[Scan]
initial_time=2016-02-17T17:23:41
final_time=2016-02-17T17:24:03
ip_count=19
run=1032
dataset=4
scan=50
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.82346E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.60737E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.08094E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.61533E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.29008E-8
mult1=-9.35509E-9
mult2=-2.69266E-9
rf_tmon=-3.01036E-3
rf_agc=3.39464E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=5.84054E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69689E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19624E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=3.01045E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04564E2
lens23_imon=1.02082E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=2.43849E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07725E0
lens1_imon=1.54514E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03879E1
cs_ea2_imon=1.56886E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=3.00036E-5
olens2_vset=0.0E0
olens2_vmon=1.71661E-3
olens2_imon=1.16455E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11063E1
os_restr1_imon=4.30896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15471E1
os_ea1_imon=2.28595E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25446E0
cs_ionrep_imon=1.24961E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93275E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=3.11316E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.90217E-9
tplens_vset=0.0E0
tplens_vmon=-1.59837E0
tplens_imon=-3.30742E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00129E1
iondef3_imon=8.65582E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98711E1
iondef2_imon=9.47342E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98671E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=8.0781E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27156E0
ionrepsh_imon=1.92386E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33917E1
lens5b_imon=2.19888E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43792E0
os_ea2_imon=-7.12998E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.18272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2986E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10613E1
os_restr2_imon=3.45878E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.30424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.26047E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58047E1
iondef1_imon=5.15534E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50096E1
iondef4_imon=5.1975E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=3.02783E-8
olens1_vset=0.0E0
olens1_vmon=7.39098E-4
olens1_imon=1.37647E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-1.98521E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47122E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=2.12537E-1
window_imon=-1.13467E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-7.49045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.25067E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.25256E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.12325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44099E0
defgridb_imon=6.2207E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.48673E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06837E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64646E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=9.99939E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61813E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6701E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.87603E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59772E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38715E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.17866E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22502E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=2.32873E-2
chamber_ion_pmon=1.72671E-8
chamber_cvt_pmon=2.52585E-3
foreline_cvt_pmon=2.52585E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.49081E-1
