[Scan]
initial_time=2016-02-17T17:31:42
final_time=2016-02-17T17:32:02
ip_count=19
run=1032
dataset=4
scan=67
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.78391E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.6324E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=1.08576E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.6176E-9
ql4_vset=
ql4_vmon=-1.66893E-4
ql4_imon=1.28897E-8
mult1=-9.84875E-9
mult2=-2.74456E-9
rf_tmon=-4.26609E-3
rf_agc=3.39464E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=5.88655E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63672E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19824E1
lens5a_imon=1.95926E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05245E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5353E1
cs_ef1b_imon=2.99482E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0474E1
cs_ea1_imon=2.43991E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00941E0
lens1_imon=1.38587E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64706E1
os_ef1alow_imon=2.99022E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04109E1
cs_ea2_imon=1.55754E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84326E1
cs_ef1a_imon=2.98809E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.16392E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11171E1
os_restr1_imon=4.30192E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15707E1
os_ea1_imon=2.27781E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.08646E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=1.23333E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01762E1
cs_anode1_imon=3.08929E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.86797E-9
tplens_vset=0.0E0
tplens_vmon=-1.60073E0
tplens_imon=-2.17481E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00033E1
iondef3_imon=8.69121E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98687E1
iondef2_imon=9.56898E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98516E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.09205E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26744E0
ionrepsh_imon=1.93767E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33988E1
lens5b_imon=2.17198E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7397E1
cs_ef2b_imon=3.1268E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40665E0
os_ea2_imon=-4.33385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71081E1
cs_ef2a_imon=3.18377E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05721E0
os_ef2alow_imon=-2.71163E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13543E-1
os_ef2bup_imon=-5.30531E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10852E1
os_restr2_imon=3.45021E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.3053E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01697E1
cs_anode2_imon=2.26377E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58275E1
iondef1_imon=5.04916E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49968E1
iondef4_imon=5.14016E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=3.02615E-8
olens1_vset=0.0E0
olens1_vmon=5.24521E-4
olens1_imon=1.37853E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17319E0
cs_ionaccel_imon=-1.91195E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56063E1
einzel_imon=7.65953E-6
window_vset=0.0E0
window_vmon=1.7771E-1
window_imon=-1.08041E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39194E-4
mask2_vset=0.0E0
mask2_vmon=-1.86326E1
mask2_imon=-8.04415E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.33916E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.67729E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.10202E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.6034E0
defgridb_imon=6.12514E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33279E1
os_fil1_imon=9.47875E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06869E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64598E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30896E1
cs_fil1_imon=9.99531E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61841E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67151E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90135E-2
os_fil2_imon=-2.69709E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97954E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68378E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33783E-1
cs_fil2_imon=-2.57915E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23654E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22606E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=2.32892E-2
