[Scan]
initial_time=2016-02-17T17:08:00
final_time=2016-02-17T17:08:21
ip_count=19
run=1032
dataset=4
scan=17
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.47149E-2
qbias_imon=-3.79645E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.10471E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=1.09217E-9
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.65952E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.29064E-8
mult1=-1.2606E-8
mult2=-2.85435E-9
rf_tmon=-5.07119E-3
rf_agc=3.40305E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=6.00243E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.66753E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=1.97658E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=3.01297E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02341E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05228E1
cs_ea1_imon=2.41026E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02694E0
lens1_imon=1.68338E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04045E1
cs_ea2_imon=1.56129E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=2.99207E-5
olens2_vset=0.0E0
olens2_vmon=1.28746E-3
olens2_imon=1.16434E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.29526E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15738E1
os_ea1_imon=2.27724E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63569E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21605E0
cs_ionrep_imon=1.22819E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=3.11064E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.86621E-9
tplens_vset=0.0E0
tplens_vmon=-1.60058E0
tplens_imon=-3.6063E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99702E1
iondef3_imon=8.7563E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98555E1
iondef2_imon=9.61428E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98504E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=8.09813E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26532E0
ionrepsh_imon=1.93044E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.11497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3981E0
os_ea2_imon=-4.36334E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70903E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04735E0
os_ef2alow_imon=-2.46453E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1184E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=3.45266E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23103E2
cs_ionfoca_imon=6.31767E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.26803E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58203E1
iondef1_imon=5.22705E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49866E1
iondef4_imon=5.25877E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27965E1
olens3_imon=3.02769E-8
olens1_vset=0.0E0
olens1_vmon=2.38419E-5
olens1_imon=1.37586E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16138E0
cs_ionaccel_imon=-1.79419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47176E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.50404E-6
window_vset=0.0E0
window_vmon=1.6929E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86284E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.62795E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=6.5717E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.35757E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.67826E0
defgridb_imon=6.17515E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33276E1
os_fil1_imon=9.48078E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07059E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64857E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.99441E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61417E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67168E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.85445E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59477E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.49178E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22464E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.32285E-2
chamber_ion_pmon=1.72552E-8
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.13952E-1
