[Scan]
initial_time=2016-02-17T17:24:10
final_time=2016-02-17T17:24:32
ip_count=19
run=1032
dataset=4
scan=51
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.82609E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-5.95832E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.08837E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.59962E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.29104E-8
mult1=-9.93304E-9
mult2=-2.8284E-9
rf_tmon=-5.38963E-3
rf_agc=3.26486E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=5.89252E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70163E0
bslens_imon=2.61809E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20112E1
lens5a_imon=1.97002E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05368E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53636E1
cs_ef1b_imon=2.99376E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02243E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05197E1
cs_ea1_imon=2.45251E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96703E0
lens1_imon=1.34928E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6472E1
os_ef1alow_imon=2.97027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03997E1
cs_ea2_imon=1.54905E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84249E1
cs_ef1a_imon=2.98638E-5
olens2_vset=0.0E0
olens2_vmon=1.57356E-3
olens2_imon=1.16273E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11341E1
os_restr1_imon=4.30372E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.2721E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63507E1
os_ef1bup_imon=3.08603E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26426E0
cs_ionrep_imon=1.2341E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93284E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=3.10784E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.85618E-9
tplens_vset=0.0E0
tplens_vmon=-1.60493E0
tplens_imon=-1.87206E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99636E1
iondef3_imon=8.77445E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98633E1
iondef2_imon=9.43493E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98509E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=8.43656E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26426E0
ionrepsh_imon=1.9429E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33762E1
lens5b_imon=2.18554E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74882E1
cs_ef2b_imon=3.11925E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44792E0
os_ea2_imon=-4.93112E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00724E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71E1
cs_ef2a_imon=3.18166E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06518E0
os_ef2alow_imon=-2.72066E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.49619E-1
os_ef2bup_imon=-5.42513E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10726E1
os_restr2_imon=3.4501E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.3045E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.24852E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57903E1
iondef1_imon=5.14529E-6
iondef4_vset=1.53E1
iondef4_vmon=1.4992E1
iondef4_imon=5.23168E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=3.03064E-8
olens1_vset=0.0E0
olens1_vmon=3.8147E-4
olens1_imon=1.3765E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1609E0
cs_ionaccel_imon=-1.94892E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.4729E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56142E1
einzel_imon=7.56033E-6
window_vset=0.0E0
window_vmon=1.73267E-1
window_imon=-1.00269E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86238E1
mask2_imon=-7.57744E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.26925E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.5462E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4036E0
defgridb_imon=6.14644E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.46743E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07066E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64612E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.98511E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61941E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66827E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97145E-2
os_fil2_imon=-2.7337E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84085E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59063E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35559E-1
cs_fil2_imon=-2.40375E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02996E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22472E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.32285E-2
