[Scan]
initial_time=2016-02-17T17:25:09
final_time=2016-02-17T17:25:30
ip_count=19
run=1032
dataset=4
scan=53
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.73462E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.74994E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.09174E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.63926E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.28819E-8
mult1=-9.63202E-9
mult2=-2.62879E-9
rf_tmon=-4.41629E-3
rf_agc=3.28289E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=6.63841E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67447E0
bslens_imon=2.66006E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19919E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05171E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53528E1
cs_ef1b_imon=3.01588E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02004E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=2.43779E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0047E0
lens1_imon=1.58408E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64724E1
os_ef1alow_imon=2.96549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03962E1
cs_ea2_imon=1.56745E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=2.98808E-5
olens2_vset=0.0E0
olens2_vmon=1.66893E-3
olens2_imon=1.16306E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11199E1
os_restr1_imon=4.30868E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15441E1
os_ea1_imon=2.29303E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.08261E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.23049E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93417E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0174E1
cs_anode1_imon=3.10137E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99987E1
olens4_imon=4.9206E-9
tplens_vset=0.0E0
tplens_vmon=-1.6491E0
tplens_imon=-4.54621E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99468E1
iondef3_imon=8.71953E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98789E1
iondef2_imon=9.41679E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98707E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=8.13115E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23381E0
ionrepsh_imon=1.92847E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33805E1
lens5b_imon=2.17941E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74438E1
cs_ef2b_imon=3.1257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3866E0
os_ea2_imon=-5.99737E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00488E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71136E1
cs_ef2a_imon=3.18374E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05572E0
os_ef2alow_imon=-2.74834E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36617E-1
os_ef2bup_imon=-5.48337E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.46662E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30601E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01688E1
cs_anode2_imon=2.25862E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58185E1
iondef1_imon=5.27922E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50364E1
iondef4_imon=5.19261E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=3.03651E-8
olens1_vset=0.0E0
olens1_vmon=6.67572E-4
olens1_imon=1.37889E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13883E0
cs_ionaccel_imon=-1.87953E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47164E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56434E1
einzel_imon=7.70869E-6
window_vset=0.0E0
window_vmon=1.7077E-1
window_imon=-1.00724E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39015E-4
mask2_vset=0.0E0
mask2_vmon=-1.86373E1
mask2_imon=-6.49292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.66478E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.62774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.37809E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40556E0
defgridb_imon=6.29503E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33257E1
os_fil1_imon=9.48455E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06709E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64392E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30911E1
cs_fil1_imon=9.98876E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61364E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67097E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.91401E-2
os_fil2_imon=-2.62864E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03978E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75592E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32523E-1
