[Scan]
initial_time=2016-02-17T17:14:50
final_time=2016-02-17T17:15:10
ip_count=19
run=1032
dataset=4
scan=32
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.7597E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.88191E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.09165E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.66183E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.29376E-8
mult1=-9.64406E-9
mult2=-2.6707E-9
rf_tmon=-4.87292E-3
rf_agc=3.34598E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=6.01315E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64331E0
bslens_imon=2.68556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20295E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53496E1
cs_ef1b_imon=3.00468E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02067E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.4391E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02814E0
lens1_imon=1.50674E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65071E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03426E1
cs_ea2_imon=1.55084E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84022E1
cs_ef1a_imon=2.99892E-5
olens2_vset=0.0E0
olens2_vmon=1.50204E-3
olens2_imon=1.16485E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.31473E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15474E1
os_ea1_imon=2.30283E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63395E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24248E0
cs_ionrep_imon=1.24766E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93391E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=3.09298E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.83464E-9
tplens_vset=0.0E0
tplens_vmon=-1.6192E0
tplens_imon=-1.37123E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9963E1
iondef3_imon=8.72385E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98831E1
iondef2_imon=9.34751E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98429E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=7.7976E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=1.92359E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33856E1
lens5b_imon=2.18098E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74027E1
cs_ef2b_imon=3.11569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42874E0
os_ea2_imon=-4.0389E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06172E2
lens4b_imon=2.00547E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05816E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23853E-1
os_ef2bup_imon=-5.32248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10709E1
os_restr2_imon=3.45266E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.30397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.25866E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58155E1
iondef1_imon=4.99994E-6
iondef4_vset=1.53E1
iondef4_vmon=1.498E1
iondef4_imon=5.27679E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=3.03082E-8
olens1_vset=0.0E0
olens1_vmon=2.14577E-4
olens1_imon=1.37492E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.93835E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47075E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=1.83706E-1
window_imon=-1.06619E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86056E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.28548E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.7195E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.29269E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54292E0
defgridb_imon=6.08863E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33321E1
os_fil1_imon=9.49063E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06783E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64367E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.99171E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62071E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67015E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81576E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67726E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22564E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.32513E-2
chamber_ion_pmon=1.72732E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.73418E-1
