[Scan]
initial_time=2016-02-17T17:24:39
final_time=2016-02-17T17:25:01
ip_count=19
run=1032
dataset=4
scan=52
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.44059E-2
qbias_imon=-3.81298E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.74613E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.1054E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.63673E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.28957E-8
mult1=-9.6561E-9
mult2=-2.78847E-9
rf_tmon=-5.66601E-3
rf_agc=3.24744E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=5.97501E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6391E0
bslens_imon=2.4296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19959E1
lens5a_imon=1.98812E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.01369E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=2.4391E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98608E0
lens1_imon=1.50313E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.54831E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=2.99027E-5
olens2_vset=0.0E0
olens2_vmon=1.38283E-3
olens2_imon=1.16272E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10997E1
os_restr1_imon=4.31365E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1536E1
os_ea1_imon=2.27291E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.06415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23888E0
cs_ionrep_imon=1.25127E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01575E1
cs_anode1_imon=3.111E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.91747E-9
tplens_vset=0.0E0
tplens_vmon=-1.66066E0
tplens_imon=-2.92136E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99576E1
iondef3_imon=8.86445E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98765E1
iondef2_imon=9.3403E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.98638E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=7.74312E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26351E0
ionrepsh_imon=1.93909E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34066E1
lens5b_imon=2.17017E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75306E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4017E0
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06156E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23853E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10643E1
os_restr2_imon=3.44509E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.28775E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.25578E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58065E1
iondef1_imon=5.02878E-6
iondef4_vset=1.53E1
iondef4_vmon=1.4998E1
iondef4_imon=5.33805E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=3.02493E-8
olens1_vset=0.0E0
olens1_vmon=4.52995E-4
olens1_imon=1.377E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15897E0
cs_ionaccel_imon=-1.96358E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.04729E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.38983E-4
mask2_vset=0.0E0
mask2_vmon=-1.85978E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.64237E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.4996E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.27827E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=6.22922E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33263E1
os_fil1_imon=9.49087E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06849E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64314E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30861E1
cs_fil1_imon=9.99531E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61429E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66953E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81576E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72882E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33018E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.8572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22562E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.60203E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=188
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.864E3	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80022E1	-9.53674E-4	-8.80002E1	-9.53674E-5	5.60284E-3	9.34362E-2	1.58144E1	-1.98664E1	-1.9988E1	1.49831E1	1.71953E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.32285E-2
2.0E0	2.765E3	2.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80023E1	-8.34465E-4	-8.80003E1	-1.90735E-4	5.43594E-3	9.32693E-2	1.57897E1	-1.98645E1	-1.9954E1	1.50303E1	1.72584E-8	2.52276E-3	2.52276E-3	6.31278E-3	2.32711E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80021E1	-9.77516E-4	-8.79999E1	-2.6226E-4	5.6982E-3	9.32455E-2	1.58457E1	-1.98676E1	-1.99549E1	1.49761E1	1.72289E-8	2.51693E-3	2.51693E-3	6.33538E-3	2.33079E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.8002E1	-1.09673E-3	-8.80002E1	-2.38419E-4	5.74589E-3	9.34362E-2	1.57783E1	-1.98458E1	-1.9963E1	1.5016E1	1.73026E-8	2.51847E-3	2.51847E-3	6.3074E-3	2.33109E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80021E1	-8.10623E-4	-8.80003E1	1.43051E-4	5.6982E-3	9.3317E-2	1.58221E1	-1.9834E1	-1.99785E1	1.49993E1	1.72658E-8	2.52923E-3	2.52923E-3	6.33436E-3	2.32711E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.8002E1	-9.53674E-4	-8.80001E1	2.14577E-4	5.57899E-3	9.29832E-2	1.58303E1	-1.98299E1	-1.99638E1	1.4977E1	1.72732E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.33308E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80019E1	-7.86781E-4	-8.79998E1	-2.38419E-5	5.55515E-3	9.32217E-2	1.58113E1	-1.98777E1	-1.9984E1	1.50022E1	1.72531E-8	2.51484E-3	2.51484E-3	6.31012E-3	2.33001E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80017E1	-7.39098E-4	-8.79997E1	4.76837E-5	5.48363E-3	9.33647E-2	1.5843E1	-1.98796E1	-1.99543E1	1.50232E1					
1.2E1	1.0E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80022E1	-8.34465E-4	-8.80001E1	-1.19209E-4	5.55515E-3	9.31263E-2	1.57778E1	-1.98434E1	-1.99826E1	1.49938E1	1.72823E-8	2.52027E-3	2.52027E-3	6.32418E-3	2.32461E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80023E1	-8.34465E-4	-8.80001E1	-2.38419E-5	5.53131E-3	9.32455E-2	1.58155E1	-1.98567E1	-1.9981E1	1.50142E1	1.72777E-8	2.51552E-3	2.51552E-3	6.31288E-3	2.32487E-2
1.4E1	5.6E1	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80022E1	-7.62939E-4	-8.80001E1	-9.53674E-5	5.81741E-3	9.31025E-2	1.58289E1	-1.98722E1	-1.9994E1	1.49986E1	1.73002E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.33094E-2
1.5E1	4.4E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80021E1	-9.53674E-4	-8.80004E1	-4.76837E-5	5.57899E-3	9.34362E-2	1.58356E1	-1.99484E1	-1.99809E1	1.49962E1	1.72927E-8	2.51116E-3	2.51116E-3	6.32936E-3	2.32892E-2
1.6E1	3.5E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80019E1	-8.10623E-4	-8.8E1	1.19209E-4	5.57899E-3	9.33886E-2	1.58089E1	-1.98675E1	-1.99985E1	1.49926E1	1.72552E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.32689E-2
1.7E1	5.38E2	1.0E0	6.87E2	4.7E2	-7.33239E-2	-8.8002E1	-9.53674E-4	-8.8E1	1.43051E-4	5.60284E-3	9.34362E-2	1.58215E1	-1.98603E1	-1.99834E1	1.50364E1	1.72777E-8	2.51771E-3	2.51771E-3	6.34037E-3	2.32892E-2
1.8E1	2.113E3	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80024E1	-6.91414E-4	-8.80002E1	7.15256E-5	5.34058E-3	9.36985E-2	1.58353E1	-1.98753E1	-1.99786E1	1.50244E1	1.72879E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.3291E-2
1.9E1	2.578E3	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80022E1	-6.19888E-4	-8.80003E1	-1.66893E-4	5.57899E-3	9.34362E-2	1.5815E1	-1.98806E1	-1.99685E1	1.50028E1	1.73077E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.32689E-2
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80022E1	-8.34465E-4	-8.80005E1	2.38419E-5	5.29289E-3	9.32455E-2	1.57981E1	-1.98555E1	-1.99786E1	1.50334E1	1.72402E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.31882E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80023E1	-4.52995E-4	-8.80004E1	2.6226E-4	5.45979E-3	9.32217E-2	1.58032E1	-1.98706E1	-1.99791E1	1.49908E1	1.72254E-8	2.51954E-3	2.51954E-3	6.32087E-3	2.3291E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.80021E1	-5.24521E-4	-8.8E1	1.90735E-4	5.43594E-3	9.33886E-2	1.57973E1	-1.98806E1	-1.99838E1	1.49947E1	1.72402E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.32892E-2
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.44059E-2	-8.80022E1	-5.00679E-4	-8.80003E1	1.43051E-4	5.43594E-3	9.30071E-2	1.58065E1	-1.98765E1	-1.99576E1	1.4998E1