[Scan]
initial_time=2016-02-17T17:38:38
final_time=2016-02-17T17:38:57
ip_count=19
run=1032
dataset=5
scan=82
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.19826E-1
ql1_imon=1.40171E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=1.93948E-9
ql3_vset=
ql3_vmon=-9.13062E0
ql3_imon=3.5666E-9
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=3.58939E-11
mult1=-9.61998E-9
mult2=-2.7226E-9
rf_tmon=-5.2935E-3
rf_agc=3.24624E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.46716E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66444E0
bslens_imon=2.36275E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19842E1
lens5a_imon=2.00669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05284E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=3.01838E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04664E1
cs_ea1_imon=2.43991E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39852E0
lens1_imon=2.56095E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.55293E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.98342E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.52199E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.30896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15335E1
os_ea1_imon=2.28205E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26862E0
cs_ionrep_imon=1.22554E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01485E1
cs_anode1_imon=3.10992E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=3.54321E-8
tplens_vset=1.4E-1
tplens_vmon=1.61135E0
tplens_imon=-5.14791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26032E1
iondef3_imon=1.50161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26488E1
iondef2_imon=1.57063E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98569E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.94597E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31581E0
ionrepsh_imon=1.93448E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.20242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48511E0
os_ea2_imon=-5.74961E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00849E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71858E1
cs_ef2a_imon=3.17587E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.096E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.20249E-1
os_ef2bup_imon=-5.49547E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10733E1
os_restr2_imon=3.46996E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.26551E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73291E1
iondef1_imon=1.09635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67806E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.00567E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=8.90273E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0935E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.60134E-6
window_vset=0.0E0
window_vmon=1.94517E-1
window_imon=-9.11223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.38936E-4
mask2_vset=0.0E0
mask2_vmon=-1.86248E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.40287E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.5074E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.15865E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4528E0
defgridb_imon=6.3552E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33282E1
os_fil1_imon=9.4964E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06861E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64714E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=1.00028E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62486E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6719E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77472E-2
os_fil2_imon=-2.76808E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.38385E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.34762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05212E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22695E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.33507E-2
chamber_ion_pmon=1.72511E-8
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.87833E-1
res40_imon=-2.68077E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.19969E-1	-7.98798E-1	-9.13055E0	-9.14221E0	5.53131E-3	9.32217E-2	2.72992E1	-3.26443E1	-3.26343E1	2.68099E1	1.72584E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.33507E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.20041E-1	-7.98774E-1	-9.13057E0	-9.14214E0	5.38826E-3	9.3317E-2	2.73118E1	-3.26744E1	-3.26383E1	2.67932E1	1.73026E-8	2.51417E-3	2.51417E-3	6.32356E-3	2.33109E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.20136E-1	-7.98464E-1	-9.13053E0	-9.14233E0	5.6982E-3	9.29832E-2	2.7334E1	-3.26797E1	-3.26284E1	2.68186E1	1.72518E-8	2.51804E-3	2.51804E-3	6.32418E-3	2.32873E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.19755E-1	-7.98798E-1	-9.13019E0	-9.1419E0	5.79357E-3	9.32693E-2	2.73128E1	-3.26626E1	-3.26225E1	2.67505E1	1.72658E-8	2.51847E-3	2.51847E-3	6.30202E-3	2.31919E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.19874E-1	-7.98631E-1	-9.13055E0	-9.14204E0	5.43594E-3	9.32693E-2	2.72909E1	-3.26632E1	-3.26083E1	2.67972E1	1.72217E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.32513E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.20017E-1	-7.98655E-1	-9.13057E0	-9.14183E0	5.07832E-3	9.3317E-2	2.72781E1	-3.26657E1	-3.26657E1	2.68262E1	1.72327E-8	2.51771E-3	2.51771E-3	6.29645E-3	2.32487E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.19826E-1	-7.98416E-1	-9.1306E0	-9.14204E0	5.26905E-3	9.30786E-2	2.73063E1	-3.26549E1	-3.26116E1	2.67788E1	1.72805E-8	2.5131E-3	2.5131E-3	6.31817E-3	2.34305E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.19731E-1	-7.98583E-1	-9.13076E0	-9.14187E0	5.45979E-3	9.30071E-2	2.72991E1	-3.265E1	-3.2614E1	2.68172E1	1.72702E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.33094E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.19778E-1	-7.98297E-1	-9.13074E0	-9.14211E0	5.38826E-3	9.3317E-2	2.72967E1	-3.26464E1	-3.26134E1	2.6819E1	1.72552E-8	2.51007E-3	2.51007E-3	6.31837E-3	2.31882E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.19778E-1	-7.98631E-1	-9.13053E0	-9.14202E0	5.43594E-3	9.29117E-2	2.72951E1	-3.26756E1	-3.26142E1	2.67818E1	1.73227E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.33499E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.19969E-1	-7.9875E-1	-9.13088E0	-9.14218E0	5.34058E-3	9.30071E-2	2.73074E1	-3.26718E1	-3.26104E1	2.68215E1	1.72658E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.32513E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09665E0	-8.19874E-1	-7.98416E-1	-9.13057E0	-9.14209E0	5.19753E-3	9.3317E-2	2.72936E1	-3.26979E1	-3.26222E1	2.67664E1	1.7305E-8	2.52025E-3	2.52025E-3	6.30212E-3	2.32733E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.20017E-1	-7.98655E-1	-9.13048E0	-9.14192E0	5.38826E-3	9.31978E-2	2.73045E1	-3.2662E1	-3.26484E1	2.67824E1	1.72763E-8	2.51411E-3	2.51411E-3	6.31321E-3	2.32404E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.20112E-1	-7.98917E-1	-9.13022E0	-9.14211E0	5.31673E-3	9.31501E-2	2.72733E1	-3.26518E1	-3.26206E1	2.67926E1	1.7229E-8	2.5131E-3	2.5131E-3	6.31278E-3	2.3291E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.19969E-1	-7.98655E-1	-9.13036E0	-9.14214E0	5.91278E-3	9.33647E-2	2.73369E1	-3.26843E1	-3.26224E1	2.68022E1	1.72702E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.32689E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.19969E-1	-7.98726E-1	-9.13022E0	-9.14218E0	5.62668E-3	9.3174E-2	2.73255E1	-3.26885E1	-3.26374E1	2.68099E1	1.72627E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.32285E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.19921E-1	-7.98821E-1	-9.13048E0	-9.14207E0	5.60284E-3	9.31501E-2	2.7308E1	-3.26735E1	-3.2637E1	2.67812E1	1.72927E-8	2.51771E-3	2.51771E-3	6.29645E-3	2.33094E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0934E0	-8.20255E-1	-7.98655E-1	-9.13055E0	-9.14195E0	5.45979E-3	9.32693E-2	2.73104E1	-3.26714E1	-3.26089E1	2.6792E1	1.72327E-8	2.51709E-3	2.51709E-3	6.30212E-3	2.32538E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.19921E-1	-7.98607E-1	-9.13074E0	-9.14207E0	5.29289E-3	9.3174E-2	2.73246E1	-3.26726E1	-3.26343E1	2.68058E1	1.70827E-8	2.52599E-3	2.52599E-3	6.31817E-3	2.32711E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.19826E-1	-7.98678E-1	-9.13062E0	-9.14178E0	5.29289E-3	9.32693E-2	2.73291E1	-3.26488E1	-3.26032E1	2.67806E1	1.72511E-8	2.5131E-3	2.5131E-3	6.32896E-3	2.33507E-2