[Scan]
initial_time=2016-02-17T17:35:46
final_time=2016-02-17T17:36:05
ip_count=19
run=1032
dataset=4
scan=76
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.76974E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.37646E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.12127E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.65842E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.29159E-8
mult1=-1.00655E-8
mult2=-2.71861E-9
rf_tmon=-4.71671E-3
rf_agc=3.31053E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=6.02961E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62468E0
bslens_imon=2.80452E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20163E1
lens5a_imon=1.9892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05252E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53448E1
cs_ef1b_imon=3.01153E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05126E1
cs_ea1_imon=2.4427E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99389E0
lens1_imon=1.39859E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.54146E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84106E1
cs_ef1a_imon=2.9809E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.16329E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.30283E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15588E1
os_ea1_imon=2.29021E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26291E0
cs_ionrep_imon=1.2336E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93312E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02025E1
cs_anode1_imon=3.09262E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.83068E-9
tplens_vset=0.0E0
tplens_vmon=-1.58135E0
tplens_imon=1.78899E-8
iondef3_vset=-2.0E1
iondef3_vmon=-1.99738E1
iondef3_imon=8.77432E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98501E1
iondef2_imon=9.40158E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=8.14295E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25871E0
ionrepsh_imon=1.93801E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.19468E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75408E1
cs_ef2b_imon=3.13947E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40651E0
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.00569E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04194E0
os_ef2alow_imon=-2.63752E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.41272E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10697E1
os_restr2_imon=3.45806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.26047E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57891E1
iondef1_imon=4.90981E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49998E1
iondef4_imon=5.24075E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=3.03102E-8
olens1_vset=0.0E0
olens1_vmon=1.35899E-3
olens1_imon=1.37527E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.96358E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=1.70491E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.28187E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.26888E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.28908E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44066E0
defgridb_imon=6.02014E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.333E1
os_fil1_imon=9.49616E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06104E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64702E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.99741E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62372E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66973E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.94473E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68629E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13021E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22558E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.3291E-2
chamber_ion_pmon=1.72658E-8
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.41292E-1
res40_imon=-2.75285E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.941E3	0.0E0	1.47E2	4.1E1	-7.43285E-2	-8.80021E1	-4.05312E-4	-8.79997E1	-3.33786E-4	5.24521E-3	9.34839E-2	1.58061E1	-1.98948E1	-1.99791E1	1.49668E1	1.72402E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.32487E-2
2.0E0	2.62E3	8.0E0	3.16E2	1.6E2	-7.39421E-2	-8.80023E1	-4.29153E-4	-8.79998E1	-1.19209E-4	5.05447E-3	9.33647E-2	1.57977E1	-1.98851E1	-1.99794E1	1.4998E1	1.72879E-8	2.50989E-3	2.50989E-3	6.30202E-3	2.32711E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80022E1	-5.48363E-4	-8.79998E1	-9.53674E-5	5.17368E-3	9.32455E-2	1.58203E1	-1.98641E1	-1.99608E1	1.49987E1	1.7336E-8	2.51804E-3	2.51804E-3	6.31858E-3	2.32873E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.8002E1	-5.48363E-4	-8.79997E1	-3.33786E-4	5.19753E-3	9.31263E-2	1.58125E1	-1.98657E1	-1.99684E1	1.50085E1	1.72833E-8	2.51709E-3	2.51709E-3	6.33919E-3	2.32928E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.8002E1	-5.24521E-4	-8.80002E1	-3.57628E-4	4.98295E-3	9.31978E-2	1.58095E1	-1.98224E1	-1.99648E1	1.5012E1	1.72927E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.31681E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.8002E1	-4.29153E-4	-8.8E1	-2.86102E-4	5.07832E-3	9.32217E-2	1.57908E1	-1.98712E1	-1.99608E1	1.50358E1	1.72702E-8	2.52318E-3	2.52318E-3	6.31288E-3	2.32487E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80021E1	-8.10623E-4	-8.80003E1	-2.86102E-4	5.4121E-3	9.33647E-2	1.58143E1	-1.98903E1	-1.99696E1	1.5001E1	1.72552E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.34109E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.80021E1	-8.82149E-4	-8.79999E1	4.05312E-4	5.29289E-3	9.3317E-2	1.57943E1	-1.98369E1	-1.99768E1	1.49908E1	1.72511E-8	2.51632E-3	2.51632E-3	6.29128E-3	2.33109E-2
1.2E1	6.8E1	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80022E1	-6.91414E-4	-8.80003E1	3.09944E-4	5.50747E-3	9.32932E-2	1.57777E1	-1.98645E1	-1.99678E1	1.49878E1	1.72402E-8	2.51662E-3	2.51662E-3	6.30192E-3	2.33094E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80022E1	-9.05991E-4	-8.80001E1	2.6226E-4	5.38826E-3	9.34124E-2	1.58011E1	-1.98615E1	-1.99636E1	1.50088E1	1.72511E-8	2.51417E-3	2.51417E-3	6.31278E-3	2.3291E-2
1.4E1	5.0E1	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.8002E1	-7.15256E-4	-8.80002E1	4.29153E-4	5.10216E-3	9.34601E-2	1.58185E1	-1.98482E1	-1.99832E1	1.49651E1	1.72927E-8	2.51225E-3	2.51225E-3	6.31837E-3	2.33297E-2
1.5E1	3.6E1	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80018E1	-1.14441E-3	-8.80002E1	4.29153E-4	5.4121E-3	9.30071E-2	1.57969E1	-1.98458E1	-1.99312E1	1.50352E1	1.72777E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.34109E-2
1.6E1	3.46E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80019E1	-7.86781E-4	-8.80003E1	3.33786E-4	5.31673E-3	9.33409E-2	1.57855E1	-1.98489E1	-2.00003E1	1.49878E1	1.72627E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.32487E-2
1.7E1	5.11E2	3.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80019E1	-9.53674E-4	-8.80002E1	3.33786E-4	5.126E-3	9.31025E-2	1.58197E1	-1.98579E1	-1.9984E1	1.50076E1	1.72477E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.32689E-2
1.8E1	2.057E3	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.8002E1	-9.53674E-4	-8.8E1	1.66893E-4	5.4121E-3	9.3174E-2	1.58035E1	-1.98392E1	-1.99949E1	1.5022E1	1.72852E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.32689E-2
1.9E1	2.627E3	1.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80022E1	-3.8147E-4	-8.80004E1	-2.38419E-5	5.29289E-3	9.31025E-2	1.57783E1	-1.98693E1	-1.99792E1	1.50196E1	1.72402E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.32487E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80023E1	-5.96046E-4	-8.80001E1	1.66893E-4	5.26905E-3	9.32217E-2	1.5783E1	-1.98612E1	-2.00026E1	1.5004E1	1.72477E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.32892E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80023E1	-6.4373E-4	-8.8E1	-4.76837E-5	5.53131E-3	9.29356E-2	1.58191E1	-1.98806E1	-1.9949E1	1.49998E1	1.73152E-8	2.51225E-3	2.51225E-3	6.3074E-3	2.33094E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80023E1	-6.67572E-4	-8.80003E1	3.57628E-4	5.67436E-3	9.30071E-2	1.57867E1	-1.98945E1	-1.9969E1	1.49728E1	1.72552E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.32689E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80025E1	-9.53674E-4	-8.80001E1	3.09944E-4	5.48363E-3	9.3317E-2	1.57891E1	-1.98501E1	-1.99738E1	1.49998E1	1.72658E-8	2.5131E-3	2.5131E-3	6.29665E-3	2.3291E-2