[Scan]
initial_time=2016-02-17T17:16:40
final_time=2016-02-17T17:17:02
ip_count=19
run=1032
dataset=4
scan=36
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.78333E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.64945E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.02332E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.60578E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.28782E-8
mult1=-1.0055E-8
mult2=-2.72326E-9
rf_tmon=-5.11117E-3
rf_agc=3.37161E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=5.82123E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19842E1
lens5a_imon=2.00952E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.04962E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53638E1
cs_ef1b_imon=3.00789E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.0216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=2.44097E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06722E0
lens1_imon=1.53099E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64516E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.5494E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8433E1
cs_ef1a_imon=2.9926E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=1.16243E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11355E1
os_restr1_imon=4.30868E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15571E1
os_ea1_imon=2.27851E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63554E1
os_ef1bup_imon=3.08156E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26331E0
cs_ionrep_imon=1.24536E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93296E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0189E1
cs_anode1_imon=3.08817E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99987E1
olens4_imon=4.84731E-9
tplens_vset=0.0E0
tplens_vmon=-1.58834E0
tplens_imon=-2.67032E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9949E1
iondef3_imon=8.74076E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98623E1
iondef2_imon=9.34954E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.9848E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=8.2109E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2987E0
ionrepsh_imon=1.91856E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.20242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74524E1
cs_ef2b_imon=3.11527E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41609E0
os_ea2_imon=-7.23616E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71182E1
cs_ef2a_imon=3.18756E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03834E0
os_ef2alow_imon=-2.64756E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25033E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.46002E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.3283E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01885E1
cs_anode2_imon=2.25897E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58215E1
iondef1_imon=5.03146E-6
iondef4_vset=1.53E1
iondef4_vmon=1.4962E1
iondef4_imon=5.29339E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=3.0274E-8
olens1_vset=0.0E0
olens1_vmon=5.72205E-4
olens1_imon=1.37598E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15505E0
cs_ionaccel_imon=-1.87953E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.4724E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56191E1
einzel_imon=7.68436E-6
window_vset=0.0E0
window_vmon=1.69611E-1
window_imon=-1.13583E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86164E1
mask2_imon=-7.46599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.60461E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.51447E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.93212E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51481E0
defgridb_imon=6.09328E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.48305E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0693E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64685E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=9.99733E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6199E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66957E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.01532E-2
os_fil2_imon=-2.81978E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91236E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63316E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34896E-1
cs_fil2_imon=-2.54755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.88691E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22536E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.3291E-2