res40_imon=-2.65915E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.938E3	4.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80017E1	-5.24521E-4	-8.8E1	9.53674E-5	5.38826E-3	9.3317E-2	1.58245E1	-1.98633E1	-1.99468E1	1.49992E1	1.72702E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.32689E-2
2.0E0	2.58E3	3.0E0	3.16E2	1.6E2	-7.45602E-2	-8.80018E1	-1.00136E-3	-8.80003E1	-3.33786E-4	5.53131E-3	9.30309E-2	1.58047E1	-1.98735E1	-1.9978E1	1.50256E1	1.72252E-8	2.52428E-3	2.52428E-3	6.31837E-3	2.33702E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.42513E-2	-8.8002E1	-9.05991E-4	-8.80004E1	2.38419E-5	5.81741E-3	9.30309E-2	1.58067E1	-1.98629E1	-1.99815E1	1.50115E1	1.729E-8	2.52139E-3	2.52139E-3	6.29624E-3	2.32666E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80018E1	-9.05991E-4	-8.79999E1	1.19209E-4	5.74589E-3	9.30309E-2	1.57938E1	-1.9844E1	-1.99419E1	1.4998E1	1.72761E-8	2.52025E-3	2.52025E-3	6.31798E-3	2.32733E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80019E1	-6.4373E-4	-8.80001E1	-2.38419E-5	5.72205E-3	9.3174E-2	1.58233E1	-1.98507E1	-1.99312E1	1.50118E1	1.72511E-8	2.51417E-3	2.51417E-3	6.30202E-3	2.32513E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80019E1	-6.67572E-4	-8.8E1	1.90735E-4	5.57899E-3	9.32217E-2	1.58335E1	-1.98741E1	-1.99864E1	1.50136E1	1.72627E-8	2.51662E-3	2.51662E-3	6.30192E-3	2.32689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80018E1	-5.24521E-4	-8.79999E1	-1.43051E-4	5.43594E-3	9.33409E-2	1.58546E1	-1.98591E1	-1.9951E1	1.50094E1	1.72477E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.32084E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80017E1	-5.48363E-4	-8.79999E1	-1.43051E-4	5.57899E-3	9.32932E-2	1.57825E1	-1.98513E1	-1.99636E1	1.50166E1	1.72552E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.33499E-2
1.2E1	9.1E1	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80018E1	-5.96046E-4	-8.79998E1	2.38419E-4	5.24521E-3	9.31501E-2	1.58047E1	-1.98525E1	-1.99834E1	1.50016E1	1.72702E-8	2.52647E-3	2.52647E-3	6.29645E-3	2.33094E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.8002E1	-6.19888E-4	-8.79996E1	1.90735E-4	5.72205E-3	9.33409E-2	1.57873E1	-1.98564E1	-1.99949E1	1.49761E1	1.72477E-8	2.51116E-3	2.51116E-3	6.31837E-3	2.33297E-2
1.4E1	4.9E1	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80018E1	-1.14441E-3	-8.79995E1	-7.15256E-5	5.53131E-3	9.32932E-2	1.58047E1	-1.98811E1	-1.99413E1	1.50149E1	1.72574E-8	2.5175E-3	2.5175E-3	6.3074E-3	2.32571E-2
1.5E1	5.7E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80017E1	-6.91414E-4	-8.79998E1	-3.33786E-4	5.98431E-3	9.34124E-2	1.58148E1	-1.98599E1	-1.99507E1	1.49976E1					
1.6E1	3.39E2	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80017E1	-8.10623E-4	-8.79999E1	0.0E0	5.84126E-3	9.31978E-2	1.57903E1	-1.98669E1	-1.9972E1	1.50172E1	1.72732E-8	2.52236E-3	2.52236E-3	6.32222E-3	2.33631E-2
1.7E1	5.07E2	1.0E0	6.87E2	4.7E2	-7.286E-2	-8.80019E1	-8.34465E-4	-8.8E1	-1.90735E-4	5.14984E-3	9.31025E-2	1.58044E1	-1.98765E1	-1.99773E1	1.50161E1	1.72494E-8	2.51918E-3	2.51918E-3	6.29384E-3	2.33302E-2
1.8E1	2.212E3	1.0E0	7.27E2	5.0E2	-7.35556E-2	-8.8002E1	-8.58307E-4	-8.79998E1	3.33786E-4	5.60284E-3	9.30786E-2	1.58029E1	-1.98675E1	-1.99672E1	1.50112E1					
1.9E1	2.625E3	2.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80022E1	-6.19888E-4	-8.8E1	4.05312E-4	5.74589E-3	9.3317E-2	1.58143E1	-1.98705E1	-1.9966E1	1.49992E1	1.72777E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.32689E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80021E1	-1.00136E-3	-8.79997E1	4.76837E-5	6.05583E-3	9.30548E-2	1.58425E1	-1.98699E1	-1.99973E1	1.4998E1	1.72552E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.32487E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.44831E-2	-8.80019E1	-7.86781E-4	-8.79999E1	2.14577E-4	5.62668E-3	9.33409E-2	1.58238E1	-1.98717E1	-1.99319E1	1.50172E1	1.72402E-8	2.51334E-3	2.51334E-3	6.32386E-3	2.32892E-2
2.2E1	1.8E1	0.0E0	8.89E2	6.17E2	-7.48695E-2	-8.80016E1	-6.19888E-4	-8.8E1	-2.38419E-5	5.8651E-3	9.3317E-2	1.58263E1	-1.98933E1	-1.99474E1	1.4983E1	1.72437E-8	2.51847E-3	2.51847E-3	6.32896E-3	2.32117E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.47149E-2	-8.80016E1	-8.34465E-4	-8.79998E1	-9.53674E-5	5.67436E-3	9.34601E-2	1.58203E1	-1.98555E1	-1.99702E1	1.49866E1	1.72552E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.32285E-2