[Scan]
initial_time=2016-02-17T17:14:23
final_time=2016-02-17T17:14:43
ip_count=19
run=1032
dataset=4
scan=31
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.82878E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.01602E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.06056E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.66051E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.28797E-8
mult1=-9.80102E-9
mult2=-2.80858E-9
rf_tmon=-4.69203E-3
rf_agc=3.36215E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=5.85461E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66483E0
bslens_imon=2.51E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19774E1
lens5a_imon=2.00631E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04916E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=3.01225E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05233E1
cs_ea1_imon=2.42687E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96799E0
lens1_imon=1.60645E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04382E1
cs_ea2_imon=1.55968E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=2.99423E-5
olens2_vset=0.0E0
olens2_vmon=1.50204E-3
olens2_imon=1.16283E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.31545E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14871E1
os_ea1_imon=2.29942E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24598E0
cs_ionrep_imon=1.22691E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93549E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=3.10055E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.8888E-9
tplens_vset=0.0E0
tplens_vmon=-1.56246E0
tplens_imon=-2.81457E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99483E1
iondef3_imon=8.83119E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98718E1
iondef2_imon=9.42988E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=8.53729E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28515E0
ionrepsh_imon=1.9391E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33695E1
lens5b_imon=2.18959E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74393E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44554E0
os_ea2_imon=-6.67119E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00693E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04194E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28058E-1
os_ef2bup_imon=-5.46664E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.45266E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.31728E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.25902E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5789E1
iondef1_imon=5.0517E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50268E1
iondef4_imon=5.30562E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=3.02626E-8
olens1_vset=0.0E0
olens1_vmon=4.76837E-4
olens1_imon=1.37671E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14936E0
cs_ionaccel_imon=-2.01404E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.60134E-6
window_vset=0.0E0
window_vmon=2.08333E-1
window_imon=-1.12025E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.8629E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.6338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93745E3
defgrida_imon=6.73759E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=6.96899E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34533E0
defgridb_imon=6.27112E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33296E1
os_fil1_imon=9.47922E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06825E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64627E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30882E1
cs_fil1_imon=9.98438E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61807E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67094E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81892E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68626E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22513E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.33499E-2
chamber_ion_pmon=1.72327E-8
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.74018E-1
res40_imon=-2.60148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.976E3	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80021E1	-4.52995E-4	-8.79997E1	1.66893E-4	5.79357E-3	9.31025E-2	1.58221E1	-1.98482E1	-1.99679E1	1.49836E1	1.72137E-8	2.51693E-3	2.51693E-3	6.31299E-3	2.32873E-2
2.0E0	2.714E3	4.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80022E1	-2.86102E-4	-8.8E1	-2.38419E-4	5.8651E-3	9.31025E-2	1.58251E1	-1.98398E1	-1.99402E1	1.49979E1	1.72879E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.32117E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80019E1	-4.29153E-4	-8.79999E1	2.38419E-4	5.57899E-3	9.31501E-2	1.57949E1	-1.98712E1	-1.99638E1	1.503E1	1.72852E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.32689E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80018E1	-3.8147E-4	-8.80001E1	2.38419E-5	5.98431E-3	9.32455E-2	1.57572E1	-1.98859E1	-1.9985E1	1.50124E1	1.73322E-8	2.51632E-3	2.51632E-3	6.30202E-3	2.33706E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.8002E1	-8.58307E-4	-8.80001E1	-1.43051E-4	5.84126E-3	9.32693E-2	1.5802E1	-1.98471E1	-1.99751E1	1.49998E1	1.73077E-8	2.52209E-3	2.52209E-3	6.29645E-3	2.32689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80017E1	-5.48363E-4	-8.79998E1	9.53674E-5	5.60284E-3	9.31978E-2	1.58239E1	-1.98639E1	-1.99642E1	1.49968E1	1.72402E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.32285E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.43285E-2	-8.80018E1	-9.53674E-4	-8.79997E1	-1.43051E-4	5.29289E-3	9.31978E-2	1.57963E1	-1.98476E1	-1.99474E1	1.49926E1	1.72402E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.33702E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80018E1	-9.29832E-4	-8.79999E1	7.15256E-5	5.24521E-3	9.31263E-2	1.58077E1	-1.98446E1	-1.99744E1	1.50094E1	1.72889E-8	2.51935E-3	2.51935E-3	6.32936E-3	2.33094E-2
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80021E1	-7.39098E-4	-8.79996E1	9.53674E-5	5.6982E-3	9.30309E-2	1.58132E1	-1.98694E1	-1.99414E1	1.50058E1					
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80017E1	-6.4373E-4	-8.79996E1	-2.38419E-5	5.31673E-3	9.34839E-2	1.57933E1	-1.98657E1	-1.9969E1	1.49956E1	1.73026E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.33507E-2
1.4E1	4.9E1	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80019E1	-9.53674E-4	-8.79999E1	0.0E0	5.53131E-3	9.32217E-2	1.58173E1	-1.98621E1	-1.99726E1	1.50052E1	1.72552E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.32285E-2
1.5E1	3.6E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80023E1	-7.62939E-4	-8.79998E1	2.14577E-4	5.8651E-3	9.33409E-2	1.58071E1	-1.98549E1	-1.9993E1	1.50154E1	1.72552E-8	2.52209E-3	2.52209E-3	6.29645E-3	2.32892E-2
1.6E1	3.2E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80022E1	-5.72205E-4	-8.79998E1	1.43051E-4	5.55515E-3	9.31263E-2	1.58107E1	-1.98495E1	-1.99834E1	1.4962E1	1.72177E-8	2.51552E-3	2.51552E-3	6.33486E-3	2.31681E-2
1.7E1	5.07E2	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80021E1	-5.96046E-4	-8.79996E1	0.0E0	5.43594E-3	9.32455E-2	1.58026E1	-1.98493E1	-1.99567E1	1.50282E1	1.73152E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.33094E-2
1.8E1	2.13E3	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80023E1	-7.62939E-4	-8.79997E1	0.0E0	5.55515E-3	9.31263E-2	1.58325E1	-1.98492E1	-1.99662E1	1.50236E1	1.72879E-8	2.51525E-3	2.51525E-3	6.32356E-3	2.34305E-2
1.9E1	2.687E3	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80021E1	-8.34465E-4	-8.79999E1	1.19209E-4	5.74589E-3	9.32932E-2	1.57898E1	-1.98609E1	-1.99583E1	1.4996E1	1.72471E-8	2.52236E-3	2.52236E-3	6.32328E-3	2.33123E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80023E1	-4.52995E-4	-8.8E1	9.53674E-5	5.91278E-3	9.32217E-2	1.58047E1	-1.98627E1	-1.9942E1	1.49878E1	1.72483E-8	2.51838E-3	2.51838E-3	6.31879E-3	2.33695E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80018E1	-6.19888E-4	-8.79998E1	1.90735E-4	5.57899E-3	9.3174E-2	1.58327E1	-1.9857E1	-1.99484E1	1.49992E1	1.72402E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.34109E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80021E1	-8.82149E-4	-8.80001E1	1.43051E-4	5.62668E-3	9.34124E-2	1.57765E1	-1.98446E1	-1.9966E1	1.49918E1	1.72143E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.3291E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80021E1	-7.39098E-4	-8.79999E1	1.90735E-4	5.4121E-3	9.31025E-2	1.5789E1	-1.98718E1	-1.99483E1	1.50268E1	1.72327E-8	2.51552E-3	2.51552E-3	6.33486E-3	2.33499E-2