[Scan]
initial_time=2016-02-17T17:30:47
final_time=2016-02-17T17:31:07
ip_count=19
run=1032
dataset=4
scan=65
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.84065E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.70786E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.09693E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.63134E-9
ql4_vset=
ql4_vmon=-2.86102E-4
ql4_imon=1.29382E-8
mult1=-9.49958E-9
mult2=-2.88628E-9
rf_tmon=-5.95441E-3
rf_agc=3.29851E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=5.67687E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64793E0
bslens_imon=2.7804E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.98403E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05132E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=3.0065E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.0205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.051E1
cs_ea1_imon=2.46009E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03891E0
lens1_imon=1.48851E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64579E1
os_ef1alow_imon=2.96619E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.56143E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84429E1
cs_ef1a_imon=2.99364E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.16466E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11257E1
os_restr1_imon=4.30138E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15512E1
os_ea1_imon=2.27851E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.0833E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27805E0
cs_ionrep_imon=1.24925E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93215E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01427E1
cs_anode1_imon=3.09616E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.79252E-9
tplens_vset=0.0E0
tplens_vmon=-1.60486E0
tplens_imon=-1.67929E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99372E1
iondef3_imon=8.53548E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98717E1
iondef2_imon=9.40971E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.983E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=7.86161E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29811E0
ionrepsh_imon=1.95147E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.16596E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74299E1
cs_ef2b_imon=3.12153E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39898E0
os_ea2_imon=-6.45749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70922E1
cs_ef2a_imon=3.17852E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06035E0
os_ef2alow_imon=-2.60933E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.33142E-1
os_ef2bup_imon=-5.37216E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10845E1
os_restr2_imon=3.44125E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.32689E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.25967E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58071E1
iondef1_imon=5.06332E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50004E1
iondef4_imon=5.24821E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=3.0305E-8
olens1_vset=0.0E0
olens1_vmon=6.91414E-4
olens1_imon=1.37614E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15679E0
cs_ionaccel_imon=-1.91776E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56428E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.93359E-1
window_imon=-1.11498E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39063E-4
mask2_vset=0.0E0
mask2_vmon=-1.86188E1
mask2_imon=-6.77094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.84175E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.1039E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.1905E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32288E0
defgridb_imon=5.79951E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33286E1
os_fil1_imon=9.4834E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07115E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64577E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30847E1
cs_fil1_imon=9.98974E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61746E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67014E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.952E-2
os_fil2_imon=-2.66919E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82547E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62177E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.46646E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.98741E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22505E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.32689E-2
