[Scan]
initial_time=2016-02-17T17:20:44
final_time=2016-02-17T17:21:06
ip_count=19
run=1032
dataset=4
scan=44
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40967E-2
qbias_imon=-3.85105E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.59807E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.10435E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.61098E-9
ql4_vset=
ql4_vmon=-2.14577E-4
ql4_imon=1.29129E-8
mult1=-9.75243E-9
mult2=-2.78049E-9
rf_tmon=-3.41892E-3
rf_agc=3.45472E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=6.04033E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.37553E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20085E1
lens5a_imon=2.00074E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.04985E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54449E1
cs_ef1b_imon=3.00372E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02265E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04766E1
cs_ea1_imon=2.42828E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04496E0
lens1_imon=1.37335E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64122E1
os_ef1alow_imon=2.98808E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04267E1
cs_ea2_imon=1.55444E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85008E1
cs_ef1a_imon=2.97001E-5
olens2_vset=0.0E0
olens2_vmon=1.57356E-3
olens2_imon=1.16407E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10602E1
os_restr1_imon=4.32849E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15131E1
os_ea1_imon=2.27039E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63294E1
os_ef1bup_imon=3.04681E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24549E0
cs_ionrep_imon=1.25091E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02053E1
cs_anode1_imon=3.13543E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99986E1
olens4_imon=4.88465E-9
tplens_vset=0.0E0
tplens_vmon=-1.615E0
tplens_imon=-3.4621E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99744E1
iondef3_imon=8.65175E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98675E1
iondef2_imon=9.43403E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=8.10468E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28995E0
ionrepsh_imon=1.93116E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.20586E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74594E1
cs_ef2b_imon=3.11771E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42694E0
os_ea2_imon=-4.79594E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06133E2
lens4b_imon=2.00727E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71362E1
cs_ef2a_imon=3.21362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03602E0
os_ef2alow_imon=-3.07502E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.91063E-1
os_ef2bup_imon=-5.24705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10602E1
os_restr2_imon=3.44612E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02082E1
cs_anode2_imon=2.26071E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58161E1
iondef1_imon=5.22344E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49938E1
iondef4_imon=5.20303E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=3.03228E-8
olens1_vset=0.0E0
olens1_vmon=7.39098E-4
olens1_imon=1.37645E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.19733E0
cs_ionaccel_imon=-1.91428E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.4731E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56706E1
einzel_imon=7.50365E-6
window_vset=0.0E0
window_vmon=1.31384E-1
window_imon=-8.50857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82587E2
mask1_imon=2.38872E-4
mask2_vset=0.0E0
mask2_vmon=-1.86402E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.64597E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.36621E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.27827E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44668E0
defgridb_imon=6.15352E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33258E1
os_fil1_imon=9.47094E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06796E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64551E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30823E1
cs_fil1_imon=9.992E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61787E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66947E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.85445E-2
os_fil2_imon=-2.63443E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76176E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67984E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34396E-1
