[Scan]
initial_time=2016-02-17T17:33:04
final_time=2016-02-17T17:33:24
ip_count=19
run=1032
dataset=4
scan=70
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.83101E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.79369E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.08224E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.64042E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.29097E-8
mult1=-9.5357E-9
mult2=-2.6707E-9
rf_tmon=-3.68329E-3
rf_agc=3.46914E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=5.85067E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65442E0
bslens_imon=2.86181E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19877E1
lens5a_imon=1.98439E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05348E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=3.00613E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02454E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=2.43425E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04068E0
lens1_imon=1.41065E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0392E1
cs_ea2_imon=1.54267E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.97874E-5
olens2_vset=0.0E0
olens2_vmon=1.16825E-3
olens2_imon=1.16355E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=4.31581E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.29869E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26154E0
cs_ionrep_imon=1.2351E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93356E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=3.09406E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.87946E-9
tplens_vset=0.0E0
tplens_vmon=-1.63907E0
tplens_imon=-3.4136E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99894E1
iondef3_imon=8.60981E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98609E1
iondef2_imon=9.62208E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.98526E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=8.65066E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=1.92245E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34076E1
lens5b_imon=2.18543E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74249E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42553E0
os_ea2_imon=-8.40417E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00796E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71588E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04915E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.35866E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=3.45302E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.2968E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.25146E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58227E1
iondef1_imon=4.96775E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50022E1
iondef4_imon=5.34526E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27966E1
olens3_imon=3.02875E-8
olens1_vset=0.0E0
olens1_vmon=6.4373E-4
olens1_imon=1.3791E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15417E0
cs_ionaccel_imon=-2.04647E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56129E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.50669E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.23651E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.56403E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.37101E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=5.99418E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33271E1
os_fil1_imon=9.48216E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07888E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64494E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30895E1
cs_fil1_imon=9.98978E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61597E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66988E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.96467E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61924E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.01125E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22579E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.31919E-2
chamber_ion_pmon=1.72953E-8
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.16665E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.889E3	3.0E0	1.47E2	4.1E1	-7.3401E-2	-8.8002E1	-7.86781E-4	-8.80003E1	-2.14577E-4	5.43594E-3	9.32932E-2	1.58029E1	-1.98615E1	-1.9972E1	1.50214E1	1.72658E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.33507E-2