chamber_ion_pmon=1.72584E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.11914E-1
res40_imon=-2.69622E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.901E3	2.0E0	1.47E2	4.1E1	-7.31692E-2	-8.8002E1	-1.16825E-3	-8.79998E1	3.8147E-4	5.57899E-3	9.32693E-2	1.58174E1	-1.98747E1	-1.99573E1	1.49956E1	1.72437E-8	2.52384E-3	2.52384E-3	6.31278E-3	2.3291E-2
2.0E0	2.625E3	0.0E0	3.16E2	1.6E2	-7.27053E-2	-8.8002E1	-7.39098E-4	-8.8E1	2.86102E-4	5.34058E-3	9.3174E-2	1.58087E1	-1.9863E1	-1.99849E1	1.50016E1	1.7229E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.33706E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80015E1	-7.39098E-4	-8.80003E1	4.76837E-5	5.67436E-3	9.32217E-2	1.58115E1	-1.98841E1	-1.99891E1	1.49986E1	1.72702E-8	2.52318E-3	2.52318E-3	6.3074E-3	2.32892E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80017E1	-8.58307E-4	-8.80001E1	4.76837E-4	5.60284E-3	9.31978E-2	1.57909E1	-1.98831E1	-1.99624E1	1.49818E1	1.731E-8	2.52276E-3	2.52276E-3	6.34518E-3	2.33109E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80015E1	-6.91414E-4	-8.80001E1	4.52995E-4	5.4121E-3	9.32693E-2	1.57843E1	-1.98567E1	-1.99294E1	1.49794E1	1.72927E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.33094E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80018E1	-7.86781E-4	-8.80006E1	1.90735E-4	5.67436E-3	9.32455E-2	1.5805E1	-1.9857E1	-2.00027E1	1.50248E1	1.73077E-8	2.51552E-3	2.51552E-3	6.34037E-3	2.33094E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.8002E1	-7.86781E-4	-8.80005E1	6.4373E-4	5.4121E-3	9.3317E-2	1.57801E1	-1.98765E1	-1.9957E1	1.50022E1	1.72927E-8	2.51771E-3	2.51771E-3	6.29645E-3	2.32892E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.8002E1	-6.67572E-4	-8.80004E1	1.90735E-4	5.65052E-3	9.30309E-2	1.5762E1	-1.98813E1	-1.9927E1	1.49877E1	1.73002E-8	2.51225E-3	2.51225E-3	6.32386E-3	2.33094E-2
1.2E1	8.1E1	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80018E1	-8.10623E-4	-8.80002E1	3.57628E-4	5.57899E-3	9.32455E-2	1.57908E1	-1.98588E1	-1.99655E1	1.501E1	1.72552E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.32689E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.8002E1	-6.4373E-4	-8.80001E1	-4.76837E-5	5.67436E-3	9.32217E-2	1.58124E1	-1.9852E1	-1.99806E1	1.49812E1	1.72511E-8	2.51847E-3	2.51847E-3	6.32356E-3	2.33308E-2
1.4E1	5.3E1	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.8002E1	-1.00136E-3	-8.80002E1	7.15256E-5	5.45979E-3	9.30071E-2	1.57626E1	-1.98693E1	-2.00039E1	1.49866E1	1.73002E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.33297E-2
1.5E1	5.2E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80017E1	-1.0252E-3	-8.80001E1	5.72205E-4	5.53131E-3	9.30786E-2	1.58383E1	-1.98476E1	-1.99834E1	1.50359E1	1.728E-8	2.52119E-3	2.52119E-3	6.29911E-3	2.33086E-2
1.6E1	3.11E2	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80018E1	-1.16825E-3	-8.80001E1	2.86102E-4	5.55515E-3	9.32217E-2	1.58606E1	-1.98609E1	-1.999E1	1.50045E1					
1.7E1	5.29E2	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80017E1	-1.12057E-3	-8.80002E1	3.33786E-4	5.50747E-3	9.33647E-2	1.57938E1	-1.9831E1	-1.9972E1	1.50022E1	1.72658E-8	2.51739E-3	2.51739E-3	6.32356E-3	2.32315E-2
1.8E1	2.098E3	2.0E0	7.27E2	5.0E2	-7.286E-2	-8.80018E1	-7.15256E-4	-8.80002E1	3.33786E-4	5.38826E-3	9.33409E-2	1.57969E1	-1.98879E1	-1.99492E1	1.4998E1	1.72702E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.32084E-2
1.9E1	2.632E3	2.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80016E1	-7.86781E-4	-8.8E1	3.09944E-4	5.50747E-3	9.31978E-2	1.57927E1	-1.98711E1	-1.99606E1	1.5019E1	1.72584E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.33109E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80019E1	-5.96046E-4	-8.79997E1	1.90735E-4	5.57899E-3	9.30786E-2	1.57951E1	-1.9841E1	-2.00171E1	1.50268E1	1.72365E-8	2.51804E-3	2.51804E-3	6.30182E-3	2.33905E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80018E1	-5.96046E-4	-8.79999E1	5.00679E-4	5.60284E-3	9.31263E-2	1.58268E1	-1.98889E1	-1.99396E1	1.5013E1	1.72732E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.31919E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80018E1	-4.29153E-4	-8.80003E1	2.38419E-5	5.62668E-3	9.33647E-2	1.58113E1	-1.98711E1	-1.99546E1	1.50161E1	1.72552E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.33094E-2
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80021E1	-8.10623E-4	-8.80003E1	4.52995E-4	5.48363E-3	9.3317E-2	1.58215E1	-1.98623E1	-1.9949E1	1.4962E1	1.72584E-8	2.52061E-3	2.52061E-3	6.33436E-3	2.3291E-2