[Scan]
initial_time=2016-02-17T17:26:36
final_time=2016-02-17T17:26:57
ip_count=19
run=1032
dataset=4
scan=56
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.80222E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.72336E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.07681E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.65156E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.29414E-8
mult1=-9.45753E-9
mult2=-2.73034E-9
rf_tmon=-4.46501E-3
rf_agc=3.30908E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=5.93376E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6361E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=1.97694E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.05053E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.01766E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02049E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05036E1
cs_ea1_imon=2.4254E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03054E0
lens1_imon=1.51755E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04207E1
cs_ea2_imon=1.57499E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84124E1
cs_ef1a_imon=2.99712E-5
olens2_vset=0.0E0
olens2_vmon=1.40667E-3
olens2_imon=1.16406E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.31689E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15606E1
os_ea1_imon=2.2931E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=1.23937E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.9333E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=3.10343E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.90234E-9
tplens_vset=0.0E0
tplens_vmon=-1.618E0
tplens_imon=-4.65174E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99756E1
iondef3_imon=8.79235E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98568E1
iondef2_imon=9.30064E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=8.16751E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2569E0
ionrepsh_imon=1.92035E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75432E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42393E0
os_ea2_imon=-5.69717E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71522E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05396E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31061E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.46059E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.30361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.2583E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58052E1
iondef1_imon=5.15855E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50249E1
iondef4_imon=5.24435E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=3.0342E-8
olens1_vset=0.0E0
olens1_vmon=6.19888E-4
olens1_imon=1.37834E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-1.85186E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=1.59679E-1
window_imon=-1.06619E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86098E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=6.85649E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.69787E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.2999E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=6.08863E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.47243E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06795E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64387E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30853E1
cs_fil1_imon=9.99044E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62186E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66847E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.99632E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78038E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22489E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=2.32513E-2
chamber_ion_pmon=1.72732E-8
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.14262E-1
res40_imon=-2.74925E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.897E3	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80018E1	-7.15256E-4	-8.8E1	1.43051E-4	5.50747E-3	9.31501E-2	1.58179E1	-1.98759E1	-1.99906E1	1.49962E1	1.72252E-8	2.52318E-3	2.52318E-3	6.31288E-3	2.32689E-2
