[Scan]
initial_time=2016-02-17T17:12:07
final_time=2016-02-17T17:12:27
ip_count=19
run=1032
dataset=4
scan=26
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.83955E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.33335E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.05503E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.66037E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.28899E-8
mult1=-1.06675E-8
mult2=-2.79846E-9
rf_tmon=-5.25144E-3
rf_agc=3.26246E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=5.96869E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65147E0
bslens_imon=2.65652E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20249E1
lens5a_imon=1.99819E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5347E1
cs_ef1b_imon=3.01588E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02167E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04776E1
cs_ea1_imon=2.4431E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05779E0
lens1_imon=1.48851E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64713E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.54338E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=2.99364E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=1.16496E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11413E1
os_restr1_imon=4.31458E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15364E1
os_ea1_imon=2.29019E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63658E1
os_ef1bup_imon=3.08782E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2403E0
cs_ionrep_imon=1.24005E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01775E1
cs_anode1_imon=3.10485E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.87942E-9
tplens_vset=0.0E0
tplens_vmon=-1.58893E0
tplens_imon=-2.38717E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99552E1
iondef3_imon=8.73014E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98867E1
iondef2_imon=9.29645E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0295E2
lens6_imon=2.98594E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=8.06439E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28513E0
ionrepsh_imon=1.9221E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33587E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74779E1
cs_ef2b_imon=3.133E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40901E0
os_ea2_imon=-5.25409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06136E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71067E1
cs_ef2a_imon=3.17157E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04703E0
os_ef2alow_imon=-2.59891E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.35459E-1
os_ef2bup_imon=-5.36174E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10695E1
os_restr2_imon=3.46211E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01919E1
cs_anode2_imon=2.25897E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58341E1
iondef1_imon=5.09517E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49952E1
iondef4_imon=5.19608E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=3.03273E-8
olens1_vset=0.0E0
olens1_vmon=6.67572E-4
olens1_imon=1.37552E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.97684E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.4731E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56121E1
einzel_imon=7.58706E-6
window_vset=0.0E0
window_vmon=1.71349E-1
window_imon=-1.03157E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39195E-4
mask2_vset=0.0E0
mask2_vmon=-1.86286E1
mask2_imon=-7.15322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.67894E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.59588E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.4418E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34059E0
defgridb_imon=6.09328E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33286E1
os_fil1_imon=9.48519E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06576E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64627E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30872E1
cs_fil1_imon=9.9938E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62117E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67131E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.8507E-2
os_fil2_imon=-2.60547E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04557E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60405E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35645E-1
cs_fil2_imon=-2.61126E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50869E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22589E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.33702E-2
