[Scan]
initial_time=2016-02-17T17:15:44
final_time=2016-02-17T17:16:03
ip_count=19
run=1032
dataset=4
scan=34
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.78328E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.67853E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.12534E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.62313E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.29434E-8
mult1=-9.32203E-9
mult2=-2.6821E-9
rf_tmon=-4.71594E-3
rf_agc=3.33032E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.05583E-3
ql5_imon=5.70643E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66107E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20181E1
lens5a_imon=1.99296E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05048E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53719E1
cs_ef1b_imon=2.99712E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05127E1
cs_ea1_imon=2.42714E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01164E0
lens1_imon=1.48832E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64574E1
os_ef1alow_imon=2.98565E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03795E1
cs_ea2_imon=1.56226E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84365E1
cs_ef1a_imon=2.98078E-5
olens2_vset=0.0E0
olens2_vmon=1.62125E-3
olens2_imon=1.16362E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.31458E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15491E1
os_ea1_imon=2.3152E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6367E1
os_ef1bup_imon=3.07635E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23703E0
cs_ionrep_imon=1.24245E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93455E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01832E1
cs_anode1_imon=3.11805E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.90193E-9
tplens_vset=0.0E0
tplens_vmon=-1.60725E0
tplens_imon=-3.1235E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00245E1
iondef3_imon=8.79183E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98541E1
iondef2_imon=9.41755E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98565E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=8.16512E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27759E0
ionrepsh_imon=1.92587E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33704E1
lens5b_imon=2.18693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75596E1
cs_ef2b_imon=3.13057E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41548E0
os_ea2_imon=-5.17446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06136E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71124E1
cs_ef2a_imon=3.18478E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06672E0
os_ef2alow_imon=-2.65451E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22716E-1
os_ef2bup_imon=-5.31656E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.45481E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.31145E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.27183E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57997E1
iondef1_imon=5.06186E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49824E1
iondef4_imon=5.25169E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=3.02025E-8
olens1_vset=0.0E0
olens1_vmon=9.29832E-4
olens1_imon=1.37479E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13825E0
cs_ionaccel_imon=-1.96294E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56011E1
einzel_imon=7.64961E-6
window_vset=0.0E0
window_vmon=1.73666E-1
window_imon=-9.62065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39067E-4
mask2_vset=0.0E0
mask2_vmon=-1.8617E1
mask2_imon=-6.59718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.63425E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.62963E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.40483E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45581E0
defgridb_imon=6.1673E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.48739E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07202E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64499E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30888E1
cs_fil1_imon=9.99542E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6221E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67131E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.79733E-2
os_fil2_imon=-2.68656E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8776E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62792E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34271E-1
