[Scan]
initial_time=2016-02-17T17:29:52
final_time=2016-02-17T17:30:12
ip_count=19
run=1032
dataset=4
scan=63
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.79182E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.78213E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.0932E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.62891E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.29067E-8
mult1=-9.69223E-9
mult2=-2.7266E-9
rf_tmon=-4.7107E-3
rf_agc=3.37001E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=5.96452E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6409E0
bslens_imon=2.52694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20259E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53472E1
cs_ef1b_imon=3.01189E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04856E1
cs_ea1_imon=2.43657E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99029E0
lens1_imon=1.46708E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.53425E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=2.97513E-5
olens2_vset=0.0E0
olens2_vmon=1.43051E-3
olens2_imon=1.16349E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.32049E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15432E1
os_ea1_imon=2.28733E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22686E0
cs_ionrep_imon=1.2437E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01677E1
cs_anode1_imon=3.10127E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99985E1
olens4_imon=4.88868E-9
tplens_vset=0.0E0
tplens_vmon=-1.60358E0
tplens_imon=-3.71445E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99558E1
iondef3_imon=8.72385E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98543E1
iondef2_imon=9.52776E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98465E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=7.985E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.94197E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.20874E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74423E1
cs_ef2b_imon=3.1128E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41973E0
os_ea2_imon=-4.57964E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06133E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03654E0
os_ef2alow_imon=-2.66635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=3.45806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.30181E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.26912E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58059E1
iondef1_imon=5.191E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49878E1
iondef4_imon=5.25156E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=3.0262E-8
olens1_vset=0.0E0
olens1_vmon=8.34465E-4
olens1_imon=1.37699E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-1.94556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47151E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56051E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=1.6929E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86458E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.47654E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.93219E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.26024E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55194E0
defgridb_imon=6.22922E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33298E1
os_fil1_imon=9.48271E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06819E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64578E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30942E1
cs_fil1_imon=1.0003E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62095E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67152E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66953E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22497E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.33297E-2
chamber_ion_pmon=1.72552E-8
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.04942E-1
res40_imon=-2.66275E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.875E3	1.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80019E1	-3.57628E-4	-8.80002E1	1.43051E-4	5.45979E-3	9.30786E-2	1.57948E1	-1.98411E1	-1.9957E1	1.50132E1	1.72627E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.32285E-2
2.0E0	2.617E3	2.0E0	3.16E2	1.6E2	-7.38649E-2	-8.8002E1	-5.00679E-4	-8.80003E1	2.14577E-4	5.38826E-3	9.32455E-2	1.58167E1	-1.98533E1	-1.99592E1	1.50028E1	1.72327E-8	2.51498E-3	2.51498E-3	6.31269E-3	2.32928E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.42513E-2	-8.80023E1	-9.29832E-4	-8.80003E1	-2.38419E-5	5.48363E-3	9.31978E-2	1.57989E1	-1.98573E1	-1.99755E1	1.50045E1	1.72518E-8	2.51693E-3	2.51693E-3	6.29067E-3	2.34527E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80022E1	-5.96046E-4	-8.80002E1	2.14577E-4	5.34058E-3	9.31501E-2	1.57909E1	-1.98633E1	-2.00027E1	1.5016E1	1.72544E-8	2.51919E-3	2.51919E-3	6.32328E-3	2.32733E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80021E1	-5.24521E-4	-8.80001E1	1.90735E-4	5.8651E-3	9.29832E-2	1.58017E1	-1.98645E1	-1.9945E1	1.4992E1	1.72402E-8	2.51552E-3	2.51552E-3	6.34037E-3	2.32285E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80023E1	-7.15256E-4	-8.80002E1	-1.43051E-4	5.48363E-3	9.32455E-2	1.57813E1	-1.98633E1	-1.99876E1	1.49794E1	1.73227E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.33297E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80023E1	-8.10623E-4	-8.80002E1	2.38419E-4	5.6982E-3	9.34362E-2	1.58256E1	-1.98346E1	-1.99927E1	1.5016E1	1.72568E-8	2.51538E-3	2.51538E-3	6.31012E-3	2.33101E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80022E1	-5.48363E-4	-8.80002E1	-1.19209E-4	5.65052E-3	9.34839E-2	1.58035E1	-1.98609E1	-1.99882E1	1.50328E1					
1.2E1	8.3E1	1.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80022E1	-1.12057E-3	-8.80003E1	-7.15256E-5	5.60284E-3	9.31263E-2	1.58315E1	-1.98092E1	-1.99773E1	1.50115E1	1.72143E-8	2.52061E-3	2.52061E-3	6.33977E-3	2.32117E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80023E1	-6.4373E-4	-8.8E1	-1.90735E-4	5.45979E-3	9.33409E-2	1.58197E1	-1.98667E1	-1.99885E1	1.49723E1	1.72477E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.32487E-2
1.4E1	4.2E1	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80021E1	-8.82149E-4	-8.80003E1	-4.76837E-5	5.62668E-3	9.28879E-2	1.58238E1	-1.98251E1	-2.00021E1	1.50207E1	1.72852E-8	2.51771E-3	2.51771E-3	6.33211E-3	2.32993E-2
1.5E1	6.7E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80021E1	-6.91414E-4	-8.80003E1	2.38419E-5	5.53131E-3	9.31263E-2	1.5881E1	-1.98837E1	-1.99732E1	1.50082E1					
1.6E1	3.32E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80022E1	-4.52995E-4	-8.8E1	1.66893E-4	5.48363E-3	9.29117E-2	1.58017E1	-1.98753E1	-1.99858E1	1.49992E1	1.72627E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.33297E-2
1.7E1	4.92E2	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.8002E1	-6.91414E-4	-8.80001E1	-2.38419E-4	5.48363E-3	9.32932E-2	1.58377E1	-1.9841E1	-1.99678E1	1.50184E1	1.72402E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.32892E-2
1.8E1	2.082E3	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80019E1	-5.72205E-4	-8.80006E1	-3.33786E-4	5.6982E-3	9.34124E-2	1.57969E1	-1.98338E1	-1.99822E1	1.50154E1	1.72177E-8	2.52318E-3	2.52318E-3	6.31837E-3	2.33297E-2
1.9E1	2.636E3	1.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80018E1	-8.10623E-4	-8.80001E1	-1.66893E-4	5.60284E-3	9.32217E-2	1.57741E1	-1.98825E1	-1.9942E1	1.5004E1	1.72437E-8	2.51847E-3	2.51847E-3	6.30202E-3	2.33308E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80019E1	-5.96046E-4	-8.80001E1	0.0E0	5.67436E-3	9.33647E-2	1.57967E1	-1.98499E1	-1.99685E1	1.4995E1	1.729E-8	2.5147E-3	2.5147E-3	6.32418E-3	2.33285E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80019E1	-7.15256E-4	-8.80003E1	1.66893E-4	5.24521E-3	9.34124E-2	1.57902E1	-1.98765E1	-1.99709E1	1.49993E1	1.7229E-8	2.51739E-3	2.51739E-3	6.35059E-3	2.3291E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80021E1	-4.76837E-4	-8.80002E1	-1.43051E-4	5.29289E-3	9.3174E-2	1.58303E1	-1.98623E1	-1.99478E1	1.50034E1	1.72978E-8	2.51709E-3	2.51709E-3	6.31798E-3	2.32733E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80023E1	-4.52995E-4	-8.80003E1	-2.38419E-5	5.26905E-3	9.35078E-2	1.58059E1	-1.98543E1	-1.99558E1	1.49878E1	1.72552E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.33297E-2