[Scan]
initial_time=2016-02-17T17:34:52
final_time=2016-02-17T17:35:12
ip_count=19
run=1032
dataset=4
scan=74
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.83272E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.4878E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.11823E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.53205E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.29249E-8
mult1=-1.05062E-8
mult2=-2.84117E-9
rf_tmon=-4.09605E-3
rf_agc=3.33071E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=6.0581E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67218E0
bslens_imon=2.52469E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19884E1
lens5a_imon=1.98501E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05192E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53512E1
cs_ef1b_imon=3.01209E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04908E1
cs_ea1_imon=2.43274E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03104E0
lens1_imon=1.35302E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64696E1
os_ef1alow_imon=2.97616E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03794E1
cs_ea2_imon=1.53764E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84363E1
cs_ef1a_imon=2.99375E-5
olens2_vset=0.0E0
olens2_vmon=9.53674E-4
olens2_imon=1.16473E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11473E1
os_restr1_imon=4.30964E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15526E1
os_ea1_imon=2.29464E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63729E1
os_ef1bup_imon=3.08058E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24047E0
cs_ionrep_imon=1.24344E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=3.09779E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99986E1
olens4_imon=4.8317E-9
tplens_vset=0.0E0
tplens_vmon=-1.64266E0
tplens_imon=-2.00652E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99802E1
iondef3_imon=8.72834E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98877E1
iondef2_imon=9.35642E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98416E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=8.00872E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29801E0
ionrepsh_imon=1.94351E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33554E1
lens5b_imon=2.20576E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74982E1
cs_ef2b_imon=3.12586E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42901E0
os_ea2_imon=-5.16527E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00659E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7054E1
cs_ef2a_imon=3.18462E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05019E0
os_ef2alow_imon=-2.62297E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26325E-1
os_ef2bup_imon=-5.39996E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10762E1
os_restr2_imon=3.45409E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30846E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02002E1
cs_anode2_imon=2.26507E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57943E1
iondef1_imon=5.19127E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49908E1
iondef4_imon=5.29259E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=3.0274E-8
olens1_vset=0.0E0
olens1_vmon=9.05991E-4
olens1_imon=1.37738E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13076E0
cs_ionaccel_imon=-1.9493E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47267E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56324E1
einzel_imon=7.58679E-6
window_vset=0.0E0
window_vmon=1.65824E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39136E-4
mask2_vset=0.0E0
mask2_vmon=-1.86157E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.8505E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.63842E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.2114E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40355E0
defgridb_imon=6.06911E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33269E1
os_fil1_imon=9.47604E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06886E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64418E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30888E1
cs_fil1_imon=9.97829E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61729E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67055E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.79264E-2
os_fil2_imon=-2.65003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95958E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67576E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36375E-1
cs_fil2_imon=-2.73735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17364E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22512E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.33507E-2