res40_imon=-2.72041E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.887E3	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80021E1	-8.10623E-4	-8.80003E1	1.90735E-4	6.07967E-3	9.28879E-2	1.57861E1	-1.98693E1	-1.99612E1	1.49987E1	1.73077E-8	2.52099E-3	2.52099E-3	6.35692E-3	2.33499E-2
2.0E0	2.578E3	2.0E0	3.16E2	1.6E2	-7.31692E-2	-8.8002E1	-4.76837E-4	-8.80003E1	-2.14577E-4	5.57899E-3	9.27448E-2	1.58173E1	-1.98777E1	-1.99689E1	1.49891E1	1.72103E-8	2.51771E-3	2.51771E-3	6.34588E-3	2.32892E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.8002E1	-5.48363E-4	-8.80002E1	1.43051E-4	5.43594E-3	9.29117E-2	1.58087E1	-1.98475E1	-1.99807E1	1.50097E1	1.729E-8	2.52473E-3	2.52473E-3	6.34099E-3	2.31844E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.8002E1	-4.52995E-4	-8.80001E1	2.38419E-4	5.31673E-3	9.29832E-2	1.58203E1	-1.98457E1	-1.99518E1	1.49993E1	1.72255E-8	2.51814E-3	2.51814E-3	6.32858E-3	2.33514E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80018E1	-2.86102E-4	-8.8E1	1.19209E-4	5.34058E-3	9.29356E-2	1.57807E1	-1.98507E1	-1.99552E1	1.498E1	1.72688E-8	2.51814E-3	2.51814E-3	6.3074E-3	2.33514E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80018E1	-5.72205E-4	-8.79998E1	2.38419E-4	5.6982E-3	9.31978E-2	1.58154E1	-1.98869E1	-1.99396E1	1.50016E1	1.72762E-8	2.52008E-3	2.52008E-3	6.31847E-3	2.32576E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80021E1	-5.24521E-4	-8.8E1	7.15256E-5	5.53131E-3	9.29356E-2	1.58213E1	-1.98603E1	-1.99613E1	1.49963E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80018E1	-3.57628E-4	-8.8E1	-1.90735E-4	5.45979E-3	9.34124E-2	1.58149E1	-1.98705E1	-2.00015E1	1.50138E1	1.72226E-8	2.51719E-3	2.51719E-3	6.32592E-3	2.32674E-2
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80019E1	-6.4373E-4	-8.79998E1	-2.38419E-5	5.4121E-3	9.34362E-2	1.57855E1	-1.98302E1	-1.99654E1	1.4986E1	1.72511E-8	2.52384E-3	2.52384E-3	6.32356E-3	2.3291E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80013E1	-4.52995E-4	-8.79999E1	3.33786E-4	5.6982E-3	9.37462E-2	1.57981E1	-1.98573E1	-1.99636E1	1.498E1	1.72976E-8	2.51581E-3	2.51581E-3	6.32418E-3	2.33285E-2
1.4E1	4.3E1	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80016E1	-6.67572E-4	-8.80002E1	-1.43051E-4	5.53131E-3	9.35555E-2	1.58431E1	-1.98903E1	-2.00195E1	1.49721E1	1.72702E-8	2.52428E-3	2.52428E-3	6.31288E-3	2.32892E-2
1.5E1	4.5E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80015E1	-7.39098E-4	-8.80002E1	1.90735E-4	5.55515E-3	9.3627E-2	1.58113E1	-1.98633E1	-1.9969E1	1.50124E1	1.72402E-8	2.52757E-3	2.52757E-3	6.30192E-3	2.33094E-2
1.6E1	3.38E2	0.0E0	6.47E2	4.41E2	-7.43285E-2	-8.80017E1	-6.91414E-4	-8.80002E1	9.53674E-5	5.05447E-3	9.31263E-2	1.58008E1	-1.98771E1	-1.99467E1	1.49932E1	1.72927E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.33499E-2
1.7E1	5.56E2	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80018E1	-6.67572E-4	-8.79998E1	7.15256E-5	5.31673E-3	9.32932E-2	1.58023E1	-1.98627E1	-1.9963E1	1.5007E1	1.72732E-8	2.51525E-3	2.51525E-3	6.30202E-3	2.3291E-2
1.8E1	2.081E3	1.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80016E1	-7.39098E-4	-8.79998E1	-2.14577E-4	5.50747E-3	9.3174E-2	1.58011E1	-1.98531E1	-1.99702E1	1.49728E1	1.72777E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.32892E-2
1.9E1	2.703E3	1.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80018E1	-4.05312E-4	-8.79997E1	-3.09944E-4	5.29289E-3	9.33647E-2	1.57945E1	-1.98795E1	-1.99955E1	1.49974E1	1.73152E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.33297E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80016E1	-5.00679E-4	-8.79996E1	-9.53674E-5	5.29289E-3	9.30548E-2	1.57843E1	-1.9835E1	-1.9978E1	1.49962E1	1.72852E-8	2.51662E-3	2.51662E-3	6.34037E-3	2.33499E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80017E1	-8.34465E-4	-8.79998E1	3.09944E-4	5.43594E-3	9.31978E-2	1.58238E1	-1.98523E1	-1.99425E1	1.50172E1	1.72777E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.32487E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80018E1	-9.05991E-4	-8.79998E1	3.09944E-4	5.60284E-3	9.36031E-2	1.5812E1	-1.98788E1	-1.99638E1	1.50082E1	1.72732E-8	2.51203E-3	2.51203E-3	6.31278E-3	2.3291E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80017E1	-9.05991E-4	-8.80002E1	2.14577E-4	5.55515E-3	9.36031E-2	1.58155E1	-1.98831E1	-1.9963E1	1.498E1	1.72732E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.32513E-2