.0E0	1.47E2	4.1E1	-7.37103E-2	-8.80019E1	-3.33786E-4	-8.79999E1	3.09944E-4	5.31673E-3	9.34124E-2	1.57778E1	-1.98322E1	-1.99986E1	1.50028E1	1.72477E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.32487E-2
2.0E0	2.776E3	2.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80026E1	-9.53674E-5	-8.79998E1	1.19209E-4	5.31673E-3	9.33409E-2	1.58087E1	-1.98508E1	-1.99622E1	1.50078E1	1.72364E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.33308E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80023E1	-2.86102E-4	-8.79997E1	2.86102E-4	5.79357E-3	9.32217E-2	1.58301E1	-1.98544E1	-1.99651E1	1.49999E1	1.72441E-8	2.5147E-3	2.5147E-3	6.31299E-3	2.32049E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80022E1	-5.00679E-4	-8.8E1	2.38419E-4	5.50747E-3	9.31978E-2	1.58132E1	-1.98664E1	-1.99555E1	1.49611E1	1.72183E-8	2.51919E-3	2.51919E-3	6.32328E-3	2.32538E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.8002E1	-5.72205E-4	-8.80002E1	-3.09944E-4	5.31673E-3	9.29356E-2	1.58167E1	-1.98698E1	-1.99751E1	1.49991E1	1.7207E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.3291E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80019E1	-6.91414E-4	-8.80001E1	3.09944E-4	5.29289E-3	9.32693E-2	1.58011E1	-1.98573E1	-1.99798E1	1.499E1	1.72365E-8	2.5147E-3	2.5147E-3	6.33538E-3	2.33492E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80019E1	-4.52995E-4	-8.80003E1	7.15256E-5	5.55515E-3	9.31025E-2	1.58017E1	-1.98759E1	-1.99624E1	1.50108E1	1.72627E-8	2.51552E-3	2.51552E-3	6.34588E-3	2.32689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.8002E1	-3.8147E-4	-8.80003E1	9.53674E-5	5.62668E-3	9.35078E-2	1.57735E1	-1.9847E1	-1.99714E1	1.5019E1	1.72327E-8	2.51334E-3	2.51334E-3	6.31837E-3	2.32892E-2
1.2E1	9.2E1	2.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80021E1	-5.00679E-4	-8.79998E1	2.14577E-4	5.81741E-3	9.31978E-2	1.57643E1	-1.98411E1	-1.99791E1	1.49933E1	1.72852E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.32689E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80021E1	-6.19888E-4	-8.79998E1	0.0E0	5.19753E-3	9.31501E-2	1.58203E1	-1.98741E1	-1.9972E1	1.5007E1	1.72364E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.32513E-2
1.4E1	4.5E1	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80019E1	-4.76837E-4	-8.80002E1	2.38419E-5	5.50747E-3	9.31978E-2	1.58468E1	-1.98813E1	-1.9927E1	1.49758E1	1.72402E-8	2.52209E-3	2.52209E-3	6.33486E-3	2.33905E-2
1.5E1	4.4E1	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.8002E1	-9.05991E-4	-8.80001E1	2.14577E-4	5.6982E-3	9.3317E-2	1.58433E1	-1.98641E1	-1.9962E1	1.50521E1	1.72477E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.33094E-2
1.6E1	3.43E2	2.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80018E1	-8.34465E-4	-8.80004E1	-1.43051E-4	6.07967E-3	9.3174E-2	1.58152E1	-1.98826E1	-1.99827E1	1.5015E1	1.72511E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.32315E-2
1.7E1	5.5E2	1.0E0	6.87E2	4.7E2	-7.24736E-2	-8.8002E1	-9.29832E-4	-8.80003E1	2.14577E-4	5.74589E-3	9.34362E-2	1.57688E1	-1.98816E1	-1.99783E1	1.49929E1	1.72606E-8	2.5216E-3	2.5216E-3	6.3074E-3	2.3315E-2
1.8E1	2.126E3	2.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80021E1	-9.29832E-4	-8.80002E1	5.72205E-4	5.8651E-3	9.32217E-2	1.58341E1	-1.98705E1	-1.99384E1	1.49716E1	1.72287E-8	2.5199E-3	2.5199E-3	6.32483E-3	2.32618E-2
1.9E1	2.58E3	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.8002E1	-4.76837E-4	-8.79999E1	1.19209E-4	5.96046E-3	9.33409E-2	1.57949E1	-1.98564E1	-1.9975E1	1.5013E1	1.72852E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.32084E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80017E1	-6.91414E-4	-8.79999E1	3.8147E-4	5.55515E-3	9.35793E-2	1.57867E1	-1.98585E1	-1.99558E1	1.50467E1	1.72477E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.33297E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80018E1	-6.91414E-4	-8.80001E1	2.14577E-4	5.6982E-3	9.34601E-2	1.58272E1	-1.98307E1	-1.99523E1	1.50155E1	1.72437E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.32711E-2
2.2E1	2.0E1	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.8002E1	-6.91414E-4	-8.8E1	-1.90735E-4	5.31673E-3	9.33886E-2	1.59079E1	-1.98967E1	-1.9833E1	1.49872E1	1.72511E-8	2.51417E-3	2.51417E-3	6.31817E-3	2.34105E-2
2.3E1	7.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80019E1	-4.52995E-4	-8.8E1	3.33786E-4	5.17368E-3	9.39131E-2	1.58257E1	-1.98404E1	-1.99414E1	1.50178E1	1.72627E-8	2.51334E-3	2.51334E-3	6.31837E-3	2.32285E-2