[Scan]
initial_time=2016-02-17T17:13:29
final_time=2016-02-17T17:13:49
ip_count=19
run=1032
dataset=4
scan=29
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.72732E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.68616E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.09736E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-1.67865E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.28971E-8
mult1=-1.00077E-8
mult2=-2.72718E-9
rf_tmon=-4.57436E-3
rf_agc=3.32383E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=6.05524E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63309E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19803E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.05248E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53466E1
cs_ef1b_imon=3.00577E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.0237E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04694E1
cs_ea1_imon=2.43441E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05157E0
lens1_imon=1.2652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64867E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03594E1
cs_ea2_imon=1.54543E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.96901E-5
olens2_vset=0.0E0
olens2_vmon=1.14441E-3
olens2_imon=1.16304E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.31761E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.28589E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63419E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24248E0
cs_ionrep_imon=1.25307E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01677E1
cs_anode1_imon=3.11569E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99985E1
olens4_imon=4.9374E-9
tplens_vset=0.0E0
tplens_vmon=-1.62821E0
tplens_imon=-1.80383E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99891E1
iondef3_imon=8.75269E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98594E1
iondef2_imon=9.40158E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.03161E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2557E0
ionrepsh_imon=1.93476E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.17413E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74441E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41793E0
os_ea2_imon=-3.9668E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06164E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07798E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.44275E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10535E1
os_restr2_imon=3.46924E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.30108E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02115E1
cs_anode2_imon=2.24317E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58179E1
iondef1_imon=5.37485E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50659E1
iondef4_imon=5.3777E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27965E1
olens3_imon=3.02509E-8
olens1_vset=0.0E0
olens1_vmon=7.86781E-4
olens1_imon=1.37724E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16258E0
cs_ionaccel_imon=-2.05008E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02038E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.82119E-6
window_vset=0.0E0
window_vmon=1.93316E-1
window_imon=-1.36172E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.86542E1
mask2_imon=-9.11223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.63516E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.23643E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.21698E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35645E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.47874E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07714E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64629E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30931E1
cs_fil1_imon=1.0007E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62486E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66897E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80286E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.44009E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-1.92715E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.83608E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22599E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.32285E-2
chamber_ion_pmon=1.72252E-8
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.89325E-1
res40_imon=-2.66635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.929E3	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80021E1	-8.34465E-4	-8.80001E1	1.90735E-4	5.65052E-3	9.29117E-2	1.5825E1	-1.98417E1	-1.9952E1	1.49968E1	1.72552E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.32892E-2
2.0E0	2.567E3	0.0E0	3.16E2	1.6E2	-7.19325E-2	-8.8002E1	-6.91414E-4	-8.79999E1	1.90735E-4	5.50747E-3	9.30548E-2	1.58191E1	-1.98661E1	-2.00112E1	1.49878E1	1.72437E-8	2.51096E-3	2.51096E-3	6.31817E-3	2.33308E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80025E1	-6.4373E-4	-8.79999E1	3.33786E-4	5.67436E-3	9.31978E-2	1.58002E1	-1.98364E1	-1.99726E1	1.49806E1	1.729E-8	2.51804E-3	2.51804E-3	6.29067E-3	2.32461E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80021E1	-4.76837E-4	-8.79999E1	9.53674E-5	5.53131E-3	9.28879E-2	1.58103E1	-1.98712E1	-1.99909E1	1.50196E1	1.72364E-8	2.52384E-3	2.52384E-3	6.3074E-3	2.32315E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80022E1	-9.05991E-4	-8.79999E1	2.14577E-4	5.79357E-3	9.3174E-2	1.57993E1	-1.98338E1	-1.99937E1	1.49976E1	1.72327E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.33499E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80026E1	-8.82149E-4	-8.79998E1	2.86102E-4	5.76973E-3	9.35078E-2	1.57743E1	-1.98865E1	-1.99455E1	1.4989E1	1.72511E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.3291E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80022E1	-4.76837E-4	-8.79997E1	1.19209E-4	5.24521E-3	9.34362E-2	1.57753E1	-1.98368E1	-1.9951E1	1.49962E1	1.72252E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.33094E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80025E1	-6.19888E-4	-8.80002E1	2.38419E-4	5.55515E-3	9.32693E-2	1.57777E1	-1.98452E1	-1.9957E1	1.50034E1	1.72327E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.32487E-2
1.2E1	8.7E1	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80023E1	-5.48363E-4	-8.79997E1	1.90735E-4	5.53131E-3	9.32455E-2	1.58359E1	-1.98849E1	-2.00033E1	1.49746E1	1.72777E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.33094E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80019E1	-4.29153E-4	-8.80001E1	2.6226E-4	5.74589E-3	9.32455E-2	1.5805E1	-1.98653E1	-1.99844E1	1.50076E1	1.72511E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.3291E-2
1.4E1	6.6E1	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80023E1	-2.6226E-4	-8.79999E1	1.90735E-4	5.8651E-3	9.30786E-2	1.57855E1	-1.98428E1	-1.99738E1	1.4995E1	1.72777E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.32285E-2
1.5E1	4.6E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80022E1	-5.96046E-4	-8.79996E1	1.19209E-4	5.76973E-3	9.3317E-2	1.58029E1	-1.98543E1	-2.00171E1	1.5023E1	1.72364E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.3291E-2
1.6E1	3.06E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80022E1	-5.96046E-4	-8.8E1	2.38419E-5	5.76973E-3	9.31025E-2	1.58138E1	-1.98688E1	-1.99826E1	1.49902E1	1.73002E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.33702E-2
1.7E1	5.54E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80018E1	-6.91414E-4	-8.8E1	-1.43051E-4	5.88894E-3	9.3317E-2	1.57987E1	-1.98729E1	-1.99714E1	1.49992E1	1.72732E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.33308E-2
1.8E1	2.162E3	3.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80022E1	-8.10623E-4	-8.80003E1	9.53674E-5	5.79357E-3	9.31025E-2	1.58245E1	-1.98747E1	-1.99702E1	1.50058E1	1.72852E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.32689E-2
1.9E1	2.683E3	0.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80021E1	-1.09673E-3	-8.80003E1	-1.19209E-4	5.93662E-3	9.29832E-2	1.58067E1	-1.98582E1	-1.9962E1	1.50028E1	1.73152E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.33094E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80019E1	-9.05991E-4	-8.80002E1	-9.53674E-5	5.72205E-3	9.29117E-2	1.58168E1	-1.98865E1	-1.99561E1	1.50271E1	1.72511E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.33109E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80021E1	-8.82149E-4	-8.80001E1	1.19209E-4	5.6982E-3	9.28164E-2	1.58351E1	-1.99042E1	-1.99608E1	1.5001E1	1.72627E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.32285E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80022E1	-7.15256E-4	-8.80002E1	-1.43051E-4	5.67436E-3	9.34124E-2	1.58148E1	-1.9841E1	-1.99855E1	1.49968E1	1.72511E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.3291E-2
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80024E1	-6.67572E-4	-8.79997E1	-4.76837E-5	5.4121E-3	9.35316E-2	1.58179E1	-1.98594E1	-1.99891E1	1.50659E1	1.72252E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.32285E-2