cs_fil2_imon=-2.5128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.24978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22525E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.32711E-2
chamber_ion_pmon=1.73174E-8
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.18489E-1
res40_imon=-2.63019E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.881E3	2.0E0	1.47E2	4.1E1	-7.3401E-2	-8.8002E1	-9.53674E-4	-8.8E1	1.90735E-4	5.36442E-3	9.32693E-2	1.58115E1	-1.98912E1	-1.9965E1	1.50034E1	1.72732E-8	2.51739E-3	2.51739E-3	6.33977E-3	2.32711E-2
2.0E0	2.595E3	0.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80021E1	-7.62939E-4	-8.80003E1	2.38419E-5	4.98295E-3	9.31978E-2	1.58245E1	-1.98627E1	-1.99756E1	1.50154E1	1.71923E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.32513E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.8002E1	-5.72205E-4	-8.80003E1	-2.6226E-4	5.6982E-3	9.31263E-2	1.57985E1	-1.98375E1	-1.99714E1	1.50115E1	1.72671E-8	2.5225E-3	2.5225E-3	6.32978E-3	2.32873E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80018E1	-6.67572E-4	-8.80004E1	-2.38419E-5	5.00679E-3	9.31025E-2	1.58044E1	-1.98487E1	-1.99709E1	1.5016E1	1.72399E-8	2.51814E-3	2.51814E-3	6.3074E-3	2.33514E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.8002E1	-6.67572E-4	-8.80002E1	-5.48363E-4	5.45979E-3	9.34601E-2	1.57933E1	-1.98747E1	-1.99462E1	1.50304E1	1.73303E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.33702E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80021E1	-9.05991E-4	-8.80003E1	-2.38419E-5	5.53131E-3	9.33409E-2	1.57572E1	-1.98747E1	-1.999E1	1.50064E1	1.72777E-8	2.50898E-3	2.50898E-3	6.32936E-3	2.32084E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.8002E1	-6.91414E-4	-8.80002E1	-3.8147E-4	5.55515E-3	9.3174E-2	1.58083E1	-1.98489E1	-2.00021E1	1.50016E1	1.72627E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.32892E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80023E1	-8.34465E-4	-8.80004E1	-1.90735E-4	5.43594E-3	9.32932E-2	1.58119E1	-1.98633E1	-1.99414E1	1.50214E1	1.72511E-8	2.50882E-3	2.50882E-3	6.31278E-3	2.32711E-2
1.2E1	8.3E1	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80022E1	-9.29832E-4	-8.80003E1	-4.05312E-4	5.6982E-3	9.33409E-2	1.58001E1	-1.98539E1	-1.9961E1	1.5004E1	1.72823E-8	2.51248E-3	2.51248E-3	6.3074E-3	2.33905E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80023E1	-9.05991E-4	-8.80001E1	-3.33786E-4	5.43594E-3	9.3317E-2	1.57991E1	-1.98605E1	-1.99956E1	1.50082E1	1.72252E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.32487E-2
1.4E1	4.3E1	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80022E1	-9.53674E-4	-8.8E1	0.0E0	5.34058E-3	9.32932E-2	1.58401E1	-1.98537E1	-1.99522E1	1.49848E1	1.72364E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.33109E-2
1.5E1	4.6E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80022E1	-8.10623E-4	-8.8E1	1.19209E-4	5.31673E-3	9.35555E-2	1.58516E1	-1.98873E1	-1.99492E1	1.49836E1	1.72927E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.32892E-2
1.6E1	3.13E2	2.0E0	6.47E2	4.41E2	-7.21643E-2	-8.8002E1	-9.77516E-4	-8.79999E1	1.43051E-4	5.45979E-3	9.3627E-2	1.58233E1	-1.98871E1	-1.99667E1	1.50034E1	1.72627E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.33297E-2
1.7E1	5.19E2	1.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80019E1	-7.15256E-4	-8.80001E1	1.19209E-4	5.50747E-3	9.34601E-2	1.58191E1	-1.98181E1	-1.99567E1	1.50039E1	1.72702E-8	2.51552E-3	2.51552E-3	6.29645E-3	2.32487E-2
1.8E1	2.021E3	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80017E1	-8.82149E-4	-8.80002E1	7.15256E-5	5.38826E-3	9.30786E-2	1.57914E1	-1.98523E1	-1.99803E1	1.49866E1	1.72143E-8	2.51096E-3	2.51096E-3	6.30202E-3	2.34305E-2
1.9E1	2.547E3	3.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80018E1	-7.62939E-4	-8.80005E1	9.53674E-5	5.57899E-3	9.29832E-2	1.58179E1	-1.98686E1	-1.99996E1	1.50022E1	1.72805E-8	2.52061E-3	2.52061E-3	6.3074E-3	2.33109E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.44059E-2	-8.80018E1	-7.86781E-4	-8.80006E1	2.38419E-5	5.53131E-3	9.3174E-2	1.5779E1	-1.98659E1	-1.9939E1	1.49884E1	1.72477E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.33094E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.80019E1	-8.10623E-4	-8.80007E1	1.90735E-4	5.36442E-3	9.31978E-2	1.58059E1	-1.98627E1	-1.99918E1	1.4974E1	1.72777E-8	2.51225E-3	2.51225E-3	6.3074E-3	2.33094E-2
2.2E1	6.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.8002E1	-1.0252E-3	-8.80006E1	1.90735E-4	5.24521E-3	9.34124E-2	1.58023E1	-1.98368E1	-1.99997E1	1.49918E1	1.72327E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.33499E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80021E1	-6.19888E-4	-8.80004E1	1.43051E-4	5.55515E-3	9.30309E-2	1.58185E1	-1.98789E1	-1.99468E1	1.50364E1	1.73174E-8	2.51632E-3	2.51632E-3	6.3074E-3	2.32711E-2