[Scan]
initial_time=2016-02-17T17:37:33
final_time=2016-02-17T17:37:53
ip_count=19
run=1032
dataset=4
scan=80
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.7962E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.58496E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.06642E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.56999E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.29177E-8
mult1=-9.68382E-9
mult2=-2.70972E-9
rf_tmon=-5.50719E-3
rf_agc=3.25999E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=5.867E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66614E0
bslens_imon=2.65311E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20145E1
lens5a_imon=1.99172E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53322E1
cs_ef1b_imon=2.99243E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02283E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05192E1
cs_ea1_imon=2.41855E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0005E0
lens1_imon=1.67256E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.98198E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04207E1
cs_ea2_imon=1.55408E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8398E1
cs_ef1a_imon=2.97477E-5
olens2_vset=0.0E0
olens2_vmon=1.35899E-3
olens2_imon=1.16507E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11784E1
os_restr1_imon=4.32338E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=2.29129E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63413E1
os_ef1bup_imon=3.0692E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25931E0
cs_ionrep_imon=1.25091E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0253E1
cs_anode1_imon=3.10091E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.89497E-9
tplens_vset=0.0E0
tplens_vmon=-1.6186E0
tplens_imon=-2.34457E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99622E1
iondef3_imon=8.8284E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98465E1
iondef2_imon=9.5566E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0301E2
lens6_imon=2.98739E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=8.19409E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30016E0
ionrepsh_imon=1.91133E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33904E1
lens5b_imon=2.19252E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73702E1
cs_ef2b_imon=3.11677E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41793E0
os_ea2_imon=-5.08433E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71606E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01792E0
os_ef2alow_imon=-2.7096E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05232E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11051E1
os_restr2_imon=3.45374E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.29351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.27452E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58118E1
iondef1_imon=5.06122E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50029E1
iondef4_imon=5.24435E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27965E1
olens3_imon=3.02612E-8
olens1_vset=0.0E0
olens1_vmon=1.23978E-3
olens1_imon=1.37574E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17759E0
cs_ionaccel_imon=-2.03566E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56663E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=1.99323E-1
window_imon=-1.14909E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.85833E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=8.27684E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=7.13407E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.41525E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43465E0
defgridb_imon=6.10666E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33263E1
os_fil1_imon=9.46835E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06975E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64252E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3092E1
cs_fil1_imon=9.99717E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61279E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67181E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07371E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69531E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.43344E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22542E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.19668E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.996E3	3.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80021E1	-7.62939E-4	-8.8E1	0.0E0	5.55515E-3	9.2864E-2	1.5828E1	-1.98322E1	-1.99738E1	1.50412E1	1.72364E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.32315E-2