res40_imon=-2.68077E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.002E3	3.0E0	1.47E2	4.1E1	-7.42513E-2	-8.80023E1	-7.15256E-4	-8.80002E1	7.15256E-5	5.79357E-3	9.29594E-2	1.5841E1	-1.98334E1	-1.99691E1	1.49964E1	1.72103E-8	2.52428E-3	2.52428E-3	6.28552E-3	2.32487E-2
2.0E0	2.693E3	0.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80023E1	-6.91414E-4	-8.80001E1	1.90735E-4	5.53131E-3	9.28879E-2	1.57735E1	-1.98074E1	-1.99828E1	1.50047E1	1.72688E-8	2.51814E-3	2.51814E-3	6.32328E-3	2.32538E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80023E1	-8.10623E-4	-8.80002E1	4.76837E-5	5.45979E-3	9.3174E-2	1.57993E1	-1.98633E1	-1.99576E1	1.5001E1	1.72365E-8	2.51804E-3	2.51804E-3	6.27954E-3	2.32666E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80022E1	-5.72205E-4	-8.8E1	-4.76837E-5	5.67436E-3	9.30309E-2	1.57743E1	-1.98729E1	-1.99461E1	1.50136E1	1.72584E-8	2.52276E-3	2.52276E-3	6.31817E-3	2.3291E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80024E1	-5.24521E-4	-8.80006E1	1.19209E-4	5.65052E-3	9.33409E-2	1.58103E1	-1.98487E1	-1.99549E1	1.49906E1	1.72511E-8	2.51525E-3	2.51525E-3	6.3074E-3	2.32513E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.8002E1	-4.76837E-4	-8.80004E1	-9.53674E-5	5.65052E-3	9.3174E-2	1.58032E1	-1.98617E1	-1.99756E1	1.50076E1	1.72511E-8	2.52061E-3	2.52061E-3	6.33436E-3	2.3291E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80022E1	-4.05312E-4	-8.80007E1	1.90735E-4	5.65052E-3	9.31978E-2	1.58047E1	-1.98933E1	-1.99672E1	1.50172E1	1.72477E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.31681E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80021E1	-5.72205E-4	-8.80005E1	1.19209E-4	5.53131E-3	9.3317E-2	1.57997E1	-1.9867E1	-1.99815E1	1.49902E1	1.72584E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.33308E-2
1.2E1	1.0E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80023E1	-1.0252E-3	-8.80003E1	2.38419E-4	5.81741E-3	9.31978E-2	1.57963E1	-1.98729E1	-1.99618E1	1.49877E1	1.72828E-8	2.51918E-3	2.51918E-3	6.31283E-3	2.324E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80022E1	-7.15256E-4	-8.80004E1	1.90735E-4	5.60284E-3	9.34124E-2	1.58287E1	-1.98579E1	-2.00165E1	1.5028E1					
1.4E1	4.8E1	0.0E0	5.66E2	3.82E2	-7.12368E-2	-8.80021E1	-5.00679E-4	-8.80002E1	7.15256E-5	5.53131E-3	9.30548E-2	1.57921E1	-1.98525E1	-1.99864E1	1.49572E1	1.72028E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.32084E-2
1.5E1	4.2E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80021E1	-5.48363E-4	-8.8E1	1.90735E-4	5.6982E-3	9.33647E-2	1.57831E1	-1.98104E1	-2.00823E1	1.50142E1	1.73002E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.32084E-2
1.6E1	3.34E2	1.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80017E1	-6.67572E-4	-8.80005E1	1.66893E-4	5.6982E-3	9.34839E-2	1.58167E1	-1.98735E1	-1.99726E1	1.49824E1	1.72777E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.33297E-2
1.7E1	5.45E2	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.8002E1	-5.00679E-4	-8.80005E1	2.38419E-5	5.74589E-3	9.33647E-2	1.58486E1	-1.98849E1	-1.99696E1	1.50082E1	1.72584E-8	2.50989E-3	2.50989E-3	6.32896E-3	2.33905E-2
1.8E1	2.114E3	1.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80019E1	-7.15256E-4	-8.80003E1	-4.76837E-5	5.45979E-3	9.34839E-2	1.57666E1	-1.98428E1	-1.99768E1	1.49877E1	1.72177E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.32689E-2
1.9E1	2.67E3	3.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80023E1	-5.96046E-4	-8.8E1	1.90735E-4	4.98295E-3	9.3317E-2	1.58059E1	-1.98585E1	-1.99738E1	1.49956E1	1.72702E-8	2.51225E-3	2.51225E-3	6.3074E-3	2.33499E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80023E1	-7.15256E-4	-8.80004E1	1.90735E-4	5.26905E-3	9.32932E-2	1.58083E1	-1.98543E1	-1.99744E1	1.50046E1	1.72364E-8	2.51203E-3	2.51203E-3	6.3074E-3	2.33109E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80024E1	-4.29153E-4	-8.80003E1	3.33786E-4	5.14984E-3	9.31263E-2	1.58359E1	-1.98805E1	-1.99755E1	1.49922E1	1.72252E-8	2.52757E-3	2.52757E-3	6.31837E-3	2.34109E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80026E1	-7.39098E-4	-8.80002E1	3.09944E-4	5.43594E-3	9.34601E-2	1.58059E1	-1.98609E1	-1.99894E1	1.50105E1	1.72327E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.33308E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80024E1	-8.82149E-4	-8.80001E1	2.38419E-4	5.31673E-3	9.31501E-2	1.58047E1	-1.98711E1	-2.00129E1	1.50096E1	1.72671E-8	2.52585E-3	2.52585E-3	6.31858E-3	2.32873E-2