[Scan]
initial_time=2016-02-17T17:34:25
final_time=2016-02-17T17:34:45
ip_count=19
run=1032
dataset=4
scan=73
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.75113E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.68259E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.07722E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.63391E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.29192E-8
mult1=-9.35509E-9
mult2=-2.74057E-9
rf_tmon=-5.20938E-3
rf_agc=3.39524E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=5.6107E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64616E0
bslens_imon=2.44062E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19712E1
lens5a_imon=1.9851E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=3.00144E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02185E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04746E1
cs_ea1_imon=2.42894E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01177E0
lens1_imon=1.577E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.55506E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.99387E-5
olens2_vset=0.0E0
olens2_vmon=1.0252E-3
olens2_imon=1.16352E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=4.305E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15465E1
os_ea1_imon=2.27427E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.23226E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01623E1
cs_anode1_imon=3.08938E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99986E1
olens4_imon=4.93994E-9
tplens_vset=0.0E0
tplens_vmon=-1.61725E0
tplens_imon=-9.36015E-8
iondef3_vset=-2.0E1
iondef3_vmon=-1.99588E1
iondef3_imon=8.61334E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9823E1
iondef2_imon=9.51589E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98686E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=8.07524E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31168E0
ionrepsh_imon=1.92068E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33776E1
lens5b_imon=2.16454E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74255E1
cs_ef2b_imon=3.11208E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44795E0
os_ea2_imon=-5.57264E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06175E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.17731E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05636E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34665E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10523E1
os_restr2_imon=3.45194E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.25542E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58215E1
iondef1_imon=5.05978E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5007E1
iondef4_imon=5.13984E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=3.02292E-8
olens1_vset=0.0E0
olens1_vmon=7.15256E-4
olens1_imon=1.37741E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.94196E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=1.83706E-1
window_imon=-1.06619E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39023E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.67894E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93752E3
defgrida_imon=6.91089E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.25775E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37012E0
defgridb_imon=6.30565E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33266E1
os_fil1_imon=9.50157E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07239E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64408E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=1.00044E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64744E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66841E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93934E-2
os_fil2_imon=-2.84617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.67681E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79009E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.69813E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22558E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.27461E-3
inlet_lpb_pmon=2.32487E-2
chamber_ion_pmon=1.72402E-8
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06744E-1
