[Scan]
initial_time=2016-02-17T17:10:46
final_time=2016-02-17T17:11:06
ip_count=19
run=1032
dataset=4
scan=23
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.8416E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.67532E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.08441E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.66715E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.29245E-8
mult1=-9.69609E-9
mult2=-2.67718E-9
rf_tmon=-4.81544E-3
rf_agc=3.35793E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=5.9551E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6532E0
bslens_imon=2.45491E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19958E1
lens5a_imon=1.97215E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53681E1
cs_ef1b_imon=3.00611E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02191E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04939E1
cs_ea1_imon=2.42466E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99615E0
lens1_imon=1.67256E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64722E1
os_ef1alow_imon=2.98812E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04149E1
cs_ea2_imon=1.5494E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84299E1
cs_ef1a_imon=2.97747E-5
olens2_vset=0.0E0
olens2_vmon=1.33514E-3
olens2_imon=1.16438E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11258E1
os_restr1_imon=4.31003E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15036E1
os_ea1_imon=2.28252E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63859E1
os_ef1bup_imon=3.08322E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25944E0
cs_ionrep_imon=1.25703E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01772E1
cs_anode1_imon=3.10305E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99987E1
olens4_imon=4.86952E-9
tplens_vset=0.0E0
tplens_vmon=-1.62797E0
tplens_imon=-2.07998E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99763E1
iondef3_imon=8.75038E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9852E1
iondef2_imon=9.4005E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03013E2
lens6_imon=2.98401E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=8.2252E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26679E0
ionrepsh_imon=1.93579E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33572E1
lens5b_imon=2.18629E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75101E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44615E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00509E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71233E1
cs_ef2a_imon=3.18237E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05548E0
os_ef2alow_imon=-2.74054E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.32104E-1
os_ef2bup_imon=-5.40639E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10824E1
os_restr2_imon=3.45483E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.29414E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0206E1
cs_anode2_imon=2.26217E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58264E1
iondef1_imon=5.29044E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50094E1
iondef4_imon=5.30841E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=3.02787E-8
olens1_vset=0.0E0
olens1_vmon=5.48363E-4
olens1_imon=1.37839E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14055E0
cs_ionaccel_imon=-1.99146E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47153E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56295E1
einzel_imon=7.79433E-6
window_vset=0.0E0
window_vmon=1.7218E-1
window_imon=-1.21668E-6
mask1_vset=-4.8E2
mask1_vmon=-4.826E2
mask1_imon=2.39158E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-6.65882E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.25181E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.587E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=7.6191E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29017E0
defgridb_imon=6.38866E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33278E1
os_fil1_imon=9.47634E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07133E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64679E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.98736E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61931E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67134E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7795E-2
os_fil2_imon=-2.74995E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76657E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56938E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35522E-1
