[Scan]
initial_time=2016-02-17T17:08:57
final_time=2016-02-17T17:09:17
ip_count=19
run=1032
dataset=4
scan=19
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.79013E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.39868E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.12346E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.65609E-9
ql4_vset=
ql4_vmon=-5.96046E-4
ql4_imon=1.29331E-8
mult1=-9.5959E-9
mult2=-2.67669E-9
rf_tmon=-3.28073E-3
rf_agc=3.40846E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=5.88059E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.7981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19636E1
lens5a_imon=1.98227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05157E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=3.0155E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04577E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05088E1
cs_ea1_imon=2.44274E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02298E0
lens1_imon=1.3434E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.96468E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.56143E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=2.99135E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=1.16287E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.33058E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15459E1
os_ea1_imon=2.27391E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23204E0
cs_ionrep_imon=1.25916E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93565E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=3.09695E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.94872E-9
tplens_vset=0.0E0
tplens_vmon=-1.60663E0
tplens_imon=-3.55518E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.996E1
iondef3_imon=8.57795E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98675E1
iondef2_imon=9.44511E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=8.07703E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27687E0
ionrepsh_imon=1.9313E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34112E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74922E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42022E0
os_ea2_imon=-7.51931E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00697E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7148E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.72762E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.52084E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10991E1
os_restr2_imon=3.45951E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29787E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.25398E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58275E1
iondef1_imon=5.29338E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50082E1
iondef4_imon=5.16867E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=3.03033E-8
olens1_vset=0.0E0
olens1_vmon=7.86781E-4
olens1_imon=1.37674E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-2.05008E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.38055E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82583E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86404E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.81698E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.49678E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.17988E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22248E0
defgridb_imon=6.12514E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33275E1
os_fil1_imon=9.48132E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07191E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64605E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=9.9872E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61687E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66984E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82537E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72301E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22531E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.33308E-2
chamber_ion_pmon=1.7207E-8
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.54797E-1
res40_imon=-2.73483E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.932E3	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.8002E1	-8.58307E-4	-8.80003E1	-2.86102E-4	5.50747E-3	9.32932E-2	1.58038E1	-1.98582E1	-1.9988E1	1.50062E1	1.72852E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.32285E-2
2.0E0	2.563E3	0.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80019E1	-7.15256E-4	-8.8E1	-7.15256E-5	5.57899E-3	9.33409E-2	1.57969E1	-1.98831E1	-1.996E1	1.50064E1	1.72544E-8	2.51498E-3	2.51498E-3	6.32328E-3	2.33514E-2
3.0E0	0.0E0	1.0E0	4.85E2	2.79E2	-7.286E-2	-8.80023E1	-5.72205E-4	-8.8E1	-7.15256E-5	5.65052E-3	9.33409E-2	1.58067E1	-1.98664E1	-1.99543E1	1.49644E1	1.72402E-8	2.51225E-3	2.51225E-3	6.31288E-3	2.32689E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80022E1	-8.58307E-4	-8.80002E1	2.38419E-5	5.6982E-3	9.32217E-2	1.57987E1	-1.98296E1	-1.99822E1	1.4992E1	1.72658E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.3291E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80024E1	-1.09673E-3	-8.80004E1	2.14577E-4	5.36442E-3	9.31263E-2	1.58011E1	-1.98693E1	-1.99714E1	1.50074E1	1.72777E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.32084E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80022E1	-1.19209E-3	-8.80004E1	1.43051E-4	5.72205E-3	9.31978E-2	1.58155E1	-1.98771E1	-1.99384E1	1.5007E1	1.72852E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.32084E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80022E1	-9.05991E-4	-8.80004E1	2.14577E-4	5.53131E-3	9.30786E-2	1.57873E1	-1.9857E1	-1.99561E1	1.49722E1	1.72927E-8	2.52209E-3	2.52209E-3	6.34588E-3	2.33702E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80019E1	-8.82149E-4	-8.80001E1	6.4373E-4	5.55515E-3	9.31025E-2	1.57867E1	-1.98539E1	-1.99604E1	1.50022E1	1.72511E-8	2.51847E-3	2.51847E-3	6.32356E-3	2.33109E-2
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.8002E1	-8.10623E-4	-8.79999E1	3.8147E-4	5.60284E-3	9.34601E-2	1.57997E1	-1.98747E1	-1.99697E1	1.49842E1	1.72213E-8	2.51248E-3	2.51248E-3	6.32418E-3	2.33285E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.8002E1	-5.72205E-4	-8.8E1	4.29153E-4	5.88894E-3	9.35316E-2	1.58528E1	-1.98783E1	-1.9939E1	1.4995E1	1.72511E-8	2.52169E-3	2.52169E-3	6.31278E-3	2.32513E-2
1.4E1	4.2E1	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80018E1	-5.48363E-4	-8.79999E1	4.52995E-4	5.67436E-3	9.34124E-2	1.58075E1	-1.98828E1	-1.99535E1	1.4979E1	1.72402E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.33094E-2
1.5E1	4.8E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80019E1	-7.15256E-4	-8.79998E1	2.38419E-4	5.24521E-3	9.32932E-2	1.58365E1	-1.98555E1	-2.00153E1	1.49974E1	1.72575E-8	2.51886E-3	2.51886E-3	6.3126E-3	2.32753E-2
1.6E1	3.19E2	0.0E0	6.47E2	4.41E2	-7.17007E-2	-8.80017E1	-7.39098E-4	-8.80001E1	4.29153E-4	5.53131E-3	9.34124E-2	1.58137E1	-1.98464E1	-2.00033E1	1.50298E1	1.71984E-8	2.51693E-3	2.51693E-3	6.3074E-3	2.33492E-2
1.7E1	5.08E2	0.0E0	6.87E2	4.7E2	-7.17007E-2	-8.8002E1	-7.15256E-4	-8.8E1	9.53674E-5	5.67436E-3	9.33886E-2	1.58131E1	-1.98765E1	-1.9942E1	1.49986E1	1.72327E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.32689E-2
1.8E1	2.081E3	0.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80016E1	-7.86781E-4	-8.79998E1	3.09944E-4	5.84126E-3	9.31978E-2	1.57789E1	-1.98849E1	-2.00296E1	1.49841E1	1.72252E-8	2.51334E-3	2.51334E-3	6.3074E-3	2.33094E-2
1.9E1	2.655E3	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80018E1	-5.24521E-4	-8.80001E1	1.90735E-4	5.4121E-3	9.33409E-2	1.58173E1	-1.98525E1	-1.9957E1	1.4998E1	1.72546E-8	2.52336E-3	2.52336E-3	6.29143E-3	2.3287E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80018E1	-5.96046E-4	-8.80003E1	2.38419E-4	5.4121E-3	9.33409E-2	1.58161E1	-1.98422E1	-1.99744E1	1.5001E1	1.73115E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.3279E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80021E1	-8.58307E-4	-8.80004E1	3.09944E-4	5.53131E-3	9.3317E-2	1.58035E1	-1.98608E1	-2.00074E1	1.499E1					
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80022E1	-9.29832E-4	-8.80003E1	-3.09944E-4	5.45979E-3	9.33647E-2	1.57849E1	-1.98552E1	-1.99667E1	1.50184E1	1.71679E-8	2.51919E-3	2.51919E-3	6.3074E-3	2.32928E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80021E1	-7.39098E-4	-8.8E1	-5.96046E-4	5.4121E-3	9.31501E-2	1.58275E1	-1.98675E1	-1.996E1	1.50082E1	1.7207E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.33308E-2