chamber_ion_pmon=1.72477E-8
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.27553E-1
res40_imon=-2.58153E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.95E3	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80023E1	-8.82149E-4	-8.79997E1	3.09944E-4	5.74589E-3	9.36747E-2	1.58029E1	-1.98759E1	-1.9951E1	1.5001E1	1.72732E-8	2.52384E-3	2.52384E-3	6.30202E-3	2.3291E-2
2.0E0	2.662E3	4.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80022E1	-7.15256E-4	-8.79997E1	1.19209E-4	5.38826E-3	9.34601E-2	1.57946E1	-1.98337E1	-2.00198E1	1.50328E1	1.72552E-8	2.51334E-3	2.51334E-3	6.3074E-3	2.31279E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80021E1	-1.00136E-3	-8.79997E1	7.15256E-5	5.55515E-3	9.31025E-2	1.57751E1	-1.98318E1	-1.99703E1	1.49935E1	1.72823E-8	2.52027E-3	2.52027E-3	6.29067E-3	2.32873E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.44059E-2	-8.80021E1	-1.00136E-3	-8.8E1	1.19209E-4	5.14984E-3	9.32932E-2	1.57634E1	-1.98673E1	-2.00106E1	1.50226E1	1.72399E-8	2.51077E-3	2.51077E-3	6.29684E-3	2.32733E-2
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.44831E-2	-8.80021E1	-1.09673E-3	-8.8E1	7.15256E-5	5.48363E-3	9.36747E-2	1.58185E1	-1.99301E1	-1.99779E1	1.50064E1	1.72777E-8	2.51334E-3	2.51334E-3	6.3074E-3	2.32084E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80019E1	-1.0252E-3	-8.80002E1	2.86102E-4	5.31673E-3	9.34601E-2	1.57747E1	-1.98476E1	-1.99949E1	1.50064E1	1.72777E-8	2.51334E-3	2.51334E-3	6.33486E-3	2.33499E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80022E1	-9.77516E-4	-8.80001E1	0.0E0	5.60284E-3	9.31978E-2	1.58138E1	-1.98287E1	-2.00127E1	1.49929E1	1.7229E-8	2.51954E-3	2.51954E-3	6.34518E-3	2.33507E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80023E1	-3.09944E-4	-8.80003E1	4.76837E-5	5.43594E-3	9.3174E-2	1.58239E1	-1.98699E1	-1.99762E1	1.50394E1	1.72627E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.33499E-2
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80019E1	-7.39098E-4	-8.79999E1	1.19209E-4	5.57899E-3	9.32217E-2	1.57931E1	-1.98562E1	-1.9979E1	1.50051E1	1.72658E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.33308E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80019E1	-5.00679E-4	-8.80003E1	3.09944E-4	5.67436E-3	9.32217E-2	1.57979E1	-1.9874E1	-1.99826E1	1.49954E1	1.72183E-8	2.51709E-3	2.51709E-3	6.32328E-3	2.32149E-2
1.4E1	5.4E1	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80019E1	-5.00679E-4	-8.79999E1	2.6226E-4	5.55515E-3	9.33886E-2	1.58101E1	-1.98693E1	-1.9969E1	1.50238E1	1.72763E-8	2.51296E-3	2.51296E-3	6.31902E-3	2.33261E-2
1.5E1	5.3E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80023E1	-5.00679E-4	-8.8E1	7.15256E-5	5.72205E-3	9.35316E-2	1.58371E1	-1.98687E1	-1.99312E1	1.5016E1	1.72777E-8	2.51334E-3	2.51334E-3	6.3074E-3	2.32487E-2
1.6E1	3.15E2	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80021E1	-5.72205E-4	-8.80002E1	-7.15256E-5	5.4121E-3	9.33647E-2	1.58161E1	-1.98987E1	-1.99654E1	1.50256E1	1.72477E-8	2.51771E-3	2.51771E-3	6.34588E-3	2.33499E-2
1.7E1	5.29E2	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80021E1	-6.91414E-4	-8.80001E1	2.38419E-5	5.6982E-3	9.35078E-2	1.57662E1	-1.98398E1	-1.99636E1	1.49932E1	1.72953E-8	2.52169E-3	2.52169E-3	6.33436E-3	2.3291E-2
1.8E1	2.207E3	5.0E0	7.27E2	5.0E2	-7.3401E-2	-8.8002E1	-8.34465E-4	-8.80002E1	1.90735E-4	5.14984E-3	9.34124E-2	1.57985E1	-1.98381E1	-1.99797E1	1.5028E1	1.72852E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.32892E-2
1.9E1	2.696E3	0.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80019E1	-8.34465E-4	-8.80002E1	4.76837E-5	5.29289E-3	9.32693E-2	1.57933E1	-1.98753E1	-1.99648E1	1.50062E1	1.72402E-8	2.5188E-3	2.5188E-3	6.34588E-3	2.32487E-2
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80018E1	-5.24521E-4	-8.80002E1	2.14577E-4	5.19753E-3	9.34124E-2	1.57943E1	-1.98405E1	-1.99437E1	1.49956E1	1.72584E-8	2.51739E-3	2.51739E-3	6.33977E-3	2.33308E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80021E1	-8.82149E-4	-8.80002E1	4.29153E-4	5.72205E-3	9.3317E-2	1.58262E1	-1.98647E1	-1.99555E1	1.50064E1	1.72103E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.33297E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80019E1	-7.15256E-4	-8.80004E1	3.8147E-4	5.53131E-3	9.35316E-2	1.58113E1	-1.98645E1	-1.99822E1	1.50034E1	1.7207E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.33308E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80021E1	-5.00679E-4	-8.8E1	1.19209E-4	5.53131E-3	9.32693E-2	1.58341E1	-1.98867E1	-1.99552E1	1.49952E1	1.72477E-8	2.51334E-3	2.51334E-3	6.32386E-3	2.33702E-2