chamber_ion_pmon=1.72852E-8
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.03184E-1
res40_imon=-2.63379E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.877E3	1.0E0	1.47E2	4.1E1	-7.286E-2	-8.80018E1	-6.19888E-4	-8.80003E1	9.53674E-5	5.55515E-3	9.32932E-2	1.58125E1	-1.98759E1	-1.99432E1	1.4995E1	1.72658E-8	2.52061E-3	2.52061E-3	6.3074E-3	2.3291E-2
2.0E0	2.617E3	0.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80017E1	-6.19888E-4	-8.80003E1	1.90735E-4	5.74589E-3	9.31501E-2	1.57981E1	-1.98579E1	-1.9948E1	1.49836E1	1.72927E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.32689E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80018E1	-4.05312E-4	-8.80004E1	4.76837E-5	5.57899E-3	9.29594E-2	1.57837E1	-1.98588E1	-1.99826E1	1.49872E1	1.729E-8	2.51581E-3	2.51581E-3	6.31858E-3	2.32873E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.8002E1	-5.72205E-4	-8.80007E1	-2.38419E-5	5.84126E-3	9.30071E-2	1.57613E1	-1.98505E1	-1.99821E1	1.49912E1	1.72833E-8	2.52025E-3	2.52025E-3	6.29157E-3	2.33318E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80018E1	-4.29153E-4	-8.80003E1	4.29153E-4	5.43594E-3	9.3174E-2	1.57949E1	-1.9857E1	-1.99868E1	1.49878E1	1.72364E-8	2.51632E-3	2.51632E-3	6.3074E-3	2.33507E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80019E1	-5.96046E-4	-8.80004E1	2.86102E-4	5.4121E-3	9.31501E-2	1.57903E1	-1.98939E1	-1.9987E1	1.50034E1	1.72511E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.32117E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80018E1	-4.52995E-4	-8.80004E1	2.38419E-5	5.67436E-3	9.30786E-2	1.58329E1	-1.98567E1	-1.99798E1	1.50082E1	1.72441E-8	2.51915E-3	2.51915E-3	6.32978E-3	2.31229E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.8002E1	-3.8147E-4	-8.80006E1	0.0E0	5.96046E-3	9.3317E-2	1.57801E1	-1.98398E1	-1.99967E1	1.50022E1	1.73248E-8	2.51739E-3	2.51739E-3	6.32356E-3	2.3291E-2
1.2E1	7.6E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80021E1	-7.86781E-4	-8.80005E1	-9.53674E-5	5.6982E-3	9.33886E-2	1.57885E1	-1.98573E1	-1.99684E1	1.4998E1	1.72402E-8	2.51443E-3	2.51443E-3	6.32936E-3	2.32487E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80018E1	-1.00136E-3	-8.80003E1	-7.15256E-5	6.03199E-3	9.32455E-2	1.58017E1	-1.99089E1	-1.9987E1	1.50124E1	1.72552E-8	2.51007E-3	2.51007E-3	6.31288E-3	2.32689E-2
1.4E1	5.7E1	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80018E1	-9.05991E-4	-8.80003E1	1.90735E-4	5.84126E-3	9.29832E-2	1.58286E1	-1.98664E1	-1.99484E1	1.50149E1	1.72777E-8	2.52318E-3	2.52318E-3	6.31288E-3	2.32689E-2
1.5E1	5.1E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80017E1	-8.82149E-4	-8.80003E1	7.15256E-5	5.81741E-3	9.31263E-2	1.5835E1	-1.9871E1	-1.99818E1	1.50147E1	1.72805E-8	2.51847E-3	2.51847E-3	6.29665E-3	2.3291E-2
1.6E1	3.42E2	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80017E1	-6.19888E-4	-8.80005E1	-2.38419E-5	5.53131E-3	9.31501E-2	1.58311E1	-1.98561E1	-1.99648E1	1.4989E1	1.72441E-8	2.51915E-3	2.51915E-3	6.32978E-3	2.33079E-2
1.7E1	5.14E2	0.0E0	6.87E2	4.7E2	-7.39421E-2	-8.80017E1	-8.34465E-4	-8.80005E1	-4.76837E-5	5.57899E-3	9.32932E-2	1.58103E1	-1.98558E1	-1.99868E1	1.50115E1	1.72327E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.32487E-2
1.8E1	2.147E3	1.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80019E1	-8.82149E-4	-8.80003E1	2.6226E-4	5.48363E-3	9.38654E-2	1.58017E1	-1.98489E1	-1.9978E1	1.49758E1	1.72732E-8	2.52492E-3	2.52492E-3	6.28592E-3	2.34105E-2
1.9E1	2.631E3	1.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80022E1	-8.10623E-4	-8.80003E1	9.53674E-5	5.45979E-3	9.32932E-2	1.5789E1	-1.98682E1	-1.99832E1	1.50004E1	1.72552E-8	2.52647E-3	2.52647E-3	6.34037E-3	2.33094E-2
2.0E1	2.0E1	0.0E0	8.08E2	5.58E2	-7.15461E-2	-8.80019E1	-5.24521E-4	-8.79999E1	1.43051E-4	5.48363E-3	9.33409E-2	1.58335E1	-1.98831E1	-1.9957E1	1.50106E1	1.7229E-8	2.51739E-3	2.51739E-3	6.33977E-3	2.33507E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.12368E-2	-8.80018E1	-8.10623E-4	-8.80001E1	1.43051E-4	5.48363E-3	9.37223E-2	1.57997E1	-1.987E1	-1.99773E1	1.49894E1	1.72823E-8	2.5147E-3	2.5147E-3	6.31858E-3	2.32873E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.07733E-2	-8.80017E1	-9.53674E-4	-8.79999E1	-3.09944E-4	5.57899E-3	9.31263E-2	1.58083E1	-1.98537E1	-1.99943E1	1.49674E1	1.72761E-8	2.51393E-3	2.51393E-3	6.32858E-3	2.33123E-2
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80019E1	-9.29832E-4	-8.8E1	-1.66893E-4	5.6982E-3	9.36031E-2	1.58275E1	-1.98687E1	-2.00033E1	1.49968E1	1.72852E-8	2.51443E-3	2.51443E-3	6.34588E-3	2.32892E-2