cs_fil2_imon=-3.20785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.07602E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22888E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.33297E-2
chamber_ion_pmon=1.72327E-8
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.10959E-1
res40_imon=-2.82133E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.905E3	2.0E0	1.47E2	4.1E1	-7.23964E-2	-8.8002E1	-6.91414E-4	-8.80002E1	7.15256E-5	5.67436E-3	9.30071E-2	1.58262E1	-1.98753E1	-1.99933E1	1.49878E1	1.72702E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.32285E-2
2.0E0	2.646E3	2.0E0	3.16E2	1.6E2	-7.286E-2	-8.80023E1	-8.10623E-4	-8.80003E1	-7.15256E-5	5.53131E-3	9.31025E-2	1.57995E1	-1.98722E1	-1.99849E1	1.49944E1	1.72511E-8	2.51954E-3	2.51954E-3	6.34518E-3	2.3291E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80022E1	-1.0252E-3	-8.80004E1	-1.43051E-4	5.60284E-3	9.3174E-2	1.57925E1	-1.98266E1	-1.99506E1	1.49914E1	1.72671E-8	2.52473E-3	2.52473E-3	6.32418E-3	2.33699E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.8002E1	-1.04904E-3	-8.80001E1	1.19209E-4	5.72205E-3	9.32932E-2	1.5818E1	-1.98736E1	-1.99738E1	1.50103E1	1.72471E-8	2.5155E-3	2.5155E-3	6.30212E-3	2.33612E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80022E1	-8.34465E-4	-8.80001E1	-2.14577E-4	5.74589E-3	9.30548E-2	1.58093E1	-1.98728E1	-1.99763E1	1.4995E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80023E1	-5.72205E-4	-8.80001E1	-1.66893E-4	5.55515E-3	9.32693E-2	1.57967E1	-1.98611E1	-1.99419E1	1.49883E1	1.72594E-8	2.51915E-3	2.51915E-3	6.31299E-3	2.32666E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80023E1	-6.91414E-4	-8.80001E1	-4.76837E-5	5.57899E-3	9.30071E-2	1.58137E1	-1.98825E1	-1.99834E1	1.4977E1	1.72364E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.33109E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80022E1	-8.34465E-4	-8.79999E1	-2.6226E-4	5.62668E-3	9.31978E-2	1.57943E1	-1.9867E1	-1.99809E1	1.5013E1	1.72552E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.32285E-2
1.2E1	1.14E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80022E1	-8.10623E-4	-8.80002E1	-1.19209E-4	5.84126E-3	9.31501E-2	1.57932E1	-1.98611E1	-1.99785E1	1.5001E1	1.72437E-8	2.51954E-3	2.51954E-3	6.33436E-3	2.33507E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80025E1	-8.82149E-4	-8.80001E1	-2.38419E-5	5.79357E-3	9.30309E-2	1.58252E1	-1.98906E1	-1.99671E1	1.50118E1	1.72953E-8	2.51632E-3	2.51632E-3	6.33977E-3	2.33507E-2
1.4E1	5.9E1	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80024E1	-8.82149E-4	-8.8E1	-4.76837E-5	5.74589E-3	9.31263E-2	1.57921E1	-1.98362E1	-1.9984E1	1.50274E1	1.72671E-8	2.51804E-3	2.51804E-3	6.3074E-3	2.33492E-2
1.5E1	3.5E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80022E1	-6.19888E-4	-8.79996E1	-1.90735E-4	5.79357E-3	9.32693E-2	1.58299E1	-1.98969E1	-1.99534E1	1.4992E1	1.72327E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.32689E-2
1.6E1	3.2E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80019E1	-5.00679E-4	-8.79998E1	-7.15256E-5	5.31673E-3	9.30786E-2	1.57855E1	-1.9829E1	-1.99985E1	1.50334E1	1.72627E-8	2.51771E-3	2.51771E-3	6.34037E-3	2.33297E-2
1.7E1	5.12E2	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80019E1	-7.39098E-4	-8.8E1	1.66893E-4	5.60284E-3	9.32217E-2	1.57973E1	-1.98316E1	-1.99632E1	1.50118E1	1.72927E-8	2.51662E-3	2.51662E-3	6.30192E-3	2.33702E-2
1.8E1	2.11E3	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80021E1	-6.4373E-4	-8.80001E1	-1.43051E-4	5.96046E-3	9.3174E-2	1.57969E1	-1.98693E1	-1.99642E1	1.50248E1	1.72953E-8	2.5131E-3	2.5131E-3	6.32356E-3	2.32315E-2
1.9E1	2.665E3	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80018E1	-7.15256E-4	-8.79997E1	1.19209E-4	5.4121E-3	9.3174E-2	1.58155E1	-1.98519E1	-1.99967E1	1.50058E1	1.73152E-8	2.51662E-3	2.51662E-3	6.34037E-3	2.32285E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80019E1	-5.96046E-4	-8.79998E1	2.14577E-4	5.38826E-3	9.28879E-2	1.5802E1	-1.98617E1	-1.99797E1	1.49782E1	1.72327E-8	2.51225E-3	2.51225E-3	6.29645E-3	2.33499E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80019E1	-5.96046E-4	-8.8E1	4.29153E-4	5.38826E-3	9.32455E-2	1.5825E1	-1.98617E1	-1.99608E1	1.50262E1	1.72879E-8	2.51417E-3	2.51417E-3	6.31278E-3	2.33308E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80019E1	-5.00679E-4	-8.79999E1	-1.19209E-4	5.10216E-3	9.34601E-2	1.58359E1	-1.98675E1	-1.99552E1	1.49981E1	1.72732E-8	2.5131E-3	2.5131E-3	6.29665E-3	2.32711E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.40967E-2	-8.80021E1	-9.05991E-4	-8.80002E1	-2.14577E-4	5.126E-3	9.33886E-2	1.58161E1	-1.98675E1	-1.99744E1	1.49938E1	1.72327E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.33297E-2