chamber_ion_pmon=1.72584E-8
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.19266E-1
res40_imon=-2.71279E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.86E3	2.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80024E1	-7.39098E-4	-8.80003E1	-4.76837E-5	5.45979E-3	9.32455E-2	1.57985E1	-1.9867E1	-1.99655E1	1.50161E1	1.72594E-8	2.5147E-3	2.5147E-3	6.32978E-3	2.3432E-2
2.0E0	2.588E3	5.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80023E1	-6.67572E-4	-8.79999E1	2.14577E-4	5.53131E-3	9.33647E-2	1.58059E1	-1.98609E1	-1.99612E1	1.49872E1	1.72552E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.34414E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80022E1	-7.86781E-4	-8.79999E1	3.57628E-4	5.31673E-3	9.3627E-2	1.5838E1	-1.98588E1	-1.99638E1	1.4995E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80022E1	-5.96046E-4	-8.79999E1	3.57628E-4	5.76973E-3	9.32455E-2	1.57867E1	-1.98588E1	-1.99773E1	1.50393E1	1.72255E-8	2.51287E-3	2.51287E-3	6.33388E-3	2.33318E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80023E1	-8.82149E-4	-8.80002E1	2.14577E-4	5.50747E-3	9.33886E-2	1.58263E1	-1.98783E1	-1.99912E1	1.5004E1	1.72658E-8	2.51739E-3	2.51739E-3	6.29665E-3	2.33706E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80021E1	-6.19888E-4	-8.80001E1	-1.43051E-4	5.53131E-3	9.31501E-2	1.57897E1	-1.98753E1	-1.99696E1	1.50082E1	1.72402E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.33702E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.48695E-2	-8.80021E1	-7.62939E-4	-8.80003E1	2.38419E-5	5.43594E-3	9.3174E-2	1.57662E1	-1.98573E1	-1.99642E1	1.49872E1	1.72927E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.33905E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80024E1	-1.12057E-3	-8.80003E1	0.0E0	5.55515E-3	9.33409E-2	1.57696E1	-1.98552E1	-1.99573E1	1.50124E1	1.72518E-8	2.5147E-3	2.5147E-3	6.31299E-3	2.35151E-2
1.2E1	8.3E1	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80021E1	-9.29832E-4	-8.80004E1	-4.76837E-5	5.22137E-3	9.32693E-2	1.58011E1	-1.98502E1	-1.99467E1	1.49978E1	1.7229E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.33308E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80023E1	-8.34465E-4	-8.80003E1	0.0E0	5.53131E-3	9.31263E-2	1.58032E1	-1.99024E1	-1.99555E1	1.49944E1	1.72646E-8	2.52119E-3	2.52119E-3	6.33081E-3	2.32897E-2
1.4E1	5.6E1	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80024E1	-8.82149E-4	-8.80005E1	-4.76837E-5	5.81741E-3	9.33409E-2	1.58443E1	-1.98825E1	-1.9969E1	1.50022E1	1.72252E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.34109E-2
1.5E1	6.1E1	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80022E1	-9.29832E-4	-8.80004E1	3.33786E-4	5.38826E-3	9.34124E-2	1.58221E1	-1.99017E1	-1.99732E1	1.50148E1	1.72927E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.33499E-2
1.6E1	3.25E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80022E1	-1.09673E-3	-8.80003E1	2.6226E-4	5.55515E-3	9.31263E-2	1.57885E1	-1.98891E1	-2.00075E1	1.4965E1	1.72364E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.33507E-2
1.7E1	5.42E2	1.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80023E1	-7.86781E-4	-8.8E1	2.38419E-5	5.22137E-3	9.33409E-2	1.58017E1	-1.98627E1	-1.99828E1	1.49788E1	1.72594E-8	2.5225E-3	2.5225E-3	6.31299E-3	2.33905E-2
1.8E1	1.999E3	2.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80021E1	-8.82149E-4	-8.80003E1	1.19209E-4	5.24521E-3	9.35555E-2	1.58179E1	-1.98699E1	-1.99774E1	1.49745E1	1.72437E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.35306E-2
1.9E1	2.636E3	1.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80022E1	-8.10623E-4	-8.80001E1	3.57628E-4	5.48363E-3	9.32217E-2	1.58233E1	-1.98771E1	-1.9969E1	1.49998E1	1.72477E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.33702E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80023E1	-1.0252E-3	-8.79997E1	2.14577E-4	5.60284E-3	9.32932E-2	1.57908E1	-1.98995E1	-1.99832E1	1.49957E1	1.72402E-8	2.51552E-3	2.51552E-3	6.33486E-3	2.34109E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80023E1	-7.39098E-4	-8.79999E1	2.14577E-4	5.4121E-3	9.33647E-2	1.57885E1	-1.98629E1	-1.99166E1	1.5028E1	1.72477E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.33297E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80022E1	-9.29832E-4	-8.80002E1	1.66893E-4	5.4121E-3	9.33886E-2	1.58339E1	-1.98664E1	-1.99785E1	1.50057E1	1.7229E-8	2.50882E-3	2.50882E-3	6.3074E-3	2.3291E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80022E1	-8.10623E-4	-8.80003E1	-9.53674E-5	5.53131E-3	9.33886E-2	1.57943E1	-1.98877E1	-1.99802E1	1.49908E1	1.72584E-8	2.5131E-3	2.5131E-3	6.32356E-3	2.33507E-2