[Scan]
initial_time=2016-02-17T17:23:12
final_time=2016-02-17T17:23:33
ip_count=19
run=1032
dataset=4
scan=49
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.8381E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.4599E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.07797E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.60197E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.28755E-8
mult1=-9.72835E-9
mult2=-2.78448E-9
rf_tmon=-4.61457E-3
rf_agc=3.28289E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=5.988E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20091E1
lens5a_imon=1.991E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53376E1
cs_ef1b_imon=3.00468E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=2.43189E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00951E0
lens1_imon=1.22194E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.55841E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.99351E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=1.16571E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.31761E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15342E1
os_ea1_imon=2.28336E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27613E0
cs_ionrep_imon=1.24766E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=3.10487E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.82922E-9
tplens_vset=0.0E0
tplens_vmon=-1.61079E0
tplens_imon=-9.02587E-8
iondef3_vset=-2.0E1
iondef3_vmon=-1.99762E1
iondef3_imon=8.78514E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98416E1
iondef2_imon=9.27181E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98454E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=8.35586E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28574E0
ionrepsh_imon=1.94197E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.1074E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43595E0
os_ea2_imon=-5.40878E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71059E1
cs_ef2a_imon=3.17804E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34665E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.45446E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.31839E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.25326E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57867E1
iondef1_imon=4.98191E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50184E1
iondef4_imon=5.13623E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=3.03532E-8
olens1_vset=0.0E0
olens1_vmon=8.82149E-4
olens1_imon=1.37759E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=1.86709E-1
window_imon=-1.21396E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-7.49045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.5955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.52844E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.5234E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.49141E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06963E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64541E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=9.99231E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61927E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6702E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98343E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65277E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18427E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2251E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.33094E-2
chamber_ion_pmon=1.72627E-8
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.70414E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.948E3	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80018E1	-7.15256E-4	-8.79998E1	5.00679E-4	5.50747E-3	9.31025E-2	1.58089E1	-1.99396E1	-1.99029E1	1.49872E1	1.731E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.32711E-2
2.0E0	2.685E3	2.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80017E1	-5.48363E-4	-8.79997E1	5.00679E-4	5.31673E-3	9.32455E-2	1.58726E1	-1.98921E1	-1.99071E1	1.49779E1	1.73077E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.32892E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.8002E1	-7.15256E-4	-8.79999E1	4.52995E-4	5.74589E-3	9.31978E-2	1.57879E1	-1.98529E1	-1.99726E1	1.49987E1	1.7313E-8	2.5147E-3	2.5147E-3	6.31858E-3	2.33492E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80019E1	-7.62939E-4	-8.79998E1	1.66893E-4	5.79357E-3	9.34124E-2	1.5792E1	-1.98187E1	-1.99543E1	1.50057E1	1.72805E-8	2.52276E-3	2.52276E-3	6.29665E-3	2.32513E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80018E1	-1.04904E-3	-8.8E1	1.19209E-4	5.48363E-3	9.33647E-2	1.5818E1	-1.98591E1	-1.9928E1	1.49952E1	1.72584E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.32513E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80019E1	-8.10623E-4	-8.8E1	1.43051E-4	5.14984E-3	9.33886E-2	1.58066E1	-1.9836E1	-1.99826E1	1.50135E1	1.72544E-8	2.52236E-3	2.52236E-3	6.29684E-3	2.32733E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80016E1	-8.82149E-4	-8.79998E1	2.14577E-4	5.60284E-3	9.34362E-2	1.57744E1	-1.98257E1	-1.99726E1	1.5011E1	1.72638E-8	2.51498E-3	2.51498E-3	6.31879E-3	2.32433E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80018E1	-1.12057E-3	-8.80003E1	4.52995E-4	5.43594E-3	9.30309E-2	1.58185E1	-1.98423E1	-1.99484E1	1.49944E1	1.72823E-8	2.51804E-3	2.51804E-3	6.31299E-3	2.33492E-2
1.2E1	8.7E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80019E1	-1.52588E-3	-8.80003E1	9.53674E-5	5.55515E-3	9.33647E-2	1.57671E1	-1.98661E1	-1.99855E1	1.5001E1	1.72732E-8	2.52276E-3	2.52276E-3	6.31817E-3	2.33706E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80022E1	-1.23978E-3	-8.8E1	-1.19209E-4	5.6982E-3	9.32693E-2	1.57873E1	-1.98368E1	-2.00087E1	1.50388E1	1.72441E-8	2.51693E-3	2.51693E-3	6.32418E-3	2.33699E-2
1.4E1	4.6E1	1.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80021E1	-8.10623E-4	-8.8E1	-1.90735E-4	5.65052E-3	9.32217E-2	1.58233E1	-1.98558E1	-1.99679E1	1.49757E1	1.72437E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.34505E-2
1.5E1	3.9E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80022E1	-7.86781E-4	-8.80002E1	-7.15256E-5	5.91278E-3	9.29356E-2	1.57002E1	-1.97515E1	-2.00063E1	1.49969E1	1.72852E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.31681E-2
1.6E1	3.16E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80023E1	-7.15256E-4	-8.80004E1	-2.14577E-4	5.62668E-3	9.27925E-2	1.57656E1	-1.98609E1	-1.9951E1	1.49481E1	1.72702E-8	2.51334E-3	2.51334E-3	6.36244E-3	2.33094E-2
1.7E1	5.58E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80021E1	-5.48363E-4	-8.80004E1	9.53674E-5	5.74589E-3	9.2864E-2	1.57753E1	-1.98825E1	-1.99828E1	1.50112E1	1.72702E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.32892E-2
1.8E1	2.134E3	2.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80021E1	-5.96046E-4	-8.80004E1	0.0E0	5.72205E-3	9.30071E-2	1.58089E1	-1.98687E1	-1.99858E1	1.50292E1	1.72511E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.33308E-2
1.9E1	2.584E3	2.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80021E1	-8.34465E-4	-8.80004E1	-1.19209E-4	5.62668E-3	9.29594E-2	1.58191E1	-1.98741E1	-1.99882E1	1.50286E1	1.72627E-8	2.51443E-3	2.51443E-3	6.32936E-3	2.32689E-2
2.0E1	1.9E1	0.0E0	8.08E2	5.58E2	-7.14689E-2	-8.80022E1	-5.00679E-4	-8.80001E1	-1.43051E-4	5.65052E-3	9.29594E-2	1.58443E1	-1.98362E1	-1.9993E1	1.49812E1	1.72823E-8	2.5147E-3	2.5147E-3	6.32418E-3	2.33285E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80016E1	-8.34465E-4	-8.80002E1	-2.86102E-4	5.38826E-3	9.29117E-2	1.5792E1	-1.98641E1	-1.99337E1	1.50214E1	1.72627E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.32487E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80018E1	-8.82149E-4	-8.80001E1	1.66893E-4	5.14984E-3	9.30309E-2	1.57761E1	-1.98694E1	-1.99602E1	1.49929E1	1.72688E-8	2.51182E-3	2.51182E-3	6.29684E-3	2.32538E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80019E1	-7.86781E-4	-8.80004E1	1.66893E-4	5.48363E-3	9.3174E-2	1.57867E1	-1.98416E1	-1.99762E1	1.50184E1	1.72627E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.33094E-2