[Scan]
initial_time=2016-02-17T17:20:13
final_time=2016-02-17T17:20:35
ip_count=19
run=1032
dataset=4
scan=43
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.46377E-2
qbias_imon=-3.73066E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.73468E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.11572E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.64373E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.28974E-8
mult1=-9.31897E-9
mult2=-2.86832E-9
rf_tmon=-3.64724E-3
rf_agc=3.34237E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=5.89347E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6415E0
bslens_imon=2.46205E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20097E1
lens5a_imon=1.97298E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53829E1
cs_ef1b_imon=3.00719E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02507E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05385E1
cs_ea1_imon=2.43441E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03054E0
lens1_imon=1.51395E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.96688E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04177E1
cs_ea2_imon=1.55877E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84342E1
cs_ef1a_imon=3.00198E-5
olens2_vset=0.0E0
olens2_vmon=1.54972E-3
olens2_imon=1.16334E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11378E1
os_restr1_imon=4.29373E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15029E1
os_ea1_imon=2.28372E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.08817E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25751E0
cs_ionrep_imon=1.22171E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01728E1
cs_anode1_imon=3.09199E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.89417E-9
tplens_vset=0.0E0
tplens_vmon=-1.60959E0
tplens_imon=-1.22703E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99828E1
iondef3_imon=8.63012E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98735E1
iondef2_imon=9.59625E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.15976E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=1.93476E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33742E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74397E1
cs_ef2b_imon=3.13161E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4011E0
os_ea2_imon=-7.10311E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71206E1
cs_ef2a_imon=3.19138E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06672E0
os_ef2alow_imon=-2.68927E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18082E-1
os_ef2bup_imon=-5.38259E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10509E1
os_restr2_imon=3.45446E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23111E2
cs_ionfoca_imon=6.3E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01925E1
cs_anode2_imon=2.25862E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57939E1
iondef1_imon=5.24507E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5001E1
iondef4_imon=5.21346E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=3.02602E-8
olens1_vset=0.0E0
olens1_vmon=2.38419E-4
olens1_imon=1.37744E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.93166E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47264E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.61833E-6
window_vset=0.0E0
window_vmon=1.80616E-1
window_imon=-1.03505E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8257E2
mask1_imon=2.3915E-4
mask2_vset=0.0E0
mask2_vmon=-1.86246E1
mask2_imon=-7.32698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=8.29126E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.65821E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.19535E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64217E0
defgridb_imon=6.11747E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.48652E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06796E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64519E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=1.00012E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62575E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66868E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.94473E-2
os_fil2_imon=-2.70973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81389E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7082E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33023E-1
cs_fil2_imon=-2.48384E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.75572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22649E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.32513E-2
