[Scan]
initial_time=2016-02-17T17:33:58
final_time=2016-02-17T17:34:18
ip_count=19
run=1032
dataset=4
scan=72
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.82157E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.61631E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.10567E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.64865E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.28842E-8
mult1=-9.93304E-9
mult2=-2.80444E-9
rf_tmon=-4.72271E-3
rf_agc=3.39705E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=6.01304E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.49371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19972E1
lens5a_imon=1.98297E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05171E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=3.0018E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=2.45619E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98759E0
lens1_imon=1.41419E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.55824E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=2.98775E-5
olens2_vset=0.0E0
olens2_vmon=1.0252E-3
olens2_imon=1.16565E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.31581E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.27816E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25151E0
cs_ionrep_imon=1.23474E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93466E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=3.09983E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.90447E-9
tplens_vset=0.0E0
tplens_vmon=-1.60309E0
tplens_imon=-2.49335E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00015E1
iondef3_imon=8.70183E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98669E1
iondef2_imon=9.39909E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=8.55732E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26744E0
ionrepsh_imon=1.91714E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33864E1
lens5b_imon=2.18437E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.142E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41845E0
os_ea2_imon=-5.46646E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00672E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.18308E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26256E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=3.45518E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.29185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.25434E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58065E1
iondef1_imon=5.13057E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5004E1
iondef4_imon=5.11821E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=3.0284E-8
olens1_vset=0.0E0
olens1_vmon=5.24521E-4
olens1_imon=1.37754E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.8915E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=1.6929E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.38944E-4
mask2_vset=0.0E0
mask2_vmon=-1.86212E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.47012E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.75869E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=6.86488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34945E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.47165E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07479E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64774E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3092E1
cs_fil1_imon=9.99129E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62324E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66827E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.11662E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79262E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.13972E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2262E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.32285E-2
chamber_ion_pmon=1.72402E-8
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.92328E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.831E3	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80017E1	-7.15256E-4	-8.8E1	2.38419E-4	5.07832E-3	9.30786E-2	1.58029E1	-1.98481E1	-1.99929E1	1.50172E1	1.73002E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.32689E-2
2.0E0	2.652E3	3.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80017E1	-5.48363E-4	-8.80003E1	-9.53674E-5	5.05447E-3	9.29117E-2	1.57958E1	-1.98453E1	-1.99702E1	1.50004E1	1.72761E-8	2.51498E-3	2.51498E-3	6.33919E-3	2.33123E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80019E1	-7.62939E-4	-8.80001E1	-1.19209E-4	5.24521E-3	9.2864E-2	1.58354E1	-1.98579E1	-1.99916E1	1.49927E1	1.72823E-8	2.51581E-3	2.51581E-3	6.34099E-3	2.33699E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80021E1	-5.24521E-4	-8.80003E1	1.90735E-4	5.48363E-3	9.32217E-2	1.58272E1	-1.98659E1	-1.99739E1	1.50085E1	1.72397E-8	2.52364E-3	2.52364E-3	6.32784E-3	2.32961E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80018E1	-4.76837E-4	-8.80003E1	2.6226E-4	5.43594E-3	9.31025E-2	1.57891E1	-1.98735E1	-1.99672E1	1.5007E1	1.72716E-8	2.51271E-3	2.51271E-3	6.3131E-3	2.34117E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80016E1	-8.58307E-4	-8.80003E1	2.38419E-5	5.14984E-3	9.28164E-2	1.58143E1	-1.98555E1	-1.99606E1	1.49842E1	1.72364E-8	2.52061E-3	2.52061E-3	6.33436E-3	2.34705E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80017E1	-4.05312E-4	-8.80001E1	1.43051E-4	5.07832E-3	9.34601E-2	1.57999E1	-1.98717E1	-1.99816E1	1.49818E1	1.72747E-8	2.5225E-3	2.5225E-3	6.31858E-3	2.32873E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80019E1	-4.05312E-4	-8.80003E1	4.05312E-4	5.53131E-3	9.32217E-2	1.58203E1	-1.98717E1	-1.9965E1	1.50097E1	1.72879E-8	2.51096E-3	2.51096E-3	6.28592E-3	2.33308E-2
1.2E1	9.0E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.8002E1	-5.96046E-4	-8.80005E1	4.76837E-5	5.53131E-3	9.35078E-2	1.58044E1	-1.98759E1	-1.99844E1	1.50172E1	1.72437E-8	2.50989E-3	2.50989E-3	6.30202E-3	2.32315E-2
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80021E1	-5.00679E-4	-8.80006E1	2.14577E-4	5.57899E-3	9.35316E-2	1.5838E1	-1.98181E1	-1.99915E1	1.50497E1	1.72702E-8	2.52538E-3	2.52538E-3	6.3074E-3	2.33297E-2
1.4E1	5.8E1	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.8002E1	-5.00679E-4	-8.80005E1	3.57628E-4	5.76973E-3	9.32932E-2	1.57819E1	-1.98825E1	-1.99666E1	1.49968E1	1.7207E-8	2.51525E-3	2.51525E-3	6.29128E-3	2.32711E-2
1.5E1	4.1E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80019E1	-4.29153E-4	-8.80005E1	3.33786E-4	5.74589E-3	9.31025E-2	1.5762E1	-1.98332E1	-1.999E1	1.5013E1	1.72028E-8	2.51334E-3	2.51334E-3	6.32936E-3	2.33702E-2
1.6E1	3.32E2	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80019E1	-7.62939E-4	-8.80002E1	1.19209E-4	5.48363E-3	9.31501E-2	1.57933E1	-1.98627E1	-2.00099E1	1.5001E1	1.72927E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.34924E-2
1.7E1	5.26E2	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80021E1	-5.48363E-4	-8.80003E1	3.33786E-4	5.57899E-3	9.32932E-2	1.58191E1	-1.9844E1	-2.00159E1	1.4995E1	1.72402E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.3472E-2
1.8E1	2.101E3	3.0E0	7.27E2	5.0E2	-7.27053E-2	-8.8002E1	-8.10623E-4	-8.80001E1	9.53674E-5	5.84126E-3	9.29594E-2	1.58077E1	-1.98374E1	-1.99852E1	1.50207E1	1.72642E-8	2.51755E-3	2.51755E-3	6.32916E-3	2.32801E-2
1.9E1	2.707E3	5.0E0	7.68E2	5.29E2	-7.286E-2	-8.8002E1	-8.10623E-4	-8.80003E1	7.15256E-4	5.48363E-3	9.30786E-2	1.58038E1	-1.98647E1	-1.99709E1	1.50118E1					
2.0E1	2.1E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80021E1	-6.91414E-4	-8.80001E1	4.29153E-4	5.57899E-3	9.29832E-2	1.57939E1	-1.98525E1	-1.99672E1	1.50064E1	1.72777E-8	2.51443E-3	2.51443E-3	6.34037E-3	2.32689E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80021E1	-7.86781E-4	-8.80003E1	3.8147E-4	5.22137E-3	9.31978E-2	1.58073E1	-1.98924E1	-1.99714E1	1.49908E1	1.72494E-8	2.51863E-3	2.51863E-3	6.31555E-3	2.32701E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80021E1	-7.86781E-4	-8.80002E1	3.33786E-4	5.53131E-3	9.30548E-2	1.58269E1	-1.98951E1	-1.99552E1	1.49968E1					
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80022E1	-7.39098E-4	-8.80003E1	4.52995E-4	5.6982E-3	9.33409E-2	1.58065E1	-1.98669E1	-2.00015E1	1.5004E1	1.72402E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.32285E-2