[Scan]
initial_time=2016-02-17T17:36:40
final_time=2016-02-17T17:36:59
ip_count=19
run=1032
dataset=4
scan=78
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.83541E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.45239E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.09391E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.67259E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.28832E-8
mult1=-1.01979E-8
mult2=-2.65673E-9
rf_tmon=-4.1279E-3
rf_agc=3.32314E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=5.86987E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69807E0
bslens_imon=2.73439E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19936E1
lens5a_imon=1.97483E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12529E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.01442E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0456E2
lens23_imon=1.02351E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05236E1
cs_ea1_imon=2.43071E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99113E0
lens1_imon=1.16643E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.9636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03749E1
cs_ea2_imon=1.55293E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=3.00144E-5
olens2_vset=0.0E0
olens2_vmon=1.0252E-3
olens2_imon=1.16216E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10937E1
os_restr1_imon=4.30283E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14869E1
os_ea1_imon=2.29267E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25977E0
cs_ionrep_imon=1.24111E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91841E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=3.09226E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.88473E-9
tplens_vset=0.0E0
tplens_vmon=-1.63789E0
tplens_imon=-2.95348E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9978E1
iondef3_imon=8.66643E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9838E1
iondef2_imon=9.35308E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0295E2
lens6_imon=2.98608E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=8.04448E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27628E0
ionrepsh_imon=1.92457E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.21127E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73102E1
cs_ef2b_imon=3.11064E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4214E0
os_ea2_imon=-7.34234E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00672E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.76366E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26256E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.44905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02031E1
cs_anode2_imon=2.25073E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58119E1
iondef1_imon=5.02792E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50214E1
iondef4_imon=5.21912E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27968E1
olens3_imon=3.03088E-8
olens1_vset=0.0E0
olens1_vmon=1.00136E-3
olens1_imon=1.37697E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.98881E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56171E1
einzel_imon=7.46439E-6
window_vset=0.0E0
window_vmon=1.62082E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.6931E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93747E3
defgrida_imon=6.89319E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.38871E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36126E0
defgridb_imon=6.01188E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.47982E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06945E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64485E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30896E1
cs_fil1_imon=9.99147E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63177E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66911E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93934E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73314E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22514E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.33297E-2
chamber_ion_pmon=1.72552E-8
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98335E-1
