[Scan]
initial_time=2016-02-17T17:38:11
final_time=2016-02-17T17:38:30
ip_count=19
run=1032
dataset=5
scan=81
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.20446E-1
ql1_imon=1.56081E-8
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=1.78654E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=7.15034E-9
ql4_vset=
ql4_vmon=-9.14237E0
ql4_imon=-2.89881E-10
mult1=-9.13836E-9
mult2=-2.9821E-9
rf_tmon=-4.65662E-3
rf_agc=3.31653E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.35539E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.58462E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=1.98199E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.01478E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05198E1
cs_ea1_imon=2.44883E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37196E0
lens1_imon=2.68916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.5375E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=3.00288E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.52212E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=4.30355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15774E1
os_ea1_imon=2.2931E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23828E0
cs_ionrep_imon=1.22207E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91846E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02061E1
cs_anode1_imon=3.09334E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20663E0
olens4_imon=3.61499E-8
tplens_vset=1.4E-1
tplens_vmon=1.56993E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26212E1
iondef3_imon=1.47874E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26783E1
iondef2_imon=1.57066E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.86044E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=1.93476E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.18206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75192E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50024E0
os_ea2_imon=-5.15643E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70969E1
cs_ef2a_imon=3.19606E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.67356E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.40071E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.47356E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.29315E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.25794E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.10815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.07692E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71795E1
olens3_imon=9.52221E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=8.90638E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0941E0
cs_ionaccel_imon=-1.92754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=1.71092E-1
window_imon=-1.14909E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.47293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.77357E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.3792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44066E0
defgridb_imon=6.22562E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.46937E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06987E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64472E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=9.98654E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61801E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6698E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.91894E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68113E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55067E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22563E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=2.32487E-2
chamber_ion_pmon=1.72103E-8
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.39781E-1
res40_imon=-2.67356E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.21447E-1	-7.98821E-1	-9.13188E0	-9.14204E0	5.8651E-3	9.31501E-2	2.73075E1	-3.26602E1	-3.26284E1	2.68129E1	1.72402E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.31681E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.214E-1	-7.9875E-1	-9.13167E0	-9.14192E0	5.67436E-3	9.31263E-2	2.73198E1	-3.26738E1	-3.26199E1	2.67886E1	1.72511E-8	2.51954E-3	2.51954E-3	6.29128E-3	2.32711E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.20923E-1	-7.98821E-1	-9.13224E0	-9.14178E0	5.29289E-3	9.32932E-2	2.73175E1	-3.2649E1	-3.26402E1	2.68094E1	1.72823E-8	2.5147E-3	2.5147E-3	6.32418E-3	2.33079E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09688E0	-8.20231E-1	-7.98631E-1	-9.13217E0	-9.14207E0	5.34058E-3	9.30786E-2	2.73098E1	-3.26779E1	-3.26378E1	2.68046E1	1.72805E-8	2.5131E-3	2.5131E-3	6.31278E-3	2.32513E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.20374E-1	-7.98821E-1	-9.13184E0	-9.14204E0	5.57899E-3	9.35555E-2	2.73045E1	-3.26603E1	-3.26374E1	2.67625E1	1.72732E-8	2.51417E-3	2.51417E-3	6.3074E-3	2.3291E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.20231E-1	-7.98655E-1	-9.13184E0	-9.14228E0	5.60284E-3	9.36985E-2	2.73189E1	-3.26356E1	-3.26434E1	2.67812E1	1.72777E-8	2.51443E-3	2.51443E-3	6.3514E-3	2.32487E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0965E0	-8.20351E-1	-7.98702E-1	-9.13153E0	-9.14218E0	5.55515E-3	9.34839E-2	2.73111E1	-3.26717E1	-3.26338E1	2.67854E1	1.72252E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.31882E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.20398E-1	-7.98368E-1	-9.13162E0	-9.14233E0	5.55515E-3	9.34362E-2	2.73151E1	-3.26791E1	-3.26372E1	2.68196E1	1.72852E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.32689E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.20255E-1	-7.98559E-1	-9.13146E0	-9.14214E0	5.65052E-3	9.32932E-2	2.73004E1	-3.26378E1	-3.26673E1	2.68036E1	1.72805E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.32711E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.20398E-1	-7.9875E-1	-9.13177E0	-9.14221E0	5.57899E-3	9.32217E-2	2.73314E1	-3.26401E1	-3.26854E1	2.67986E1	1.72879E-8	2.51954E-3	2.51954E-3	6.30202E-3	2.32513E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.20255E-1	-7.98559E-1	-9.13177E0	-9.14187E0	5.53131E-3	9.32693E-2	2.73243E1	-3.26524E1	-3.26284E1	2.6792E1	1.7206E-8	2.51581E-3	2.51581E-3	6.31858E-3	2.31639E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.19945E-1	-7.98726E-1	-9.13138E0	-9.14228E0	5.29289E-3	9.30786E-2	2.72715E1	-3.26567E1	-3.26356E1	2.67914E1	1.72552E-8	2.51225E-3	2.51225E-3	6.32386E-3	2.32689E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.20088E-1	-7.98655E-1	-9.13153E0	-9.1424E0	5.38826E-3	9.30071E-2	2.73129E1	-3.26518E1	-3.26116E1	2.68028E1	1.72702E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.33297E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.19921E-1	-7.98488E-1	-9.13138E0	-9.14221E0	5.43594E-3	9.3174E-2	2.73303E1	-3.26735E1	-3.2626E1	2.68292E1	1.72852E-8	2.51225E-3	2.51225E-3	6.31288E-3	2.32285E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.20184E-1	-7.98464E-1	-9.1315E0	-9.14199E0	5.05447E-3	9.30309E-2	2.73363E1	-3.26717E1	-3.26404E1	2.67896E1	1.73227E-8	2.52099E-3	2.52099E-3	6.34588E-3	2.32487E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.2016E-1	-7.98583E-1	-9.13136E0	-9.14228E0	5.34058E-3	9.30309E-2	2.73015E1	-3.26873E1	-3.26302E1	2.68034E1	1.72702E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.32892E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.20374E-1	-7.98941E-1	-9.13141E0	-9.14221E0	5.34058E-3	9.31263E-2	2.73267E1	-3.26681E1	-3.26404E1	2.6784E1	1.72627E-8	2.51552E-3	2.51552E-3	6.34037E-3	2.34109E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.20422E-1	-7.98655E-1	-9.13098E0	-9.14221E0	5.07832E-3	9.30786E-2	2.73173E1	-3.26625E1	-3.26167E1	2.67764E1	1.72702E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.33905E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-8.20041E-1	-7.98559E-1	-9.13115E0	-9.14226E0	5.126E-3	9.28402E-2	2.73345E1	-3.26693E1	-3.26561E1	2.67704E1	1.72471E-8	2.51603E-3	2.51603E-3	6.33388E-3	2.32733E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.20446E-1	-7.98798E-1	-9.13122E0	-9.14237E0	5.07832E-3	9.34362E-2	2.73099E1	-3.26783E1	-3.26212E1	2.6804E1	1.72103E-8	2.51771E-3	2.51771E-3	6.28552E-3	2.32487E-2