[Scan]
initial_time=2016-02-17T17:09:24
final_time=2016-02-17T17:09:44
ip_count=19
run=1032
dataset=4
scan=20
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.79693E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.37753E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.12727E-9
ql3_vset=
ql3_vmon=-8.79996E1
ql3_imon=-1.62393E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.29089E-8
mult1=-9.75243E-9
mult2=-2.90425E-9
rf_tmon=-4.98708E-3
rf_agc=3.21259E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=6.19507E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66554E0
bslens_imon=2.60625E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.98415E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.05327E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=3.01225E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05066E1
cs_ea1_imon=2.43874E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95364E0
lens1_imon=1.44906E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.54759E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.99784E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.1627E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.31401E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15216E1
os_ea1_imon=2.28408E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29055E0
cs_ionrep_imon=1.23396E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91852E2
cs_nozzle_imon=1.93305E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.10091E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.86739E-9
tplens_vset=0.0E0
tplens_vmon=-1.62701E0
tplens_imon=-2.38062E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99402E1
iondef3_imon=8.86445E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98615E1
iondef2_imon=9.31146E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98541E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=8.11374E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=1.91818E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.11244E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46179E0
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04074E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.44275E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10685E1
os_restr2_imon=3.46419E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.28522E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.26011E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57753E1
iondef1_imon=5.191E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50081E1
iondef4_imon=5.17588E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=3.03039E-8
olens1_vset=0.0E0
olens1_vmon=9.53674E-5
olens1_imon=1.37625E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15297E0
cs_ionaccel_imon=-1.92754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=1.77699E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39023E-4
mask2_vset=0.0E0
mask2_vmon=-1.86158E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.61353E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=6.91056E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42562E0
defgridb_imon=6.02735E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33298E1
os_fil1_imon=9.48048E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07431E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64528E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.99783E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61765E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67231E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82866E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.46201E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.71925E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2258E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.33109E-2
chamber_ion_pmon=1.72511E-8
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.34375E-1
res40_imon=-2.79249E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.938E3	1.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80018E1	-6.4373E-4	-8.80003E1	2.38419E-4	5.4121E-3	9.31263E-2	1.57997E1	-1.98771E1	-1.99744E1	1.50207E1	1.72477E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.33702E-2
2.0E0	2.517E3	5.0E0	3.16E2	1.6E2	-7.201E-2	-8.80017E1	-8.10623E-4	-8.80002E1	7.15256E-5	5.36442E-3	9.30071E-2	1.57989E1	-1.98637E1	-1.99959E1	1.5001E1	1.72584E-8	2.51739E-3	2.51739E-3	6.33436E-3	2.34705E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.8002E1	-8.10623E-4	-8.80004E1	2.38419E-5	5.53131E-3	9.30309E-2	1.5805E1	-1.98605E1	-1.9985E1	1.50086E1	1.72289E-8	2.52027E-3	2.52027E-3	6.31299E-3	2.33285E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.8002E1	-4.52995E-4	-8.80003E1	-9.53674E-5	5.50747E-3	9.29117E-2	1.58085E1	-1.98546E1	-1.99762E1	1.50058E1	1.7207E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.33706E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80025E1	-8.34465E-4	-8.80003E1	-1.66893E-4	5.72205E-3	9.28879E-2	1.57689E1	-1.98832E1	-1.99824E1	1.50184E1	1.72437E-8	2.51525E-3	2.51525E-3	6.32356E-3	2.33109E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80025E1	-9.53674E-4	-8.80003E1	2.38419E-4	5.72205E-3	9.27925E-2	1.58345E1	-1.98871E1	-1.99797E1	1.50088E1	1.7206E-8	2.51359E-3	2.51359E-3	6.3074E-3	2.32255E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80021E1	-3.09944E-4	-8.80001E1	-1.66893E-4	5.72205E-3	9.3174E-2	1.58119E1	-1.98392E1	-1.99492E1	1.49758E1	1.72437E-8	2.51739E-3	2.51739E-3	6.33977E-3	2.3291E-2
8.0E0	1.0E0	2.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80022E1	-7.15256E-5	-8.80002E1	0.0E0	5.45979E-3	9.29832E-2	1.57783E1	-1.98681E1	-1.99408E1	1.50322E1	1.72252E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.33094E-2
1.2E1	1.06E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.8002E1	-5.00679E-4	-8.79999E1	1.90735E-4	5.60284E-3	9.31025E-2	1.58113E1	-1.98849E1	-1.99396E1	1.49992E1	1.72477E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.34516E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80021E1	-5.48363E-4	-8.79999E1	3.09944E-4	5.60284E-3	9.29594E-2	1.58274E1	-1.98659E1	-1.99644E1	1.50126E1	1.72402E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.34516E-2
1.4E1	4.1E1	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80019E1	-6.4373E-4	-8.80001E1	1.66893E-4	5.91278E-3	9.31501E-2	1.57885E1	-1.98747E1	-1.99632E1	1.49764E1	1.72511E-8	2.52599E-3	2.52599E-3	6.32356E-3	2.33905E-2
1.5E1	4.3E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80018E1	-9.77516E-4	-8.80001E1	2.38419E-5	6.07967E-3	9.29832E-2	1.57843E1	-1.98867E1	-1.99402E1	1.50046E1	1.72217E-8	2.51417E-3	2.51417E-3	6.32356E-3	2.34905E-2
1.6E1	3.31E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80018E1	-4.76837E-4	-8.8E1	4.29153E-4	5.6982E-3	9.31025E-2	1.58065E1	-1.98609E1	-1.99786E1	1.49938E1	1.72777E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.33905E-2
1.7E1	5.32E2	1.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80019E1	-3.57628E-4	-8.79998E1	1.19209E-4	5.53131E-3	9.31263E-2	1.57855E1	-1.98356E1	-1.99834E1	1.50238E1	1.72777E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.33094E-2
1.8E1	2.137E3	5.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80024E1	-4.29153E-4	-8.79997E1	-9.53674E-5	5.8651E-3	9.3317E-2	1.58101E1	-1.98338E1	-1.99738E1	1.50022E1	1.71953E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.32892E-2
1.9E1	2.646E3	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.8002E1	-4.76837E-5	-8.79995E1	2.38419E-4	5.53131E-3	9.34124E-2	1.58173E1	-1.98549E1	-1.99828E1	1.49974E1	1.71953E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.33499E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.15461E-2	-8.80023E1	-2.86102E-4	-8.79998E1	1.43051E-4	5.55515E-3	9.33409E-2	1.58185E1	-1.98801E1	-1.99702E1	1.49806E1	1.72477E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.34109E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80022E1	-6.67572E-4	-8.79997E1	7.15256E-5	5.62668E-3	9.31025E-2	1.58061E1	-1.98493E1	-2.00151E1	1.50225E1	1.71953E-8	2.52538E-3	2.52538E-3	6.31288E-3	2.33297E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80021E1	-3.8147E-4	-8.79995E1	-4.76837E-5	5.17368E-3	9.33647E-2	1.57619E1	-1.98464E1	-1.99956E1	1.5004E1	1.72511E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.33109E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80023E1	-6.19888E-4	-8.79996E1	-1.19209E-4	5.45979E-3	9.34601E-2	1.57753E1	-1.98615E1	-1.99402E1	1.50081E1	1.72511E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.33109E-2