chamber_ion_pmon=1.72402E-8
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.60245E-1
res40_imon=-2.72737E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=225
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.905E3	1.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80023E1	-6.91414E-4	-8.80003E1	-4.76837E-5	5.26905E-3	9.33647E-2	1.58147E1	-1.98478E1	-1.99707E1	1.49972E1	1.72471E-8	2.52342E-3	2.52342E-3	6.32328E-3	2.32928E-2
2.0E0	2.587E3	2.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80023E1	-7.39098E-4	-8.80001E1	3.57628E-4	5.29289E-3	9.30309E-2	1.58105E1	-1.98679E1	-1.99573E1	1.50004E1	1.72483E-8	2.52066E-3	2.52066E-3	6.3131E-3	2.32643E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80025E1	-7.15256E-4	-8.80003E1	-7.15256E-5	5.24521E-3	9.31501E-2	1.58339E1	-1.98523E1	-1.9965E1	1.50207E1	1.72594E-8	2.5147E-3	2.5147E-3	6.31858E-3	2.33492E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.8002E1	-3.09944E-4	-8.80003E1	-4.76837E-5	5.38826E-3	9.30309E-2	1.58073E1	-1.98564E1	-1.99956E1	1.50058E1	1.72471E-8	2.51709E-3	2.51709E-3	6.31269E-3	2.32538E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80021E1	-7.86781E-4	-8.80003E1	-2.14577E-4	5.4121E-3	9.30071E-2	1.58017E1	-1.98999E1	-1.9969E1	1.5004E1	1.72402E-8	2.51334E-3	2.51334E-3	6.32936E-3	2.32689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.45602E-2	-8.80023E1	-5.24521E-4	-8.80005E1	2.38419E-5	5.57899E-3	9.31263E-2	1.57855E1	-1.98711E1	-1.99516E1	1.4992E1	1.72777E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.32892E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80023E1	-5.72205E-4	-8.80002E1	-2.38419E-5	5.19753E-3	9.3174E-2	1.58191E1	-1.98795E1	-1.99696E1	1.50178E1	1.72552E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.32689E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80021E1	-5.24521E-4	-8.80003E1	2.38419E-4	5.55515E-3	9.30309E-2	1.58077E1	-1.98446E1	-1.9975E1	1.49962E1	1.72658E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.32711E-2
1.2E1	9.1E1	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80021E1	-4.76837E-4	-8.80002E1	-2.14577E-4	5.45979E-3	9.31025E-2	1.5812E1	-1.98688E1	-1.99461E1	1.49746E1	1.72327E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.32285E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80022E1	-4.52995E-4	-8.80004E1	4.29153E-4	5.10216E-3	9.2864E-2	1.57837E1	-1.98621E1	-1.9969E1	1.49929E1	1.72627E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.32892E-2
1.4E1	5.4E1	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80019E1	-5.24521E-4	-8.80003E1	2.14577E-4	5.65052E-3	9.33647E-2	1.58197E1	-1.98621E1	-1.99702E1	1.50334E1	1.72177E-8	2.51771E-3	2.51771E-3	6.29645E-3	2.33702E-2
1.5E1	4.3E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.8002E1	-2.86102E-4	-8.80001E1	3.09944E-4	5.45979E-3	9.34362E-2	1.58594E1	-1.98537E1	-1.98993E1	1.49845E1	1.72402E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.33094E-2
1.6E1	3.3E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.8002E1	-3.57628E-4	-8.80005E1	0.0E0	5.36442E-3	9.35793E-2	1.58209E1	-1.98939E1	-1.9951E1	1.49981E1	1.72627E-8	2.51771E-3	2.51771E-3	6.29645E-3	2.33297E-2
1.7E1	5.51E2	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80022E1	-1.90735E-4	-8.80003E1	-7.15256E-5	5.65052E-3	9.34124E-2	1.58069E1	-1.98839E1	-1.99794E1	1.50041E1	1.73077E-8	2.51443E-3	2.51443E-3	6.3514E-3	2.32487E-2
1.8E1	2.059E3	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80022E1	-3.09944E-4	-8.80001E1	1.19209E-4	5.34058E-3	9.31978E-2	1.57927E1	-1.98657E1	-1.9945E1	1.50154E1	1.72927E-8	2.51552E-3	2.51552E-3	6.33486E-3	2.33905E-2
1.9E1	2.607E3	2.0E0	7.68E2	5.29E2	-7.33239E-2	-8.8002E1	-5.72205E-4	-8.80001E1	0.0E0	5.50747E-3	9.3317E-2	1.58333E1	-1.98818E1	-1.99638E1	1.5022E1	1.72852E-8	2.51552E-3	2.51552E-3	6.31288E-3	2.32084E-2
2.0E1	1.9E1	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80022E1	-6.91414E-4	-8.80001E1	-1.43051E-4	5.72205E-3	9.30786E-2	1.57644E1	-1.98483E1	-1.99732E1	1.49726E1	1.72852E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.32285E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.8002E1	-5.96046E-4	-8.80003E1	2.38419E-5	5.74589E-3	9.35078E-2	1.58056E1	-1.98712E1	-1.99992E1	1.50431E1	1.72732E-8	2.51739E-3	2.51739E-3	6.32356E-3	2.32513E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80018E1	-7.62939E-4	-8.8E1	-1.43051E-4	5.57899E-3	9.31978E-2	1.58317E1	-1.98789E1	-1.996E1	1.49776E1	1.72627E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.32084E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80015E1	-9.05991E-4	-8.80003E1	7.15256E-5	5.65052E-3	9.32217E-2	1.57903E1	-1.98633E1	-1.99636E1	1.4992E1	1.72402E-8	2.52318E-3	2.52318E-3	6.32386E-3	2.32285E-2