[Scan]
initial_time=2016-02-17T17:32:37
final_time=2016-02-17T17:32:57
ip_count=19
run=1032
dataset=4
scan=69
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40967E-2
qbias_imon=-3.81049E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.51331E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.09787E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.6556E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.29346E-8
mult1=-9.77651E-9
mult2=-2.65474E-9
rf_tmon=-4.15193E-3
rf_agc=3.32735E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=6.25145E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.49089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19893E1
lens5a_imon=1.99172E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.01225E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05054E1
cs_ea1_imon=2.43694E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04797E0
lens1_imon=1.63651E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.54976E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=3.01045E-5
olens2_vset=0.0E0
olens2_vmon=1.21593E-3
olens2_imon=1.16561E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.29599E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=2.30499E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26291E0
cs_ionrep_imon=1.22855E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=3.09154E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99985E1
olens4_imon=4.80046E-9
tplens_vset=0.0E0
tplens_vmon=-1.60538E0
tplens_imon=-1.47938E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9954E1
iondef3_imon=8.84642E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98495E1
iondef2_imon=9.5602E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98717E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=7.82955E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28755E0
ionrepsh_imon=1.94125E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.19973E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40291E0
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71384E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04855E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.52685E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=3.45842E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.26263E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58233E1
iondef1_imon=4.98912E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50274E1
iondef4_imon=5.25156E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=3.03177E-8
olens1_vset=0.0E0
olens1_vmon=9.05991E-4
olens1_imon=1.37542E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16618E0
cs_ionaccel_imon=-2.10053E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.46439E-6
window_vset=0.0E0
window_vmon=1.65085E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.17372E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.5032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.22059E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.48895E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06969E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6449E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.99279E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61831E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67039E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.94473E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67211E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.1494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.53906E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22602E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.32892E-2
chamber_ion_pmon=1.72477E-8
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.7582E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.968E3	2.0E0	1.47E2	4.1E1	-7.38649E-2	-8.8002E1	-7.15256E-4	-8.80004E1	2.86102E-4	5.38826E-3	9.32455E-2	1.58144E1	-1.98794E1	-1.99596E1	1.499E1	1.72777E-8	2.51334E-3	2.51334E-3	6.29645E-3	2.32892E-2
2.0E0	2.507E3	1.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80019E1	-6.91414E-4	-8.80001E1	2.38419E-4	5.45979E-3	9.30309E-2	1.58252E1	-1.98624E1	-1.9991E1	1.49754E1	1.72217E-8	2.51632E-3	2.51632E-3	6.30202E-3	2.33905E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80018E1	-8.10623E-4	-8.80001E1	2.6226E-4	5.29289E-3	9.29356E-2	1.58319E1	-1.98562E1	-1.99865E1	1.49921E1	1.72518E-8	2.51248E-3	2.51248E-3	6.30182E-3	2.33285E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.39421E-2	-8.80018E1	-1.12057E-3	-8.80005E1	-2.38419E-5	5.29289E-3	9.29594E-2	1.58041E1	-1.98939E1	-1.99762E1	1.49938E1	1.72761E-8	2.52871E-3	2.52871E-3	6.3074E-3	2.32343E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.80021E1	-1.33514E-3	-8.80004E1	2.38419E-5	5.4121E-3	9.30071E-2	1.58115E1	-1.98641E1	-1.99414E1	1.4989E1	1.7229E-8	2.5188E-3	2.5188E-3	6.31563E-3	2.3279E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80019E1	-1.14441E-3	-8.80001E1	2.6226E-4	5.26905E-3	9.29594E-2	1.58005E1	-1.98615E1	-1.99822E1	1.49962E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.8002E1	-7.15256E-4	-8.8E1	2.38419E-4	5.03063E-3	9.29594E-2	1.57885E1	-1.98226E1	-1.99751E1	1.50034E1	1.72732E-8	2.52276E-3	2.52276E-3	6.31817E-3	2.32711E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80019E1	-7.62939E-4	-8.80003E1	2.14577E-4	5.29289E-3	9.30309E-2	1.58089E1	-1.98356E1	-1.99684E1	1.50091E1	1.72951E-8	2.51953E-3	2.51953E-3	6.32125E-3	2.32882E-2
1.2E1	1.05E2	1.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80021E1	-8.10623E-4	-8.79998E1	1.90735E-4	5.4121E-3	9.29594E-2	1.58011E1	-1.98422E1	-1.99654E1	1.49964E1					
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.8002E1	-6.19888E-4	-8.80002E1	3.33786E-4	5.96046E-3	9.26971E-2	1.58262E1	-1.98682E1	-1.99455E1	1.49986E1	1.72177E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.31882E-2
1.4E1	4.6E1	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80019E1	-5.96046E-4	-8.80002E1	3.57628E-4	5.88894E-3	9.33409E-2	1.57897E1	-1.9863E1	-1.99818E1	1.50278E1	1.72805E-8	2.51417E-3	2.51417E-3	6.33977E-3	2.32513E-2
1.5E1	4.7E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80018E1	-8.34465E-4	-8.80002E1	5.48363E-4	5.62668E-3	9.30309E-2	1.58061E1	-1.98499E1	-1.99661E1	1.49999E1	1.72823E-8	2.5147E-3	2.5147E-3	6.31858E-3	2.32255E-2
1.6E1	3.34E2	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80018E1	-6.4373E-4	-8.79998E1	4.05312E-4	5.65052E-3	9.31501E-2	1.58065E1	-1.98831E1	-1.99726E1	1.4995E1	1.72584E-8	2.50989E-3	2.50989E-3	6.31278E-3	2.33109E-2
1.7E1	5.07E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80017E1	-7.86781E-4	-8.80001E1	2.6226E-4	5.8651E-3	9.31978E-2	1.58233E1	-1.98837E1	-1.99943E1	1.5031E1	1.72702E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.32084E-2
1.8E1	2.135E3	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80018E1	-7.15256E-4	-8.79999E1	4.29153E-4	5.43594E-3	9.30309E-2	1.58029E1	-1.98549E1	-1.99894E1	1.50154E1	1.72627E-8	2.51662E-3	2.51662E-3	6.28552E-3	2.32892E-2
1.9E1	2.661E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80018E1	-8.82149E-4	-8.80001E1	7.15256E-4	5.55515E-3	9.31025E-2	1.57927E1	-1.98464E1	-1.99792E1	1.49758E1	1.72627E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.31882E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80017E1	-6.4373E-4	-8.80002E1	5.72205E-4	5.62668E-3	9.30786E-2	1.57951E1	-1.98933E1	-1.99522E1	1.49938E1	1.72103E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.32892E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.8002E1	-1.00136E-3	-8.80003E1	9.53674E-5	5.72205E-3	9.3174E-2	1.58197E1	-1.98614E1	-1.99755E1	1.49848E1	1.72702E-8	2.51334E-3	2.51334E-3	6.32386E-3	2.32285E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80017E1	-5.72205E-4	-8.8E1	2.14577E-4	5.74589E-3	9.34362E-2	1.58119E1	-1.98849E1	-1.99828E1	1.49956E1	1.72255E-8	2.51603E-3	2.51603E-3	6.28103E-3	2.32928E-2
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.40967E-2	-8.80017E1	-5.96046E-4	-8.80004E1	9.53674E-5	5.76973E-3	9.33409E-2	1.58233E1	-1.98495E1	-1.9954E1	1.50274E1	1.72477E-8	2.51662E-3	2.51662E-3	6.29645E-3	2.32892E-2