chamber_ion_pmon=1.72552E-8
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.40875E-1
res40_imon=-2.77962E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=184
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.912E3	1.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80022E1	-7.62939E-4	-8.80001E1	-2.14577E-4	5.74589E-3	9.31978E-2	1.57879E1	-1.98936E1	-1.99437E1	1.50094E1	1.731E-8	2.51417E-3	2.51417E-3	6.32896E-3	2.33507E-2
2.0E0	2.647E3	3.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80024E1	-7.86781E-4	-8.80002E1	1.66893E-4	5.6982E-3	9.31978E-2	1.58029E1	-1.9844E1	-1.99804E1	1.49992E1	1.72143E-8	2.51417E-3	2.51417E-3	6.32896E-3	2.32513E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80024E1	-7.39098E-4	-8.80003E1	1.90735E-4	5.57899E-3	9.28164E-2	1.57955E1	-1.98776E1	-1.99968E1	1.50091E1	1.72365E-8	2.51804E-3	2.51804E-3	6.34099E-3	2.33492E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80023E1	-5.72205E-4	-8.80001E1	3.09944E-4	5.55515E-3	9.3174E-2	1.58179E1	-1.9834E1	-1.99585E1	1.49764E1	1.72399E-8	2.51498E-3	2.51498E-3	6.31269E-3	2.32733E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80023E1	-6.4373E-4	-8.80002E1	-1.90735E-4	5.48363E-3	9.33886E-2	1.58041E1	-1.98777E1	-1.99618E1	1.49806E1	1.72402E-8	2.51552E-3	2.51552E-3	6.28552E-3	2.32689E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80022E1	-7.86781E-4	-8.8E1	2.14577E-4	5.72205E-3	9.30309E-2	1.58083E1	-1.98621E1	-1.99714E1	1.50298E1	1.72177E-8	2.51662E-3	2.51662E-3	6.33486E-3	2.33905E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.8002E1	-5.00679E-4	-8.80002E1	2.14577E-4	5.65052E-3	9.32932E-2	1.57939E1	-1.98645E1	-1.99678E1	1.4995E1	1.72364E-8	2.51525E-3	2.51525E-3	6.30202E-3	2.33308E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80019E1	-5.24521E-4	-8.8E1	2.86102E-4	5.74589E-3	9.32693E-2	1.58339E1	-1.98263E1	-1.99685E1	1.49999E1	1.72518E-8	2.52139E-3	2.52139E-3	6.3074E-3	2.33079E-2
1.2E1	9.4E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80018E1	-6.67572E-4	-8.79998E1	3.57628E-4	5.67436E-3	9.31025E-2	1.58283E1	-1.98373E1	-1.9972E1	1.49998E1	1.72364E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.34105E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80017E1	-7.86781E-4	-8.8E1	-9.53674E-5	5.26905E-3	9.34124E-2	1.58061E1	-1.98387E1	-2.0008E1	1.50069E1	1.73002E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.33905E-2
1.4E1	5.2E1	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80017E1	-8.10623E-4	-8.79997E1	0.0E0	5.36442E-3	9.3317E-2	1.58041E1	-1.98621E1	-1.99276E1	1.49764E1	1.72477E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.33297E-2
1.5E1	5.7E1	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80017E1	-6.91414E-4	-8.80001E1	-2.86102E-4	5.65052E-3	9.35316E-2	1.58648E1	-1.98735E1	-1.99294E1	1.49902E1	1.72627E-8	2.51334E-3	2.51334E-3	6.34037E-3	2.32285E-2
1.6E1	3.46E2	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80018E1	-7.39098E-4	-8.80001E1	7.15256E-5	5.62668E-3	9.31978E-2	1.57993E1	-1.98765E1	-1.99774E1	1.50112E1	1.72028E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.32689E-2
1.7E1	5.16E2	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80018E1	-3.09944E-4	-8.80002E1	-9.53674E-5	5.55515E-3	9.31501E-2	1.58415E1	-1.98818E1	-1.99526E1	1.50148E1	1.72879E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.34505E-2
1.8E1	2.101E3	0.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80016E1	-7.86781E-4	-8.80003E1	9.53674E-5	5.55515E-3	9.3317E-2	1.57701E1	-1.98624E1	-1.99438E1	1.50154E1	1.73152E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.33297E-2
1.9E1	2.555E3	1.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80016E1	-8.34465E-4	-8.80002E1	-2.38419E-5	5.8651E-3	9.37462E-2	1.57765E1	-1.98416E1	-1.99672E1	1.50208E1	1.72402E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.33499E-2
2.0E1	1.9E1	0.0E0	8.08E2	5.58E2	-7.37874E-2	-8.80018E1	-8.58307E-4	-8.80002E1	-9.53674E-5	5.76973E-3	9.32932E-2	1.57903E1	-1.98446E1	-1.99732E1	1.49986E1	1.73002E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.32689E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80019E1	-6.19888E-4	-8.80002E1	-2.38419E-5	5.50747E-3	9.35555E-2	1.58044E1	-1.98358E1	-1.99632E1	1.49764E1					
2.2E1	4.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80017E1	-5.72205E-4	-8.80003E1	-9.53674E-5	5.45979E-3	9.377E-2	1.57826E1	-1.98918E1	-1.99809E1	1.49848E1	1.72437E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.33706E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80018E1	-4.29153E-4	-8.80004E1	-2.86102E-4	5.6982E-3	9.36747E-2	1.58071E1	-1.98717E1	-1.99372E1	1.50004E1	1.72552E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.32689E-2