[Scan]
initial_time=2016-02-17T17:28:29
final_time=2016-02-17T17:28:50
ip_count=19
run=1032
dataset=4
scan=60
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.80998E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.63633E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.07821E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.62356E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.29104E-8
mult1=-9.03831E-9
mult2=-2.76637E-9
rf_tmon=-5.40023E-3
rf_agc=3.2147E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=5.74267E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68037E0
bslens_imon=2.61759E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20308E1
lens5a_imon=1.97412E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.04994E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=3.01045E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.02061E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.44947E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05071E0
lens1_imon=1.55222E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=2.99099E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04038E1
cs_ea2_imon=1.57417E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8389E1
cs_ef1a_imon=2.97081E-5
olens2_vset=0.0E0
olens2_vmon=1.28746E-3
olens2_imon=1.16614E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11562E1
os_restr1_imon=4.33419E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15571E1
os_ea1_imon=2.28949E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63359E1
os_ef1bup_imon=3.05983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28395E0
cs_ionrep_imon=1.24111E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93264E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02422E1
cs_anode1_imon=3.12073E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.87164E-9
tplens_vset=0.0E0
tplens_vmon=-1.60191E0
tplens_imon=-3.94451E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99773E1
iondef3_imon=8.76554E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98487E1
iondef2_imon=9.37078E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=7.96962E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31227E0
ionrepsh_imon=1.92174E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.17906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.76856E1
cs_ef2b_imon=3.11893E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4214E0
os_ea2_imon=-6.28052E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71468E1
cs_ef2a_imon=3.19606E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07798E0
os_ef2alow_imon=-2.77087E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.52084E-1
os_ef2bup_imon=-5.50988E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11051E1
os_restr2_imon=3.44941E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.2392E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5841E1
iondef1_imon=4.98191E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50166E1
iondef4_imon=5.11821E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=3.03004E-8
olens1_vset=0.0E0
olens1_vmon=6.4373E-4
olens1_imon=1.37859E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-1.75455E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47078E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55997E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=1.47065E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82589E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-4.28292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.64709E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.50032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.15865E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43804E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33279E1
os_fil1_imon=9.48084E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06945E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64316E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.9836E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61291E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67045E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97733E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76604E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.79811E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43054E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22531E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.32487E-2
chamber_ion_pmon=1.73152E-8