cs_fil2_imon=-2.11894E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.46612E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22681E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.77741E-1
res40_imon=-2.71012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.89E3	2.0E0	1.47E2	4.1E1	-7.13143E-2	-8.8002E1	-5.72205E-4	-8.79999E1	-2.38419E-5	5.60284E-3	9.35555E-2	1.57896E1	-1.98853E1	-1.99785E1	1.49812E1	1.73026E-8	2.5131E-3	2.5131E-3	6.29665E-3	2.33109E-2
2.0E0	2.566E3	4.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80027E1	-7.39098E-4	-8.80002E1	1.19209E-4	5.50747E-3	9.35555E-2	1.57909E1	-1.98594E1	-1.99469E1	1.49782E1	1.72732E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.32513E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80024E1	-7.86781E-4	-8.80002E1	-2.38419E-5	5.29289E-3	9.3627E-2	1.58012E1	-1.98608E1	-1.9979E1	1.4997E1	1.72213E-8	2.51693E-3	2.51693E-3	6.30182E-3	2.33079E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80018E1	-8.10623E-4	-8.8E1	2.38419E-5	5.45979E-3	9.36985E-2	1.58089E1	-1.98747E1	-1.9957E1	1.501E1	1.72761E-8	2.52131E-3	2.52131E-3	6.33388E-3	2.32343E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80022E1	-8.10623E-4	-8.79998E1	4.76837E-5	5.60284E-3	9.37223E-2	1.58077E1	-1.98693E1	-1.9954E1	1.4986E1	1.72702E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.33297E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80022E1	-5.48363E-4	-8.8E1	-2.6226E-4	5.22137E-3	9.34601E-2	1.58185E1	-1.98615E1	-1.99798E1	1.50232E1	1.72879E-8	2.52276E-3	2.52276E-3	6.31278E-3	2.32711E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80019E1	-5.48363E-4	-8.79999E1	2.14577E-4	5.45979E-3	9.31978E-2	1.58209E1	-1.98594E1	-1.99885E1	1.49848E1	1.73436E-8	2.52139E-3	2.52139E-3	6.30182E-3	2.32255E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.8002E1	-5.96046E-4	-8.79999E1	0.0E0	5.65052E-3	9.30309E-2	1.57891E1	-1.98663E1	-1.99606E1	1.50381E1	1.72437E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.33308E-2
1.2E1	1.19E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80019E1	-6.91414E-4	-8.80002E1	1.19209E-4	5.76973E-3	9.33886E-2	1.57902E1	-1.98487E1	-1.99791E1	1.50046E1	1.72805E-8	2.51847E-3	2.51847E-3	6.32356E-3	2.33109E-2
1.3E1	6.0E0	1.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80021E1	-9.29832E-4	-8.80001E1	9.53674E-5	5.45979E-3	9.35316E-2	1.58167E1	-1.98711E1	-1.99822E1	1.50076E1	1.72777E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.32084E-2
1.4E1	5.1E1	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80022E1	-1.12057E-3	-8.79998E1	1.90735E-4	5.48363E-3	9.33409E-2	1.58413E1	-1.98693E1	-1.99774E1	1.4989E1	1.72777E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.33094E-2
1.5E1	3.7E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80022E1	-8.82149E-4	-8.80001E1	2.6226E-4	5.26905E-3	9.31263E-2	1.58083E1	-1.98356E1	-2.00003E1	1.4992E1	1.71879E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.31279E-2
1.6E1	2.98E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80023E1	-1.09673E-3	-8.80002E1	1.19209E-4	5.48363E-3	9.31263E-2	1.57915E1	-1.98693E1	-1.9963E1	1.4986E1	1.72732E-8	2.5131E-3	2.5131E-3	6.32896E-3	2.32117E-2
1.7E1	5.28E2	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80021E1	-1.16825E-3	-8.80003E1	2.38419E-4	5.72205E-3	9.32455E-2	1.58026E1	-1.987E1	-1.99402E1	1.49898E1	1.72213E-8	2.51804E-3	2.51804E-3	6.27954E-3	2.32873E-2
1.8E1	2.064E3	1.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80021E1	-9.53674E-4	-8.80004E1	2.86102E-4	5.65052E-3	9.29356E-2	1.58209E1	-1.98753E1	-1.99653E1	1.49918E1	1.72658E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.31721E-2
1.9E1	2.671E3	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.8002E1	-1.09673E-3	-8.80001E1	7.15256E-5	5.22137E-3	9.30786E-2	1.57979E1	-1.98617E1	-1.99868E1	1.49986E1	1.729E-8	2.51693E-3	2.51693E-3	6.32418E-3	2.33079E-2
2.0E1	1.9E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80023E1	-1.43051E-3	-8.8E1	3.33786E-4	5.48363E-3	9.29832E-2	1.57698E1	-1.98513E1	-1.99498E1	1.49999E1	1.72879E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.33109E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80022E1	-1.14441E-3	-8.8E1	2.38419E-4	5.60284E-3	9.29594E-2	1.58132E1	-1.98841E1	-1.99744E1	1.50118E1	1.72177E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.32689E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80021E1	-9.05991E-4	-8.79999E1	3.57628E-4	5.6982E-3	9.29356E-2	1.57981E1	-1.98627E1	-1.99816E1	1.49974E1	1.71975E-8	2.51918E-3	2.51918E-3	6.3074E-3	2.33101E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80023E1	-6.91414E-4	-8.8E1	3.09944E-4	6.05583E-3	9.3174E-2	1.57997E1	-1.98541E1	-2.00245E1	1.49824E1