chamber_ion_pmon=1.72805E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.69256E-1
res40_imon=-2.68232E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.982E3	0.0E0	1.47E2	4.1E1	-7.17007E-2	-8.80018E1	-5.00679E-4	-8.80003E1	-4.76837E-5	5.38826E-3	9.30071E-2	1.58351E1	-1.98617E1	-1.99549E1	1.5001E1	1.72658E-8	2.51096E-3	2.51096E-3	6.31817E-3	2.31919E-2
2.0E0	2.581E3	0.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80021E1	-5.00679E-4	-8.80002E1	1.90735E-4	5.43594E-3	9.31263E-2	1.5816E1	-1.98857E1	-1.99726E1	1.50184E1	1.72437E-8	2.52061E-3	2.52061E-3	6.32896E-3	2.33706E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.8002E1	-6.19888E-4	-8.80004E1	4.29153E-4	5.45979E-3	9.31263E-2	1.5789E1	-1.98649E1	-1.99709E1	1.49964E1	1.72594E-8	2.51693E-3	2.51693E-3	6.31858E-3	2.32461E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80022E1	-8.34465E-4	-8.80007E1	5.00679E-4	5.45979E-3	9.3174E-2	1.58431E1	-1.98543E1	-1.99816E1	1.5025E1	1.72143E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.3291E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.8002E1	-8.82149E-4	-8.80004E1	2.38419E-5	5.26905E-3	9.30309E-2	1.58131E1	-1.98795E1	-1.99534E1	1.49869E1	1.7207E-8	2.52276E-3	2.52276E-3	6.33436E-3	2.33109E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80022E1	-5.96046E-4	-8.80004E1	-2.38419E-5	5.43594E-3	9.32932E-2	1.58041E1	-1.98615E1	-1.99486E1	1.50083E1	1.72777E-8	2.51334E-3	2.51334E-3	6.30192E-3	2.32892E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80021E1	-7.86781E-4	-8.80003E1	4.76837E-5	5.34058E-3	9.32455E-2	1.57777E1	-1.98428E1	-1.99756E1	1.50323E1	1.72552E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.33297E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.8002E1	-8.10623E-4	-8.80004E1	7.15256E-5	5.38826E-3	9.33409E-2	1.57969E1	-1.98338E1	-1.9978E1	1.49554E1	1.72777E-8	2.52318E-3	2.52318E-3	6.3074E-3	2.33702E-2
1.2E1	8.5E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80021E1	-7.86781E-4	-8.80002E1	-9.53674E-5	5.4121E-3	9.3317E-2	1.58179E1	-1.98729E1	-1.99591E1	1.50034E1	1.72852E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.33297E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.8002E1	-4.05312E-4	-8.80002E1	3.8147E-4	5.65052E-3	9.30786E-2	1.57951E1	-1.98543E1	-1.9963E1	1.5025E1	1.72658E-8	2.52384E-3	2.52384E-3	6.32356E-3	2.32513E-2
1.4E1	5.2E1	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80019E1	-5.24521E-4	-8.80003E1	0.0E0	5.60284E-3	9.32693E-2	1.57963E1	-1.98362E1	-1.99636E1	1.50058E1	1.72627E-8	2.5199E-3	2.5199E-3	6.33486E-3	2.33499E-2
1.5E1	5.7E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80021E1	-5.72205E-4	-8.80003E1	0.0E0	5.67436E-3	9.32932E-2	1.58351E1	-1.99095E1	-1.99956E1	1.50244E1	1.72477E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.32892E-2
1.6E1	3.14E2	1.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80019E1	-5.72205E-4	-8.80003E1	1.90735E-4	5.93662E-3	9.34124E-2	1.57975E1	-1.98308E1	-1.9951E1	1.49854E1	1.7268E-8	2.51647E-3	2.51647E-3	6.31827E-3	2.33403E-2
1.7E1	5.5E2	1.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80018E1	-8.34465E-4	-8.80001E1	2.86102E-4	5.74589E-3	9.36508E-2	1.58065E1	-1.98549E1	-1.99756E1	1.49831E1					
1.8E1	2.158E3	2.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80021E1	-9.77516E-4	-8.8E1	3.57628E-4	5.43594E-3	9.30309E-2	1.57896E1	-1.98499E1	-1.99821E1	1.50124E1	1.72702E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.32084E-2
1.9E1	2.662E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80016E1	-7.62939E-4	-8.79999E1	0.0E0	5.29289E-3	9.31025E-2	1.58023E1	-1.98789E1	-1.9978E1	1.50184E1	1.72805E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.32711E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80017E1	-5.72205E-4	-8.79998E1	2.6226E-4	5.29289E-3	9.31978E-2	1.58142E1	-1.98508E1	-1.99328E1	1.50316E1	1.72777E-8	2.51334E-3	2.51334E-3	6.31288E-3	2.32892E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80019E1	-5.00679E-4	-8.79999E1	9.53674E-5	5.4121E-3	9.33886E-2	1.58262E1	-1.98594E1	-1.99502E1	1.5034E1	1.72365E-8	2.51359E-3	2.51359E-3	6.31858E-3	2.32666E-2
2.2E1	1.5E1	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80022E1	-5.96046E-4	-8.79998E1	1.43051E-4	5.45979E-3	9.34362E-2	1.57973E1	-1.98753E1	-1.99885E1	1.4997E1	1.72584E-8	2.51847E-3	2.51847E-3	6.32356E-3	2.32513E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.46377E-2	-8.80019E1	-7.15256E-4	-8.79999E1	2.38419E-5	5.29289E-3	9.34124E-2	1.57939E1	-1.98735E1	-1.99828E1	1.5001E1	1.72805E-8	2.52061E-3	2.52061E-3	6.3074E-3	2.32513E-2