cs_fil2_imon=-2.14407E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.22018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22479E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=2.32285E-2
chamber_ion_pmon=1.72402E-8
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.8449E-1
res40_imon=-2.58999E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.836E3	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80023E1	-8.10623E-4	-8.80003E1	3.57628E-4	5.43594E-3	9.32693E-2	1.57908E1	-1.98605E1	-1.99779E1	1.50166E1	1.72716E-8	2.51952E-3	2.51952E-3	6.31879E-3	2.33063E-2
2.0E0	2.607E3	3.0E0	3.16E2	1.6E2	-7.44059E-2	-8.80022E1	-7.39098E-4	-8.80003E1	2.14577E-4	5.79357E-3	9.36031E-2	1.58124E1	-1.98716E1	-1.99818E1	1.50142E1	1.72437E-8	2.51632E-3	2.51632E-3	6.29665E-3	2.32315E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.8002E1	-5.24521E-4	-8.79998E1	1.66893E-4	5.6982E-3	9.33647E-2	1.58041E1	-1.9855E1	-1.99825E1	1.49784E1	1.72477E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.32084E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80023E1	-6.67572E-4	-8.79998E1	2.86102E-4	5.74589E-3	9.30309E-2	1.58029E1	-1.98452E1	-1.9978E1	1.50256E1	1.72658E-8	2.51954E-3	2.51954E-3	6.28592E-3	2.32513E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80019E1	-1.0252E-3	-8.79998E1	-1.19209E-4	5.6982E-3	9.29117E-2	1.57747E1	-1.98573E1	-1.99576E1	1.49938E1	1.71484E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.32315E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80022E1	-8.10623E-4	-8.8E1	2.86102E-4	5.67436E-3	9.27925E-2	1.58035E1	-1.98543E1	-1.99624E1	1.50136E1	1.72213E-8	2.52139E-3	2.52139E-3	6.31858E-3	2.33492E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.8002E1	-9.05991E-4	-8.79999E1	3.57628E-4	5.79357E-3	9.29594E-2	1.58056E1	-1.98729E1	-1.9988E1	1.50154E1	1.72702E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.32285E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80021E1	-4.05312E-4	-8.79997E1	-7.15256E-5	5.6982E-3	9.31501E-2	1.58067E1	-1.98594E1	-1.99396E1	1.49952E1	1.72364E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.31326E-2
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80021E1	-5.96046E-4	-8.80002E1	0.0E0	5.55515E-3	9.29594E-2	1.57855E1	-1.98615E1	-1.99564E1	1.4986E1	1.72584E-8	2.51739E-3	2.51739E-3	6.32356E-3	2.33109E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80023E1	-6.91414E-4	-8.80002E1	9.53674E-5	5.45979E-3	9.31025E-2	1.5812E1	-1.98759E1	-1.99697E1	1.49975E1	1.7229E-8	2.5131E-3	2.5131E-3	6.3074E-3	2.33308E-2
1.4E1	3.5E1	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.8002E1	-1.04904E-3	-8.8E1	1.19209E-4	5.48363E-3	9.33886E-2	1.58085E1	-1.98517E1	-1.99691E1	1.49851E1	1.71923E-8	2.51739E-3	2.51739E-3	6.30202E-3	2.32117E-2
1.5E1	4.5E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.8002E1	-1.00136E-3	-8.80002E1	0.0E0	5.6982E-3	9.32217E-2	1.58173E1	-1.98729E1	-1.99943E1	1.49878E1	1.72732E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.33308E-2
1.6E1	3.09E2	1.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80021E1	-6.91414E-4	-8.79999E1	2.86102E-4	5.55515E-3	9.32217E-2	1.57993E1	-1.98428E1	-1.99678E1	1.49638E1	1.72852E-8	2.5199E-3	2.5199E-3	6.28006E-3	2.33094E-2
1.7E1	4.98E2	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80021E1	-8.82149E-4	-8.80001E1	-1.90735E-4	5.6982E-3	9.29832E-2	1.57765E1	-1.98531E1	-1.9978E1	1.49968E1	1.72177E-8	2.51662E-3	2.51662E-3	6.30192E-3	2.32285E-2
1.8E1	2.102E3	3.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80019E1	-8.58307E-4	-8.79999E1	2.38419E-4	5.8651E-3	9.30786E-2	1.57855E1	-1.98706E1	-1.99614E1	1.5001E1	1.729E-8	2.51581E-3	2.51581E-3	6.32978E-3	2.33905E-2
1.9E1	2.714E3	4.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80021E1	-1.07288E-3	-8.79999E1	3.33786E-4	5.53131E-3	9.31263E-2	1.58059E1	-1.98777E1	-1.99666E1	1.5013E1	1.72511E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.33507E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80021E1	-1.04904E-3	-8.80001E1	3.33786E-4	5.29289E-3	9.3174E-2	1.58077E1	-1.98434E1	-1.99912E1	1.4989E1	1.72702E-8	2.52757E-3	2.52757E-3	6.3074E-3	2.32689E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80021E1	-9.53674E-4	-8.80001E1	1.90735E-4	5.57899E-3	9.30786E-2	1.57979E1	-1.98942E1	-1.9962E1	1.50196E1	1.72531E-8	2.51972E-3	2.51972E-3	6.33461E-3	2.32801E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.8002E1	-6.19888E-4	-8.80003E1	-2.38419E-5	5.93662E-3	9.33409E-2	1.57951E1	-1.98657E1	-1.99714E1	1.50064E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80022E1	-1.0252E-3	-8.80001E1	9.53674E-5	5.55515E-3	9.32455E-2	1.58264E1	-1.9852E1	-1.99763E1	1.50094E1	1.72402E-8	2.51771E-3	2.51771E-3	6.34588E-3	2.32285E-2