res40_imon=-2.64473E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.89E3	2.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80022E1	-7.15256E-4	-8.80003E1	4.76837E-4	5.45979E-3	9.30786E-2	1.57951E1	-1.98639E1	-1.99666E1	1.50016E1	1.72777E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.33702E-2
2.0E0	2.493E3	4.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80023E1	-8.82149E-4	-8.80002E1	2.6226E-4	5.126E-3	9.3174E-2	1.58203E1	-1.98661E1	-1.99898E1	1.50085E1	1.72364E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.33905E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80023E1	-5.24521E-4	-8.80001E1	1.90735E-4	5.126E-3	9.3627E-2	1.58313E1	-1.98875E1	-1.99634E1	1.49929E1	1.72671E-8	2.51693E-3	2.51693E-3	6.31299E-3	2.3432E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80022E1	-5.48363E-4	-8.80004E1	1.19209E-4	5.17368E-3	9.35316E-2	1.57855E1	-1.98398E1	-1.99997E1	1.50028E1	1.72805E-8	2.52276E-3	2.52276E-3	6.31278E-3	2.34105E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80021E1	-9.53674E-4	-8.80003E1	2.38419E-4	5.43594E-3	9.34601E-2	1.57993E1	-1.98759E1	-1.99708E1	1.50076E1	1.73077E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.32892E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80024E1	-8.34465E-4	-8.80006E1	2.86102E-4	4.8399E-3	9.31263E-2	1.58359E1	-1.98687E1	-1.99864E1	1.50202E1	1.72777E-8	2.52099E-3	2.52099E-3	6.29645E-3	2.33094E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80023E1	-5.96046E-4	-8.80003E1	-4.76837E-5	5.24521E-3	9.30786E-2	1.58162E1	-1.98263E1	-1.99537E1	1.50208E1	1.72364E-8	2.52169E-3	2.52169E-3	6.31817E-3	2.33109E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80022E1	-7.15256E-4	-8.80002E1	4.29153E-4	5.03063E-3	9.3317E-2	1.57769E1	-1.98551E1	-1.9972E1	1.50238E1	1.72702E-8	2.51334E-3	2.51334E-3	6.31288E-3	2.33094E-2
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80021E1	-5.00679E-4	-8.80005E1	5.24521E-4	5.50747E-3	9.30071E-2	1.58104E1	-1.98799E1	-1.99437E1	1.50045E1	1.73152E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.32285E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80022E1	-4.52995E-4	-8.80003E1	-2.38419E-5	5.19753E-3	9.32217E-2	1.58277E1	-1.98667E1	-1.99469E1	1.49629E1	1.72658E-8	2.51096E-3	2.51096E-3	6.33436E-3	2.32513E-2
1.4E1	4.4E1	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80023E1	-7.62939E-4	-8.80001E1	0.0E0	5.19753E-3	9.32693E-2	1.57921E1	-1.98212E1	-1.99949E1	1.5023E1	1.72747E-8	2.51804E-3	2.51804E-3	6.31858E-3	2.32049E-2
1.5E1	4.6E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.8002E1	-7.62939E-4	-8.80001E1	2.86102E-4	5.60284E-3	9.32217E-2	1.57961E1	-1.98269E1	-1.99714E1	1.50274E1	1.72143E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.33706E-2
1.6E1	3.12E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80023E1	-4.76837E-4	-8.80008E1	-2.38419E-5	5.53131E-3	9.32693E-2	1.57867E1	-1.98651E1	-1.99468E1	1.50064E1	1.73152E-8	2.51334E-3	2.51334E-3	6.28552E-3	2.33094E-2
1.7E1	4.99E2	1.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80022E1	-3.8147E-4	-8.80004E1	1.43051E-4	5.31673E-3	9.32932E-2	1.57992E1	-1.98713E1	-1.998E1	1.50004E1	1.73077E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.32892E-2
1.8E1	2.153E3	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80022E1	-9.05991E-4	-8.80004E1	-1.66893E-4	5.26905E-3	9.30786E-2	1.5821E1	-1.98594E1	-1.9993E1	1.49966E1	1.7286E-8	2.51575E-3	2.51575E-3	6.3074E-3	2.33329E-2
1.9E1	2.574E3	3.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80024E1	-9.77516E-4	-8.80004E1	2.86102E-4	5.48363E-3	9.33409E-2	1.58125E1	-1.98464E1	-1.9993E1	1.50094E1	1.72684E-8	2.52106E-3	2.52106E-3	6.33065E-3	2.32404E-2
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80023E1	-1.14441E-3	-8.80004E1	2.86102E-4	5.126E-3	9.29832E-2	1.57879E1	-1.98969E1	-1.99786E1	1.50022E1	1.72702E-8	2.51771E-3	2.51771E-3	6.33486E-3	2.32689E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80023E1	-6.67572E-4	-8.80006E1	3.8147E-4	5.14984E-3	9.2864E-2	1.58103E1	-1.98747E1	-1.99431E1	1.49872E1	1.72511E-8	2.51954E-3	2.51954E-3	6.33977E-3	2.31919E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80023E1	-2.14577E-4	-8.80001E1	5.72205E-4	5.50747E-3	9.31025E-2	1.58185E1	-1.98759E1	-1.9962E1	1.50393E1	1.72658E-8	2.51847E-3	2.51847E-3	6.33436E-3	2.33308E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80021E1	-5.24521E-4	-8.80002E1	4.05312E-4	5.05447E-3	9.32932E-2	1.58215E1	-1.9823E1	-1.99588E1	1.5007E1	1.72402E-8	2.51443E-3	2.51443E-3	6.27461E-3	2.32487E-2