res40_imon=-2.6195E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.907E3	0.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80021E1	-7.15256E-4	-8.80001E1	1.66893E-4	5.55515E-3	9.32932E-2	1.58197E1	-1.98605E1	-1.9985E1	1.49976E1	1.72953E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.32711E-2
2.0E0	2.603E3	1.0E0	3.16E2	1.6E2	-7.286E-2	-8.80021E1	-8.82149E-4	-8.80003E1	2.38419E-5	5.24521E-3	9.31263E-2	1.58307E1	-1.98747E1	-1.99671E1	1.49842E1	1.72978E-8	2.51182E-3	2.51182E-3	6.30212E-3	2.32149E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80018E1	-7.39098E-4	-8.80001E1	-4.76837E-5	5.31673E-3	9.32455E-2	1.5829E1	-1.98521E1	-1.99599E1	1.4986E1	1.72671E-8	2.51693E-3	2.51693E-3	6.32418E-3	2.32666E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80017E1	-8.58307E-4	-8.80003E1	-4.52995E-4	5.14984E-3	9.28879E-2	1.58041E1	-1.98639E1	-1.99955E1	1.50106E1	1.72761E-8	2.51709E-3	2.51709E-3	6.31798E-3	2.32343E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80018E1	-1.23978E-3	-8.80001E1	-4.76837E-5	5.67436E-3	9.28879E-2	1.57933E1	-1.98849E1	-1.99672E1	1.50052E1	1.72627E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.3472E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80021E1	-9.77516E-4	-8.8E1	1.19209E-4	5.34058E-3	9.31501E-2	1.58091E1	-1.986E1	-1.99691E1	1.50103E1	1.72477E-8	2.51334E-3	2.51334E-3	6.3074E-3	2.33702E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80019E1	-8.58307E-4	-8.80002E1	7.15256E-5	5.19753E-3	9.32455E-2	1.58203E1	-1.98501E1	-2.00243E1	1.50076E1	1.72402E-8	2.51116E-3	2.51116E-3	6.32386E-3	2.33702E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80022E1	-8.10623E-4	-8.80002E1	-9.53674E-5	5.26905E-3	9.31978E-2	1.58156E1	-1.98482E1	-1.99573E1	1.49986E1	1.73026E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.3291E-2
1.2E1	8.3E1	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.8002E1	-6.19888E-4	-8.80002E1	7.15256E-5	5.26905E-3	9.31978E-2	1.58233E1	-1.98476E1	-1.99816E1	1.49824E1	1.73002E-8	2.51116E-3	2.51116E-3	6.33486E-3	2.32892E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80018E1	-5.72205E-4	-8.80001E1	2.86102E-4	5.38826E-3	9.28402E-2	1.58185E1	-1.98975E1	-1.996E1	1.49944E1	1.72852E-8	2.51443E-3	2.51443E-3	6.32936E-3	2.32892E-2
1.4E1	4.6E1	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80021E1	-5.00679E-4	-8.80003E1	1.90735E-4	5.67436E-3	9.31263E-2	1.58107E1	-1.98615E1	-1.9987E1	1.50304E1	1.731E-8	2.51632E-3	2.51632E-3	6.33977E-3	2.32513E-2
1.5E1	5.2E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80021E1	-6.91414E-4	-8.80002E1	2.6226E-4	5.36442E-3	9.29832E-2	1.57837E1	-1.98169E1	-1.99874E1	1.50196E1	1.72627E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.33297E-2
1.6E1	3.68E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.8002E1	-7.62939E-4	-8.80004E1	-9.53674E-5	5.81741E-3	9.27925E-2	1.58344E1	-1.98783E1	-1.99873E1	1.49938E1	1.72702E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.32285E-2
1.7E1	4.99E2	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80021E1	-8.58307E-4	-8.79999E1	7.15256E-5	6.03199E-3	9.24826E-2	1.58149E1	-1.98476E1	-1.99822E1	1.49848E1	1.73002E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.31882E-2
1.8E1	2.184E3	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80023E1	-7.15256E-4	-8.80003E1	-1.19209E-4	5.53131E-3	9.31501E-2	1.58173E1	-1.98735E1	-1.99774E1	1.4995E1	1.72402E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.33499E-2
1.9E1	2.634E3	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80023E1	-6.91414E-4	-8.8E1	-9.53674E-5	5.60284E-3	9.31978E-2	1.58061E1	-1.98458E1	-1.9988E1	1.50076E1	1.72252E-8	2.51662E-3	2.51662E-3	6.34037E-3	2.32487E-2
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80023E1	-5.96046E-4	-8.80001E1	-1.19209E-4	5.72205E-3	9.33409E-2	1.58065E1	-1.9847E1	-1.9978E1	1.49728E1	1.72437E-8	2.52599E-3	2.52599E-3	6.31278E-3	2.32117E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80025E1	-7.39098E-4	-8.80002E1	-2.38419E-5	5.74589E-3	9.3174E-2	1.57985E1	-1.98694E1	-1.99738E1	1.50242E1	1.72103E-8	2.52318E-3	2.52318E-3	6.31837E-3	2.32892E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80022E1	-8.10623E-4	-8.80002E1	0.0E0	5.57899E-3	9.30786E-2	1.58238E1	-1.98617E1	-1.99732E1	1.49878E1	1.73174E-8	2.5131E-3	2.5131E-3	6.3074E-3	2.3291E-2
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.8002E1	-6.67572E-4	-8.80002E1	-4.76837E-5	5.53131E-3	9.30786E-2	1.58119E1	-1.9838E1	-1.9978E1	1.50214E1	1.72552E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.33297E-2