[Scan]
initial_time=2016-02-17T17:33:31
final_time=2016-02-17T17:33:51
ip_count=19
run=1032
dataset=4
scan=71
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.84322E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.70285E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=1.07963E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.61623E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.2911E-8
mult1=-9.75944E-9
mult2=-2.76441E-9
rf_tmon=-5.5831E-3
rf_agc=3.25009E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=6.08313E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67575E0
bslens_imon=2.43681E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20283E1
lens5a_imon=2.00074E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.01442E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04844E1
cs_ea1_imon=2.42396E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02333E0
lens1_imon=1.32649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64873E1
os_ef1alow_imon=2.97225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.55913E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=2.98955E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=1.16289E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=4.31365E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.30247E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63888E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26712E0
cs_ionrep_imon=1.24261E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93532E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01575E1
cs_anode1_imon=3.10127E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.79999E-9
tplens_vset=0.0E0
tplens_vmon=-1.59938E0
tplens_imon=-2.66901E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99661E1
iondef3_imon=8.86084E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9867E1
iondef2_imon=9.47729E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98447E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=7.89678E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29115E0
ionrepsh_imon=1.94053E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33922E1
lens5b_imon=2.18459E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75312E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40891E0
os_ea2_imon=-6.49026E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06149E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70993E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08219E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31061E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.46167E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.30108E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.25073E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57908E1
iondef1_imon=5.07203E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49992E1
iondef4_imon=5.22633E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=3.02855E-8
olens1_vset=0.0E0
olens1_vmon=1.07288E-3
olens1_imon=1.37765E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.8915E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55973E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=1.8731E-1
window_imon=-1.1635E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.49096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.42029E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.51259E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55495E0
defgridb_imon=6.29051E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.48253E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07047E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64598E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.99044E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61987E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67232E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1124E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69789E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.73805E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22679E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.33507E-2
chamber_ion_pmon=1.72437E-8
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.62295E-1
res40_imon=-2.80331E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.959E3	1.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80022E1	-4.76837E-4	-8.80002E1	-2.38419E-4	5.31673E-3	9.31501E-2	1.58041E1	-1.98855E1	-1.99516E1	1.50166E1	1.72327E-8	2.52318E-3	2.52318E-3	6.29645E-3	2.33499E-2
2.0E0	2.608E3	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80021E1	-5.96046E-4	-8.80001E1	-4.76837E-5	5.57899E-3	9.31025E-2	1.58263E1	-1.98531E1	-1.9963E1	1.49848E1	1.73026E-8	2.52276E-3	2.52276E-3	6.32896E-3	2.33905E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80017E1	-4.52995E-4	-8.80003E1	-1.90735E-4	5.29289E-3	9.32455E-2	1.58256E1	-1.98623E1	-1.99885E1	1.50262E1	1.72594E-8	2.52362E-3	2.52362E-3	6.32418E-3	2.32461E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.39421E-2	-8.80019E1	-6.4373E-4	-8.80003E1	2.6226E-4	5.62668E-3	9.34601E-2	1.57909E1	-1.98392E1	-1.99774E1	1.49986E1	1.72437E-8	2.52061E-3	2.52061E-3	6.3074E-3	2.31919E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80021E1	-8.34465E-4	-8.80003E1	3.57628E-4	5.50747E-3	9.34601E-2	1.57987E1	-1.98615E1	-1.99534E1	1.50039E1	1.72402E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.34312E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80019E1	-5.72205E-4	-8.80002E1	3.57628E-4	5.65052E-3	9.36031E-2	1.58089E1	-1.98753E1	-1.9978E1	1.5001E1	1.72511E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.32513E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.8002E1	-6.67572E-4	-8.79998E1	1.19209E-4	5.72205E-3	9.33886E-2	1.58107E1	-1.98753E1	-1.9963E1	1.49955E1	1.72477E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.32689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80017E1	-4.52995E-4	-8.80002E1	1.43051E-4	5.50747E-3	9.34362E-2	1.57909E1	-1.98591E1	-1.99672E1	1.50088E1	1.7206E-8	2.5225E-3	2.5225E-3	6.31299E-3	2.34113E-2
1.2E1	1.08E2	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.8002E1	-5.48363E-4	-8.80002E1	1.90735E-4	5.48363E-3	9.32217E-2	1.57927E1	-1.98591E1	-1.99708E1	1.49884E1	1.72702E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.33499E-2
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80018E1	-6.4373E-4	-8.80001E1	9.53674E-5	5.48363E-3	9.36985E-2	1.58077E1	-1.98555E1	-1.9972E1	1.50118E1	1.73152E-8	2.51334E-3	2.51334E-3	6.30192E-3	2.33297E-2
1.4E1	3.7E1	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80019E1	-7.86781E-4	-8.80004E1	2.14577E-4	5.31673E-3	9.35555E-2	1.58126E1	-1.98505E1	-1.9965E1	1.49871E1	1.72402E-8	2.51225E-3	2.51225E-3	6.3074E-3	2.32285E-2
1.5E1	4.6E1	0.0E0	6.06E2	4.11E2	-7.45602E-2	-8.80018E1	-7.15256E-4	-8.80005E1	-3.09944E-4	5.19753E-3	9.34362E-2	1.58263E1	-1.98945E1	-1.99384E1	1.50064E1	1.72732E-8	2.52276E-3	2.52276E-3	6.3074E-3	2.33706E-2
1.6E1	3.01E2	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80019E1	-7.86781E-4	-8.80005E1	2.38419E-5	5.24521E-3	9.32932E-2	1.58239E1	-1.99011E1	-1.99756E1	1.49962E1	1.72402E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.33905E-2
1.7E1	5.18E2	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80019E1	-8.10623E-4	-8.80001E1	2.86102E-4	5.45979E-3	9.35078E-2	1.57831E1	-1.98218E1	-1.99846E1	1.49992E1	1.73152E-8	2.51334E-3	2.51334E-3	6.32936E-3	2.32487E-2
1.8E1	2.062E3	1.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80016E1	-7.39098E-4	-8.80003E1	3.33786E-4	5.43594E-3	9.3174E-2	1.57778E1	-1.98659E1	-1.99508E1	1.50088E1	1.72252E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.31882E-2
1.9E1	2.617E3	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80013E1	-5.00679E-4	-8.80001E1	3.33786E-4	5.36442E-3	9.3627E-2	1.57945E1	-1.98735E1	-1.99714E1	1.49752E1	1.72953E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.33109E-2
2.0E1	2.0E1	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80015E1	-7.15256E-5	-8.8E1	1.43051E-4	5.03063E-3	9.35555E-2	1.57848E1	-1.98649E1	-1.99898E1	1.49926E1	1.72477E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.32689E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80018E1	-3.57628E-4	-8.80004E1	4.52995E-4	5.43594E-3	9.3174E-2	1.58103E1	-1.98346E1	-2.00003E1	1.49908E1	1.72477E-8	2.51225E-3	2.51225E-3	6.34588E-3	2.3472E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80019E1	-2.86102E-4	-8.80002E1	3.33786E-4	5.34058E-3	9.33409E-2	1.57896E1	-1.98605E1	-1.99773E1	1.49923E1	1.73077E-8	2.51116E-3	2.51116E-3	6.31288E-3	2.34516E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80019E1	-3.33786E-4	-8.80002E1	3.57628E-4	5.38826E-3	9.32455E-2	1.57908E1	-1.9867E1	-1.99661E1	1.49992E1	1.72437E-8	2.51632E-3	2.51632E-3	6.30202E-3	2.33507E-2