2.0E0	2.611E3	2.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80019E1	-8.34465E-4	-8.79999E1	-2.6226E-4	5.48363E-3	9.30786E-2	1.58222E1	-1.98588E1	-1.99677E1	1.50058E1	1.731E-8	2.50882E-3	2.50882E-3	6.32356E-3	2.32513E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.8002E1	-6.4373E-4	-8.8E1	7.15256E-5	5.67436E-3	9.31025E-2	1.58067E1	-1.98576E1	-1.99779E1	1.50473E1	1.72671E-8	2.51248E-3	2.51248E-3	6.29624E-3	2.33079E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80019E1	-5.24521E-4	-8.80005E1	-9.53674E-5	5.48363E-3	9.30548E-2	1.57837E1	-1.98541E1	-1.9975E1	1.50422E1	1.72437E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.32513E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80019E1	-7.86781E-4	-8.80002E1	-1.43051E-4	5.79357E-3	9.31025E-2	1.57997E1	-1.98688E1	-1.9939E1	1.49818E1	1.73453E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.32892E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80018E1	-4.29153E-4	-8.80003E1	-3.8147E-4	5.55515E-3	9.34839E-2	1.57999E1	-1.98531E1	-1.99918E1	1.49968E1	1.72437E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.32315E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80018E1	-8.58307E-4	-8.80005E1	-2.86102E-4	5.57899E-3	9.34362E-2	1.58038E1	-1.98655E1	-1.99604E1	1.4977E1	1.72658E-8	2.51632E-3	2.51632E-3	6.29665E-3	2.33109E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80019E1	-7.86781E-4	-8.80003E1	-2.14577E-4	5.57899E-3	9.35316E-2	1.57801E1	-1.98627E1	-1.99576E1	1.50142E1	1.72441E-8	2.51915E-3	2.51915E-3	6.31299E-3	2.32873E-2
1.2E1	1.07E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80014E1	-6.91414E-4	-8.80001E1	-1.19209E-4	5.55515E-3	9.34124E-2	1.57825E1	-1.98314E1	-1.99822E1	1.5019E1	1.72762E-8	2.52008E-3	2.52008E-3	6.29635E-3	2.33393E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.8002E1	-1.04904E-3	-8.80002E1	-7.15256E-5	5.48363E-3	9.28879E-2	1.57963E1	-1.98591E1	-1.99858E1	1.501E1					
1.4E1	5.6E1	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80015E1	-7.62939E-4	-8.80002E1	-4.76837E-5	5.50747E-3	9.34601E-2	1.57879E1	-1.98561E1	-1.9984E1	1.49968E1	1.72805E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.32117E-2
1.5E1	5.0E1	1.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80016E1	-4.76837E-4	-8.80001E1	1.90735E-4	5.50747E-3	9.31978E-2	1.57626E1	-1.98561E1	-1.99594E1	1.49854E1	1.72777E-8	2.5199E-3	2.5199E-3	6.3514E-3	2.32487E-2
1.6E1	3.21E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80016E1	-2.14577E-4	-8.80001E1	3.57628E-4	5.4121E-3	9.3317E-2	1.58107E1	-1.98555E1	-1.99979E1	1.49962E1	1.72627E-8	2.51334E-3	2.51334E-3	6.3074E-3	2.33297E-2
1.7E1	5.48E2	1.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80018E1	-7.15256E-4	-8.79997E1	1.19209E-4	5.93662E-3	9.33886E-2	1.58138E1	-1.98535E1	-1.99638E1	1.49842E1	1.72552E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.32084E-2
1.8E1	2.086E3	4.0E0	7.27E2	5.0E2	-7.286E-2	-8.80016E1	-4.05312E-4	-8.8E1	4.76837E-5	5.79357E-3	9.32455E-2	1.58035E1	-1.98753E1	-1.99816E1	1.50142E1	1.72477E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.32487E-2
1.9E1	2.618E3	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.8002E1	-3.09944E-4	-8.80001E1	2.14577E-4	5.67436E-3	9.35078E-2	1.57981E1	-1.98308E1	-2.00057E1	1.49986E1	1.72805E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.33109E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80018E1	-5.72205E-4	-8.8E1	3.09944E-4	5.88894E-3	9.33409E-2	1.57963E1	-1.98458E1	-1.99937E1	1.4986E1	1.72777E-8	2.51225E-3	2.51225E-3	6.32936E-3	2.31681E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80021E1	-5.96046E-4	-8.8E1	4.29153E-4	5.84126E-3	9.34601E-2	1.57949E1	-1.98753E1	-1.99408E1	1.50126E1	1.72627E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.33499E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80019E1	-5.96046E-4	-8.8E1	1.43051E-4	5.76973E-3	9.36031E-2	1.57971E1	-1.98625E1	-1.99767E1	1.49929E1	1.72732E-8	2.51793E-3	2.51793E-3	6.32626E-3	2.32513E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.8002E1	-8.10623E-4	-8.80001E1	1.43051E-4	5.24521E-3	9.31263E-2	1.58118E1	-1.98465E1	-1.99622E1	1.50029E1