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.572E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.858E3	1.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80021E1	-4.76837E-4	-8.80003E1	1.43051E-4	5.74589E-3	9.32217E-2	1.58097E1	-1.98588E1	-2.00003E1	1.50074E1	1.72658E-8	2.51847E-3	2.51847E-3	6.3074E-3	2.31721E-2
2.0E0	2.622E3	1.0E0	3.16E2	1.6E2	-7.286E-2	-8.80021E1	-6.19888E-4	-8.80004E1	4.29153E-4	5.19753E-3	9.34839E-2	1.58077E1	-1.98579E1	-1.9978E1	1.49782E1	1.72833E-8	2.51182E-3	2.51182E-3	6.3445E-3	2.32928E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80022E1	-4.29153E-4	-8.80001E1	5.00679E-4	5.81741E-3	9.32693E-2	1.5815E1	-1.98877E1	-1.99826E1	1.49968E1	1.729E-8	2.51804E-3	2.51804E-3	6.31858E-3	2.32255E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80022E1	-7.86781E-4	-8.80003E1	3.09944E-4	5.6982E-3	9.32455E-2	1.58179E1	-1.98513E1	-1.99906E1	1.50118E1	1.72511E-8	2.5131E-3	2.5131E-3	6.33977E-3	2.33706E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80024E1	-2.86102E-4	-8.80002E1	2.38419E-5	5.55515E-3	9.31978E-2	1.58002E1	-1.98269E1	-1.99532E1	1.50352E1	1.72511E-8	2.51417E-3	2.51417E-3	6.29665E-3	2.32711E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44059E-2	-8.80023E1	-3.57628E-4	-8.80004E1	4.05312E-4	5.48363E-3	9.35078E-2	1.58239E1	-1.98747E1	-1.99612E1	1.49981E1	1.72327E-8	2.52099E-3	2.52099E-3	6.33486E-3	2.32892E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80022E1	-6.19888E-4	-8.80002E1	2.38419E-5	5.50747E-3	9.31978E-2	1.57867E1	-1.98717E1	-1.99937E1	1.4989E1	1.72852E-8	2.52538E-3	2.52538E-3	6.32386E-3	2.33499E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80018E1	-7.62939E-4	-8.80002E1	9.53674E-5	5.60284E-3	9.34839E-2	1.58149E1	-1.98639E1	-1.99864E1	1.4986E1	1.72327E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.32285E-2
1.2E1	1.19E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80021E1	-7.62939E-4	-8.80003E1	1.90735E-4	5.6982E-3	9.34601E-2	1.57708E1	-1.98328E1	-1.99785E1	1.50064E1	1.72252E-8	2.51334E-3	2.51334E-3	6.31837E-3	2.33499E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80021E1	-8.58307E-4	-8.80002E1	3.09944E-4	5.10216E-3	9.33409E-2	1.58053E1	-1.98729E1	-1.99858E1	1.4983E1	1.72879E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.32711E-2
1.4E1	4.8E1	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80023E1	-9.29832E-4	-8.80004E1	2.14577E-4	5.43594E-3	9.31263E-2	1.58057E1	-1.98499E1	-1.99667E1	1.50048E1	1.72777E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.33297E-2
1.5E1	6.2E1	0.0E0	6.06E2	4.11E2	-7.49466E-2	-8.80024E1	-8.34465E-4	-8.80002E1	1.90735E-4	5.60284E-3	9.32693E-2	1.57784E1	-1.98346E1	-1.99673E1	1.50016E1	1.73024E-8	2.52345E-3	2.52345E-3	6.32684E-3	2.32471E-2
1.6E1	3.35E2	0.0E0	6.47E2	4.41E2	-7.47923E-2	-8.80025E1	-9.53674E-4	-8.80005E1	-4.76837E-5	5.8651E-3	9.33409E-2	1.57885E1	-1.98567E1	-1.99858E1	1.49908E1	1.72402E-8	2.51552E-3	2.51552E-3	6.31288E-3	2.32892E-2
1.7E1	5.3E2	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80022E1	-5.96046E-4	-8.80003E1	2.86102E-4	5.74589E-3	9.33647E-2	1.58191E1	-1.98531E1	-1.99342E1	1.50539E1	1.72364E-8	2.51417E-3	2.51417E-3	6.32896E-3	2.3291E-2
1.8E1	2.162E3	3.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80022E1	-8.82149E-4	-8.80002E1	9.53674E-5	5.4121E-3	9.3174E-2	1.57879E1	-1.98759E1	-1.99726E1	1.49896E1	1.72594E-8	2.52139E-3	2.52139E-3	6.31299E-3	2.33079E-2
1.9E1	2.62E3	2.0E0	7.68E2	5.29E2	-7.23964E-2	-8.8002E1	-6.91414E-4	-8.80003E1	2.14577E-4	5.45979E-3	9.32217E-2	1.58264E1	-1.98673E1	-1.99634E1	1.49596E1	1.7207E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.33905E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80021E1	-5.48363E-4	-8.80002E1	2.86102E-4	5.67436E-3	9.34362E-2	1.57807E1	-1.98681E1	-1.99798E1	1.50298E1	1.73077E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.32487E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80022E1	-5.00679E-4	-8.8E1	2.38419E-5	5.48363E-3	9.29594E-2	1.58226E1	-1.9888E1	-1.99512E1	1.50097E1	1.72327E-8	2.51443E-3	2.51443E-3	6.30192E-3	2.32487E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.41738E-2	-8.80023E1	-7.86781E-4	-8.80003E1	-9.53674E-5	5.10216E-3	9.31025E-2	1.58377E1	-1.98843E1	-1.9981E1	1.50148E1	1.72511E-8	2.5131E-3	2.5131E-3	6.29665E-3	2.33507E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80022E1	-7.62939E-4	-8.80004E1	9.53674E-5	5.36442E-3	9.30786E-2	1.5841E1	-1.98487E1	-1.99773E1	1.50166E1	1.73152E-8	2.51552E-3	2.51552E-3	6.31288E-3	2.32487E-2