2.0E0	2.534E3	1.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80018E1	-8.82149E-4	-8.79998E1	2.14577E-4	5.53131E-3	9.33409E-2	1.57897E1	-1.98704E1	-1.99671E1	1.49992E1	1.72252E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.32892E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.8002E1	-1.28746E-3	-8.79997E1	2.38419E-4	5.24521E-3	9.32932E-2	1.57755E1	-1.98524E1	-1.99502E1	1.5001E1	1.71984E-8	2.52362E-3	2.52362E-3	6.30182E-3	2.33905E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80021E1	-1.07288E-3	-8.8E1	9.53674E-5	5.36442E-3	9.31263E-2	1.58185E1	-1.98784E1	-1.99651E1	1.49947E1	1.72292E-8	2.52301E-3	2.52301E-3	6.3126E-3	2.33713E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80023E1	-1.09673E-3	-8.79997E1	9.53674E-5	5.14984E-3	9.35078E-2	1.58221E1	-1.98653E1	-1.99567E1	1.4953E1	1.72594E-8	2.52027E-3	2.52027E-3	6.32418E-3	2.32461E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80021E1	-8.58307E-4	-8.8E1	1.19209E-4	5.45979E-3	9.30548E-2	1.57987E1	-1.98603E1	-1.99522E1	1.50106E1	1.7229E-8	2.51847E-3	2.51847E-3	6.33977E-3	2.33507E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80019E1	-6.67572E-4	-8.8E1	9.53674E-5	5.4121E-3	9.34124E-2	1.57958E1	-1.98616E1	-2.00028E1	1.49988E1	1.72777E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.32487E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80021E1	-7.39098E-4	-8.80003E1	2.14577E-4	5.22137E-3	9.34839E-2	1.58153E1	-1.98708E1	-1.99593E1	1.49841E1	1.72646E-8	2.52405E-3	2.52405E-3	6.34385E-3	2.32562E-2
1.2E1	1.1E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80023E1	-6.91414E-4	-8.80002E1	1.43051E-4	5.45979E-3	9.39131E-2	1.57981E1	-1.98495E1	-1.99522E1	1.4989E1	1.72763E-8	2.52106E-3	2.52106E-3	6.3074E-3	2.3219E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80022E1	-6.19888E-4	-8.80003E1	1.90735E-4	5.34058E-3	9.35316E-2	1.58209E1	-1.98633E1	-1.99714E1	1.50088E1	1.72552E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.33094E-2
1.4E1	4.8E1	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.8002E1	-5.96046E-4	-8.79999E1	0.0E0	5.65052E-3	9.35555E-2	1.58233E1	-1.98903E1	-1.99654E1	1.49776E1	1.72327E-8	2.51334E-3	2.51334E-3	6.31837E-3	2.32689E-2
1.5E1	4.4E1	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80021E1	-9.29832E-4	-8.80004E1	7.15256E-5	5.26905E-3	9.34362E-2	1.58026E1	-1.98912E1	-1.99768E1	1.50167E1	1.72852E-8	2.51225E-3	2.51225E-3	6.36244E-3	2.32487E-2
1.6E1	3.35E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80023E1	-1.0252E-3	-8.80003E1	1.43051E-4	5.36442E-3	9.34839E-2	1.58011E1	-1.98771E1	-1.99696E1	1.50136E1	1.72511E-8	2.51739E-3	2.51739E-3	6.29665E-3	2.32513E-2
1.7E1	5.36E2	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80023E1	-9.77516E-4	-8.80002E1	3.57628E-4	6.00815E-3	9.30548E-2	1.58356E1	-1.98712E1	-1.9929E1	1.49812E1	1.72627E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.33297E-2
1.8E1	2.156E3	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80021E1	-4.76837E-4	-8.8E1	2.86102E-4	5.43594E-3	9.31263E-2	1.58347E1	-1.98398E1	-1.99378E1	1.49662E1	1.72953E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.31523E-2
1.9E1	2.636E3	3.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80023E1	-9.29832E-4	-8.80003E1	-1.19209E-4	5.48363E-3	9.31978E-2	1.57819E1	-1.98458E1	-2.00273E1	1.4962E1	1.72552E-8	2.52647E-3	2.52647E-3	6.3074E-3	2.32689E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.16233E-2	-8.80021E1	-8.34465E-4	-8.80004E1	-9.53674E-5	5.50747E-3	9.31501E-2	1.57879E1	-1.98801E1	-1.99546E1	1.50292E1	1.72552E-8	2.51552E-3	2.51552E-3	6.29645E-3	2.32689E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80019E1	-1.09673E-3	-8.80004E1	-2.38419E-5	5.76973E-3	9.31025E-2	1.57943E1	-1.98647E1	-1.99803E1	1.49906E1	1.72177E-8	2.51771E-3	2.51771E-3	6.33486E-3	2.33094E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80023E1	-4.76837E-4	-8.80004E1	0.0E0	5.45979E-3	9.31263E-2	1.57997E1	-1.98776E1	-1.99791E1	1.50112E1	1.7207E-8	2.51203E-3	2.51203E-3	6.32356E-3	2.33308E-2
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.8002E1	-7.15256E-4	-8.80002E1	0.0E0	5.43594E-3	9.32693E-2	1.58227E1	-1.98609E1	-1.99894E1	1.50022E1	1.72953E-8	2.5131E-3	2.5131E-3	6.3074E-3	2.31919E-2