2.0E0	2.616E3	0.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80021E1	-4.52995E-4	-8.79997E1	2.38419E-5	5.65052E-3	9.3174E-2	1.58167E1	-1.98581E1	-2.00087E1	1.50292E1	1.72477E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.32892E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80023E1	-6.67572E-4	-8.79998E1	3.09944E-4	5.84126E-3	9.3174E-2	1.57708E1	-1.98865E1	-1.99726E1	1.5004E1	1.72594E-8	2.51804E-3	2.51804E-3	6.31299E-3	2.32873E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.201E-2	-8.80019E1	-7.86781E-4	-8.80001E1	3.33786E-4	5.6982E-3	9.31978E-2	1.57926E1	-1.98535E1	-1.99655E1	1.50167E1	1.72879E-8	2.51525E-3	2.51525E-3	6.32896E-3	2.32513E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80019E1	-8.82149E-4	-8.80001E1	6.4373E-4	5.6982E-3	9.31025E-2	1.58353E1	-1.98489E1	-1.99876E1	1.5004E1	1.72437E-8	2.51096E-3	2.51096E-3	6.32356E-3	2.33109E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80021E1	-7.15256E-4	-8.8E1	3.57628E-4	5.67436E-3	9.32217E-2	1.58093E1	-1.98834E1	-1.99778E1	1.49709E1	1.73002E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.33094E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80018E1	-5.72205E-4	-8.80001E1	2.14577E-4	5.07832E-3	9.29356E-2	1.57735E1	-1.98728E1	-1.9952E1	1.50203E1	1.72833E-8	2.51393E-3	2.51393E-3	6.32328E-3	2.32343E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.8002E1	-9.77516E-4	-8.79997E1	1.90735E-4	5.53131E-3	9.35316E-2	1.57907E1	-1.98656E1	-1.99248E1	1.50068E1	1.72483E-8	2.51498E-3	2.51498E-3	6.3245E-3	2.31805E-2
1.2E1	1.23E2	0.0E0	4.85E2	3.23E2	-7.41738E-2	-8.80019E1	-7.86781E-4	-8.79999E1	4.52995E-4	5.24521E-3	9.36031E-2	1.58356E1	-1.98392E1	-1.99916E1	1.5019E1	1.72433E-8	2.51472E-3	2.51472E-3	6.3126E-3	2.31607E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80021E1	-1.04904E-3	-8.80001E1	3.57628E-4	5.57899E-3	9.3317E-2	1.58162E1	-1.98712E1	-1.99832E1	1.49818E1	1.72976E-8	2.51915E-3	2.51915E-3	6.31858E-3	2.32873E-2
1.4E1	5.9E1	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80019E1	-8.10623E-4	-8.8E1	7.15256E-5	5.36442E-3	9.32932E-2	1.5792E1	-1.98546E1	-1.99632E1	1.49721E1	1.72552E-8	2.52099E-3	2.52099E-3	6.28006E-3	2.33094E-2
1.5E1	4.8E1	0.0E0	6.06E2	4.11E2	-7.46377E-2	-8.8002E1	-1.09673E-3	-8.8E1	-2.14577E-4	5.6982E-3	9.32932E-2	1.58185E1	-1.98855E1	-1.99384E1	1.49944E1	1.72544E-8	2.51814E-3	2.51814E-3	6.3074E-3	2.33514E-2
1.6E1	3.63E2	0.0E0	6.47E2	4.41E2	-7.51788E-2	-8.8002E1	-6.19888E-4	-8.79997E1	1.90735E-4	5.55515E-3	9.32217E-2	1.58275E1	-1.98561E1	-1.9957E1	1.49986E1	1.72702E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.32285E-2
1.7E1	5.34E2	0.0E0	6.87E2	4.7E2	-7.46377E-2	-8.8002E1	-8.82149E-4	-8.79998E1	1.19209E-4	5.48363E-3	9.31263E-2	1.58383E1	-1.98555E1	-1.99726E1	1.49896E1	1.72777E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.32892E-2
1.8E1	2.143E3	2.0E0	7.27E2	5.0E2	-7.46377E-2	-8.80022E1	-7.86781E-4	-8.79997E1	1.90735E-4	5.126E-3	9.33886E-2	1.57891E1	-1.98783E1	-1.996E1	1.49788E1	1.72777E-8	2.52428E-3	2.52428E-3	6.3074E-3	2.33297E-2
1.9E1	2.632E3	0.0E0	7.68E2	5.29E2	-7.42513E-2	-8.8002E1	-6.67572E-4	-8.80002E1	7.15256E-5	4.91142E-3	9.3317E-2	1.58209E1	-1.98428E1	-1.99655E1	1.49944E1	1.72477E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.33702E-2
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80018E1	-5.48363E-4	-8.80002E1	-1.66893E-4	5.31673E-3	9.30071E-2	1.58245E1	-1.98699E1	-1.99624E1	1.50136E1	1.73174E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.31523E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.80017E1	-7.86781E-4	-8.80001E1	1.19209E-4	5.31673E-3	9.32455E-2	1.57907E1	-1.98388E1	-1.99854E1	1.5034E1	1.72402E-8	2.52099E-3	2.52099E-3	6.29645E-3	2.33094E-2
2.2E1	1.8E1	0.0E0	8.89E2	6.17E2	-7.40192E-2	-8.80017E1	-4.52995E-4	-8.79997E1	4.52995E-4	5.38826E-3	9.3174E-2	1.58185E1	-1.98853E1	-1.99673E1	1.4979E1	1.72327E-8	2.51393E-3	2.51393E-3	6.32328E-3	2.32928E-2
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80018E1	-4.76837E-4	-8.80001E1	2.14577E-4	5.38826E-3	9.32217E-2	1.58052E1	-1.98568E1	-1.99756E1	1.50249E1	1.72732E-8	2.51525E-3	2.51525E-3	6.28592E-3	2.32513E-2